• 설비공학논문집
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• 제6권4호
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• pp.417-426
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• 1994

Filter media performance was evaluated using monodisperse NaCl particles with Differential Mobility Analyzer and Ultrafine Condensation Particle Counter. Low or medium performance filters show that the most penetrating particles size(MPPS) is around $0.3{\mu}m$ in diameter and is shifted to smaller sizes as the filter face velocity increases. However, HEPA and ULPA filters show MPPS is around $0.15{\mu}m$ in diameter and is also shifted to $0.1{\mu}m$ in diameter as the face velocity increases. In case of electret filter, the MPPS is found around $0.04{\mu}m$ region for Boltzmann charge equilibrium particles. There is a tendency of strong collection efficiency decrease for large particles as the face velocity increases on the contrary to the other filters. One of the medium performance filter efficiency was compared with filtration theory and the good agreetment was found in the experimental range.

• 한국생산제조학회지
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• 제22권4호
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• pp.635-642
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• 2013

We have prepared a DEMO conveyor device for conveying a large 8G class glass sheet using ahorizontal air-cushion system. This device consists of the body frame and the driving frame that are combined to realize a frame for conveying glass without any contact.The driving frame comprises an air flotation table (bed), drive roller supported at both ends, and ASU. Part of the ASU serves to control the airflow as the chamber consists of a porous pad and fan. Fiber filters replace the porous pad and axial fans serve as an air compressor. In addition, to determine the appropriate glass levitation from the air table, this study examined the design specifications of the applied filter (discharge speed of HEPA and ULPA filters, and flow rate) as well as the height of the and the proper supporting roller height (14mm). Then, after adjusting the position of the ASU and the number of ASUs required to configure the UNIT air floating C/V, we analyzed the height and flatness of the glass and derived the appropriate layout (1140-mm distance between ASUs).