• Title/Summary/Keyword: HF charging process

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Development and Selection of Accident Scenarios for Risk Assessment in HF Charging Process (HF 충진 공정의 위험성 평가를 위한 가상사고 시나리오 발굴 및 선정)

  • Jang, Chang-Bong
    • Journal of the Korean Institute of Gas
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    • v.17 no.4
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    • pp.26-32
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    • 2013
  • The best way to prevent major occupational accidents is prohibiting use of hazardous substances such as flammable gas, toxic gas whereas using alternative substances that ensured safety. but if there are no economic efficiency and substituting technologies of alternative substances, the best way is preparing to prevent accidents thoroughly. Therefore, this study has developed and selected release scenarios to use and apply for consequence analysis and emergency action plan for HF charging process of chemical plants that have HF release accidents and high probability of release accidents.

Effects of DI Rinse and Oxide HF Wet Etch Processes on Silicon Substrate During Photolithography (반도체 노광 공정의 DI 세정과 Oxide의 HF 식각 과정이 실리콘 표면에 미치는 영향)

  • Baik, Jeong-Heon;Choi, Sun-Gyu;Park, Hyung-Ho
    • Korean Journal of Materials Research
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    • v.20 no.8
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    • pp.423-428
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    • 2010
  • This study shows the effects of deionized (DI) rinse and oxide HF wet etch processes on silicon substrate during a photolithography process. We found a fail at the wafer center after DI rinse step, called Si pits, during the fabrication of a complementary metal-oxide-semiconductor (CMOS) device. We tried to find out the mechanism of the Si pits by using the silicon wafer on CMOS fabrication and analyzing the effects of the friction charge induced by the DI rinsing. The key parameters of this experiment were revolution per minute (rpm) and time. An incubation time of above 10 sec was observed for the formation of Si pits and the rinsing time was more effective than rpm on the formation of the Si pits. The formation mechanism of the Si pits and optimized rinsing process parameters were investigated by measuring the charging level using a plasma density monitor. The DI rinse could affect the oxide substrate by a friction charging phenomenon on the photolithography process. Si pits were found to be formed on the micro structural defective site on the Si substrate under acceleration by developed and accumulated charges during DI rinsing. The optimum process conditions of DI rinse time and rpm could be established through a systematic study of various rinsing conditions.

High Performance Separator at High-Temperature for Lithium-ion Batteries (고온 싸이클 성능이 우수한 리튬 이차전지 분리막)

  • Yoo, Seungmin
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.2
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    • pp.789-793
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    • 2021
  • A lithium secondary battery is the most promising candidate for future energy storage devices. On the other hand, the battery capacity decreases gradually due to the small amount of water and decomposition of the salts during the charging and discharging process, which deteriorates at high temperatures. Many researchers focused on increasing the cycling performance, but there have been few studies on the fundamental problem that removes water and HF molecules. In this study, silane molecules that are capable of absorbing water and HF molecules are introduced to the separator. Firstly, silica-coated amino-silane (APTES, 3-aminopropyltriethoxysilane) was synthesized, then the silica reacted with epoxy-silane, GPTMS ((3-glycidyloxypropyl)trimethoxysilane). A ceramic-coated separator was fabricated using the silane-coated silica, which is coated on porous polyethylene substrates. FT-IR spectroscopy and TEM analysis were performed to examine the chemical composition and the shape of the silane-coated silica. SEM was performed to confirm the ceramic layers. LMO half cells were fabricated to evaluate the cycling performance at 60 ℃. The cells equipped with a GPTMS-silica separator showed stable cycling performance, suggesting that it would be a solution for improving the cycling performance of the Li-ion batteries at high temperatures.

Hydrogenation and Electrochemical Characteristics of Amorphous-nanostructured Mg-based Alloys

  • Gebert, A.;Khorkounov, B.;Schultz, L.
    • Journal of Powder Materials
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    • v.13 no.5 s.58
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    • pp.327-335
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    • 2006
  • In the development of new hydrogen absorbing materials for a next generation of metal hydride electrodes for rechargeable batteries, metastable Mg-Ni-based compounds find currently special attention. Amor phous-nanocrystalline $Mg_{63}Ni_{30}Y_7$ and $Mg_{50}Ni_{30}Y_{20}$ alloys were produced by mechanical alloying and melt-spinning and characterized by means of XRD, TEM and DSC. On basis of mechanically alloyed Mg-Ni-Y powders, complex hydride electrodes were fabricated and their electrochemical behaviour in 6M KOH (pH=14,8) was investigated. The electrodes made from $Mg_{63}Ni_{30}Y_7$ powders, which were prepared under use of a SPEX shaker mill, with a major fraction of nanocrystalline phase reveal a higher electrochemical activity far hydrogen reduction and a higher maximum discharge capacity (247 mAh/g) than the electrodes from alloy powder with predominantly amorphous microstructure (216 mAh/g) obtained when using a Retsch planetary ball mill at low temperatures. Those discharge capacities are higher that those fur nanocrystalline $Mg_2Ni$ electrodes. However, the cyclic stability of those alloy powder electrodes was low. Therefore, fundamental stability studies were performed on $Mg_{63}Ni_{30}Y_7$ and $Mg_{50}Ni_{30}Y_{20}$ ribbon samples in the as-quenched state and after cathodic hydrogen charging by means of anodic and cathodic polarisation measurements. Gradual oxidation and dissolution of nickel governs the anodic behaviour before a passive state is attained. A stabilizing effect of higher fractions of yttrium in the alloy on the passivation was detected. During the cathodic hydrogen charging process the alloys exhibit a change in the surface state chemistry, i.e. an enrichment of nickel-species, causing preferential oxidation and dissolution during subsequent anodization. The effect of chemical pre-treatments in 1% HF and in $10\;mg/l\;YCl_3/1%\;H_2O_2$ solution on the surface degradation processes was investigated. A HF treatment can improve their anodic passivation behavior by inhibiting a preferential nickel oxidation-dissolution at low polarisation, whereas a $YCl_3/H_2O_2$ treatment has the opposite effect. Both pre-treatment methods lead to an enhancement of cathodically induced surface degradation processes.