• Title/Summary/Keyword: H adsorption

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Post Ru CMP Cleaning for Alumina Particle Removal

  • Prasad, Y. Nagendra;Kwon, Tae-Young;Kim, In-Kwon;Park, Jin-Goo
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.34.2-34.2
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    • 2011
  • The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

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Treatment of Aquacultural Recirculating Water by Foam Separation - I. Characteristics of Protein Separation- (포말 분리법을 이용한 양어장 순환수 처리 - I Protein 분리특성 -)

  • SUH Kuen-Hack;LEE Min-Gyu
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.28 no.5
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    • pp.599-606
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    • 1995
  • The feasibility of foam separation to remove protein produced from fish culture water was investigated, By assuming foam separation column as a single well-mixed pool, a simplified model for foam separator conditions was alse studied under the batch operation. The model indicated that the protein removal could be described as a first-order reaction whose rate increases with both superficial air velocity and protein concentration in the bulk solution. from ,the results of an experimental study on the effects of superficial air velocity, the protein concentration, temperature, and pH on protein removal, the superficial air velocity and initial protein concentration in bulk solution were found to be important operational factors. Other experimental results important that foam separator operated under batch conditions would be considered as a completely mixed reactor. The protein removal rate by foam separation process was increased proportionally with the superficial air velocity, and the adsorptive removal rate of protein was found to obey Langmuir adsorption formula. The preposed simplified model was verified with the experimental data obtained from this study. Under the experimental range used, both temperature and pH did not affect the protein removal.

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Stability of Zirconium Metal Organic Frameworks with 9,10- Dicarboxylic Acid Anthracene as Ligand

  • Xiao, Sheng-Bao;Chen, Sai-Sai;Liu, Jin;Li, Zhen;Zhang, Feng-Jun;Wang, Xian-Biao;Oh, Won-Chun
    • Journal of the Korean Ceramic Society
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    • v.53 no.2
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    • pp.200-205
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    • 2016
  • With high specific surface area and pore structural diversity, MOFs show important applications in gas storage, catalysis, sensing, separation, and biomedicine. However, the stability of the structure of MOFs has restricted their application and development. In this study, zirconium metal organic frameworks with 9,10-dicarboxylic acid anthracene as ligand, named UIO-66 ($H_2DCA$), were synthesized and their properties and structures were characterized by XRD, SEM, and $N_2$ adsorption. We focus on the stability of the structure of UIO-66 ($H_2DCA$) under different conditions (acid, alkali, and water). The structural changes or ruins of UIO-66 ($H_2DCA$) were traced by means of XRD, TG, and FT-IR under different conditions. The results show that the UIO-66 ($H_2DCA$) materials are stable at 583 K, and that this structural stability is greatly influenced by different types of acid and alkali compounds. Importantly, we found that the structures maintain their stability in environments of nitric acid, triethylamine, and boiling water.

Effects of Heavy Metal and pH on Bacterial Growth Isolated from the Contaminated Smelter Soil (제련소 인근 토양에서 분리한 박테리아 생장에 미치는 중금속 및 pH 영향)

  • Keum, Mi-Jung;Yoon, Min-Ho;Nam, In-Hyun
    • Journal of Soil and Groundwater Environment
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    • v.20 no.4
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    • pp.113-121
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    • 2015
  • The contaminated soil at abandoned smelter areas present challenge for remediation, as the degraded materials are typically deficient in nutrients, and rich in toxic heavy metals and metalloids. Bioremediation technique is to isolate new strains of microorganisms and develop successful protocols for reducing metal toxicity with heavy metal tolerant species. The present study collected metal contaminated soil and characterized for pH and EC values, and heavy metal contents. The pH value was 5.80, representing slightly acidic soil, and EC value was 13.47 mS/m. ICP-AES analytical results showed that the collected soil samples were highly contaminated with various heavy metals and metalloids such as lead (183.0 mg/kg), copper (98.6 mg/kg), zinc (91.6 mg/kg), and arsenic (48.1 mg/kg), respectively. In this study, a bacterial strain, Bacillus cereus KM-15, capable of adsorbing the heavy metals was isolated from the contaminated soils by selective enrichment and characterized to apply for the bioremediation. The effects of heavy metal on the growth of the Bacillus cereus KM-15 was determined in liquid cultures. The results showed that 100 mg/L arsenic, lead, and zinc did not affect the growth of KM-15, while the bacterial growth was strongly inhibited by copper at the same concentration. Further, the ability of the bacteria to adsorb heavy metals was evaluated.

Comparative Studies on Immobilized Invertase on Sepharose and Phenoxyacetyl Cellulose (Sepharose와 Phenoxyacetyl Cellulose에 고정화 시킨 Invertase에 관한 비교 연구)

  • Choi, Choon-Soon;Jeon, Moon-Jin;Byun, Si-Myung
    • Korean Journal of Food Science and Technology
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    • v.12 no.3
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    • pp.176-181
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    • 1980
  • Yeast invertase was immobilized on the 2 kinds of matrices : one is an indirectly coupled enzyme to the cyanogen bromide activated Sepharose by using ${\omega}-aminohexyl$ group as an extension arm, and the other is a tightly adsorbed enzyme on the modified hydrophobic cellulose derivative which has a phenoxyacetyl group as a linkage. The enzyme preparation coupled on Sepharose retained 26.0% of the original activity against sucrose as a substrate, while the preparation immobilized on phenoxyacetyl cellulose retained 72.9% . The immobilized invertase preparation on ${\omega}-aminohexyl$ Sepharose showed the optimal pH 4.5, optimal temperature $60^{\circ}C$, activation energy $5,941\;cal/mole{\cdot}deg$ and Km' 22.2 mM against sucrose, while the preparation adsorbed on phenoxyacetyl cellulose showed the optimal pH 4.0, optimal temperature $60^{\circ}C$, activation energy $7,769\;cal/mole{\cdot}deg$ and Km' 69.9 mM.

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The Effect of Alkali Metal Ions (Na, K) on NH3-SCR Response of V/W/TiO2 (알칼리 금속 이온(Na, K)이 V/W/TiO2의 NH3-SCR 반응인자에 미치는 영향)

  • Yeo, Jonghyeon;Hong, Sungchang
    • Applied Chemistry for Engineering
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    • v.31 no.5
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    • pp.560-567
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    • 2020
  • In this study, we investigated that the effect of alkali metals [Na(Sodium) and K(Potassium)], known as representative deactivating substances among exhaust gases of various industrial processes, on the NH3-SCR (selective catalytic reduction) reaction of V/W/TiO2 catalysts. NO, NH3-TPD (temperature programmed desorption), DRIFT (diffuse reflectance infrared fourier transform spectroscopy analysis), and H2-TPR analysis were performed to determine the cause of the decrease in activity. As a result, each alkali metal acts as a catalyst poisoning, reducing the amount of NH3 adsorption, and Na and K reduce the SCR reaction by reducing the L and B acid points that contribute to the reaction activity of the catalyst. Through the H2-TPR analysis, the alkali metal is considered to be the cause of the decrease in activity because the reduction temperature rises to a high temperature by affecting the reduction temperature of V-O-V (bridge oxygen bond) and V=O (terminal bond).

Immobilization of Thermolysin for Synthesis of Aspartame Precursor (아스파탐 전구체의 합성을 위한 Thermolysin의 고정화)

  • Han, Min-Su;Kim, Woo-Jung
    • Korean Journal of Food Science and Technology
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    • v.27 no.5
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    • pp.753-756
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    • 1995
  • Optimum conditions for immobilization of thermolysin, a metalloendopeptidase catalyzing synthesis of aspartame precursors, were investigated with using Amberlie XAD-7 as carrier and glutaraldehyde as cross-linking agent. Adsorption of thermolysin onto the carrier was rapid at the initial stage and 96% of the enzyme was adsorbed after 24 hours at $5^{\circ}C$. There was a linear relationship between amount of thermolysin adsorbed and thermolysin loaded upto 300g per liter of carrier. The effective range of cross-linking time, concentration of glutaraldehyde and pH for immobilization of the enzyme were $3{\sim}7\;hours,\;6{\sim}12.5%\;and\;pH\;6.0{\sim}7.0$, respectively. Degree of cross-linking and residual enzyme activity were high when cross-linked for 7 hours with 6% glutaraldehyde or for 3 hours with 12.5% glutaraldehyde. The residual enzyme activity was over 30% under these conditions.

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Selective Separation and Determination of Iron with Ion-Exchange Resins (이온교환수지에 의한 철의 선택적 분리 및 정량)

  • Yong Soon Chung;Dong Won Kim;Seung Ho Kim;Dai Woon Lee
    • Journal of the Korean Chemical Society
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    • v.31 no.1
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    • pp.45-54
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    • 1987
  • Dowex 1-X8 resin ion exchanged with calcon carboxylic acid (CCA-Dowex 1-X8) and 2-methyl-8-hydroxyquinoline(MHQ) impregnated-Amberlite XAD-4 resin (MHQ-XAD-4) were examined for the separation and preconcentration of ferric ion from the various matrices. The stabilities of these resins were investigated, and their capacities on ferric ion were also measured. The effect of pH on the adsorption of ferric ion and matrix ions, such as Al(Ⅲ) and Ca(Ⅱ), was investigated to determine the optimun pH ranges. Separation and preconcentration of iron in aluminium foil and mineral water samples were studied by elution method with these resin columns. The recovered ions by 10ml of 2F nitric acid was determined by flame atomic spectrophotometry. SP-Sephadex C-25 column was used to separate ferrous and ferric ion in mineral water by stepwise elution with ferrozine and 1 % ascorbic acid-ferrozine solution. The concentrated and separated each ion could be determined spectrophotometrically at the analytical wavelenth of Fe(Ⅱ)-ferrozine complex (562nm).

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The Effect of Dealumination on the Structure and Acidity of SAPO-11 Molecular Sieve (탈알루미늄화가 SAPO-11 분자체의 구조 및 산성도에 미치는 영향)

  • Park, Jong Yul;Lee, Chi Hun;Kim, Soo Kyung
    • Journal of the Korean Chemical Society
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    • v.40 no.3
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    • pp.202-208
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    • 1996
  • SAPO-11 was synthesized hydrothermally and dealuminated with $H_4$EDTA. The framework structure of SAPO-11 was maintained safely by 24 hours' dealumination, but further dealumination for 48 hours caused SAPO-11 collapsed and to be changed to variscite($AIPO_4{\cdot}2H_2O$) and tridymite($SiO_2$). Dealuminated SAPO-11 showed two structural hydroxyl bands at 3607 $cm^{-1}$ and 3453 $cm^{-1}$ respectively. The intensities of these two bands increased according to the extent of dealumination, and disappeared by the adsorption of methylamine. Dealuminated SAPO-11 showed higher desorption temperatures and greater activation energies in desorption of water and methylamine compared to non-dealuminated SAPO-11. All the phenomena may be due to the stronger interactions of Bronsted acid sites of structural hydroxyl groups generated by dealumination with adsorbed water and methylamine molecules respectively.

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A Study on Hydrogen Impurity Effect in Anode of Proton Exchange Membrane Fuel Cell on Various Concentration of CO and H2S (고분자전해질 연료전지 연료극의 일산화탄소 및 황화수소 농도에 따른 불순물영향에 관한 연구)

  • LEE, EUN-KYUNG;BAEK, JAE-HOON;LEE, JUNG-WOON;LEE, SEUNG-KUK;LEE, YEON-JAE
    • Journal of Hydrogen and New Energy
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    • v.27 no.6
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    • pp.670-676
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    • 2016
  • Hydrogen town in Republic of Korea was established in 2013. Hydrogen as a byproduct produced by various processes of factories is used in hydrogen town facilities. As cell performance is affected by contaminations in fuel gas, various standards about impurities of fuel have been determined by many countries. This study shows performance degradation of single cell with impurities concentrations. Traces of carbon monoxide (CO) and hydrogen sulfide ($H_2S$)can cause considerable cell performance losses. For comparing the performances by poisoning of CO, acceleration test, I-V curve, constant current are performed. Both the CO and $H_2S$ poisoning rate are a function of their concentration. With the higher concentrations the higher poisoning rates are observed. And, it was confirmed that, oxidation behavior and side reaction generation are not affected. Under the lower $H_2S$ concentration condition, the poisoning rate is much higher than that of CO because of its different adsorption intensity. It can be possible that the result of this study can be used for enacting regulation as a baseline data.