• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.220.1-220.1
• /
• 2014

본 연구에서는 PECVD 공법 중에 이온화 에너지가 높은 선형이온빔 소스를 이용하여 고온에서 전도성 카본박막을 코팅하였다. 카본 박막 코팅을 위한 Precursor는 $C_2H_2$ gas를 이용하였으며, 온도에 따른 카본 박막의 전기적 특성 및 두께에 따른 카본 박막 성장 구조를 분석하였다. 카본 박막의 전기적 특성은 Interfacial contact resistance (ICR) 방법으로 측정하였으며, 접촉 저항 측정을 위한 모재는 SUS316L stainless steel을 사용하였고 카본 박막 성장 구조 분석을 위해서는 폴리싱된 Si-wafer를 사용하였다. 선형이온빔 소스를 이용하여 상온에서 증착한 카본 코팅의 접촉저항 값은 50 nm 코팅 두께에서 $660m{\Omega}cm^2@10kgf/cm^2$으로 비정질상의 특성을 나타냈으며, 고온에서는 $14.8m{\Omega}cm^2@10kgf/cm^2$으로 온도가 증가함에 따라 비정질상의 카본 박막이 전도성을 가지는 카본박막으로의 성장을 확인할 수 있었다. 또한 전도성 카본 박막의 성장 구조 분석은 FE-SEM 및 Raman spectrum 분석을 통해 확인하였으며, 그 결과 코팅 두께가 증가할수록 카본 입자들은 수nm에서 약 150 nm의 카본 cluster를 형성하며 성장하였다. 이때 전도성 카본 박막의 두께에 따른 접촉저항의 값은 고온 조건에서 카본 박막의 두께가 약 100 nm일 때, $12.1m{\Omega}cm^2@10kgf/cm^2$의 가장 낮은 값을 가졌다. 위의 결과를 경제성이 아주 우수한 대면적 전도성 나노 카본 박막의 상용화 가능성이 높아질 것으로 기대된다.

• Korean Journal of Materials Research
• /
• v.20 no.12
• /
• pp.645-648
• /
• 2010

The structure and morphology of epitaxial layer defects in epitaxial Si wafers produced by the Czochralski method were studied using focused ion beam (FIB) milling, scanning electron microscopy (SEM), and transmission electron microscopy (TEM). Epitaxial growth was carried out in a horizontal reactor at atmospheric pressure. The p-type Si wafers were loaded into the reactor at about $800^{\circ}C$ and heated to about $1150^{\circ}C$ in $H_2$. An epitaxial layer with a thickness of $4{\mu}m$ was grown at a temperature of 1080-$1100^{\circ}C$. Octahedral void defects, the inner walls of which were covered with a 2-4 nm-thick oxide, were surrounded mainly by $\{111\}$ planes. The formation of octahedral void defects was closely related to the agglomeration of vacancies during the growth process. Cross-sectional TEM observation suggests that the carbon impurities might possibly be related to the formation of oxide defects, considering that some kinds of carbon impurities remain on the Si surface during oxidation. In addition, carbon and oxygen impurities might play a crucial role in the formation of void defects during growth of the epitaxial layer.

• Journal of the Korean institute of surface engineering
• /
• v.29 no.6
• /
• pp.788-796
• /
• 1996

$TiO_2$ films prepared by RF magnetron sputtering, electron beam evaporation, ion assisted deposition (IAD) and sol-gel method are prepared on c-Si substrate and vitreous silica substrate respectively. From the transmission spectra of $TiO_2$ films on vitreous silica substrate in the spectral region from 190 nm to 900 nm, k($\lambda$) of $TiO_2$ is obtained. Using k($\lambda$) in the interband transition region the coefficients of the quantum mechanical dispersion relation of an amorphous $TiO_2$ and hence n($\lambda$) including the optically opaque region of above fundamental transition energy are obtained. The spectroscopic ellipsometry spectra of $TiO_2$ films in the spectral region of 1.5-5.0eV are model analyzed to get the film packing density variation versus i) substrate material, ii) film thickness and iii) film growth technique. The complex refractive index change of these $TiO_2$ films versus water condensation is also studied. Film micro-structures by SE modelling results are compared with those by atomic force microscopy images and X-ray diffraction data.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.12 no.1
• /
• pp.91-100
• /
• 2008

Multi-stepwise Thermal Prestressing Method(TPSM) is a newly proposed prestressing method, which is combined the external prestressing method and the external bonding method. Multi-stepwise thermal prestressing force is induced by cooling process of cover-plate in the multi-stepwise temperature distribution after the cover-plate being bolted to the girder. In this study, the heating capacity test of the developed heating system for applying the multi-stepwise TPSM effectively and multi-stepwise TPSM inducing test of H-beam is performed. Also, a field test of the rhamen type temporary bridge is carried out to evaluate the effect and application of the multi-stepwise TPSM. Truck load was loaded and compared with the structure analysis results.

• Journal of the Korean Society for Marine Environment & Energy
• /
• v.5 no.3
• /
• pp.35-44
• /
• 2002

In this paper, the analytic studies on the wave control performance of moored pontoon-type floating breakwater are presented. A two-dimensional eigenfunction expansion method is adopted to study the motion responses and the transmission coefficients of pontoon-type floating breakwater in beam waves. The stiffness coefficients of mooring line are idealized as linear elastic spring. Comparison of the analytical results with a numerical results (FEM) shows good agreement over a wide range of frequencies. The performance of mooed pontoon-type floating breakwater is tested with various design parameters such as sectional geometry, mooring line characteristics and wave frequencies. It is found that the properly designed floating breakwater can be an effective wave control structure.

• Proceedings of the KOSOMBE Conference
• /
• v.1998 no.11
• /
• pp.74-75
• /
• 1998

The present study employs weak shock theory and bio-heat transfer function to predict the temperature rise due to nonlinear propagation of high amplitude ultrasound. The theory shows that, for the focused ultrasound which is assumed to have an gaussian beam profile and has the focal intensity of $1000W/cm^2$, the temperature rise of liver tissue exposed for 1 second to the energy lost during nonlinear propagation goes up to about $30^{\circ}C$. This indicate that it is necessary to consider the nonlinear propagation induced heating enhancement when setting exposure condition of high intensity focused ultrasound used for cancer thermotherapy.

• Transactions of Materials Processing
• /
• v.16 no.8
• /
• pp.575-581
• /
• 2007

The high dimensional accuracy of the cold forged part could be acquired by the accurate dimensional modification for the die, which is, the dimensional changes from the die through forged part to final part after heat treatment were considered. The experimental and FEM analysis are performed to investigate the dimensional changes from the die to final part on cold forged part, comparing with the machined gear. The dimension of forged part is compared with the die dimension at each stage, such as, machined die, cold forged part, and heat-treated-part. The elastic characteristics and thermal influences on forging stage are analyzed numerically by the $DEFORM-3D^{TM}$. The analyzed residual stress of forged part is considered into the FE-analysis for heat treatment using the $DEFORM-HT^{TM}$. The effects of residual stress affected into the dimensional changes could be investigated by the FEA. Each residual stress of gears was measured practically by laser beam type measurement.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.172-172
• /
• 2010

$MgB_2$ doped with $TiO_2$ was prepared by the in-situ solid state reaction to study the effects of $TiO_2$ dopant on the flux pinning behavior of $MgB_2$ superconductor. From the field-cooled and the zero-field-cooled temperature dependences of magnetization, the realms of vortex-glass and vortex-liquid states of $TiO_2$-doped $MgB_2$ were determined in the H-T diagram (the temperature dependence of upper critical magnetic field and irreversibility line). The critical current density was estimated from the width of hysteresis loops in the framework of Beam's model at different temperatures. The results indicate that nano-scale $TiO_2$ inclusions play a role of the effective pinning centers and lead to the enhanced upper critical field and critical current density. It is suggested that the grain-boundary pinning mechanism is realized in $TiO_2$-doped $MgB_2$ superconductor.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.15 no.1
• /
• pp.310-317
• /
• 1995

Crack detection technique by ultrasonics in structures and components made of austenitic stainless steel often loses its reliability due to the material characteristics during inservice inspection of nuclear power plants, especially in the area of detection and sizing in centrifugally cast stainless steel pipings. In order to understand and overcome this problem, computer program for tracing the ultrasonic rays within material has been developed to simulate the process of defect detection within weld. The program simulates through transmission and reflection technique in crack detection of austenitic stainless steel as well as ultrasonic beam propagation through multiple media including stainless steel cladding interface.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.4
• /
• pp.490-495
• /
• 2011

A slide-rail system is widely used in home appliances, furniture, mechanical rigs, and so many other applications; due to its high strength and performance for easy moving heavy objectives. In general, a pair of side slide-rails is set on both sides of a drawer to support and move it. So an unbalanced sliding motion can occur during opening and closing a drawer with pull and push force. To settle this problem, single central slide-rail having three collapsible rail-bodies was firstly proposed in this work. 'H'-beam shaped rail-body was newly designed to have enough bending and twisting strength. The experimental test showed that the proposed rail could be applied to large-size home appliances for easy moving drawer with heavy weight.