• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.18 no.6
• /
• pp.636-641
• /
• 2009

Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.21 no.1
• /
• pp.58-64
• /
• 2012

Instead of the surface pattern arranged repeatedly in two axial direction on a plane, we propose double patterns superposing two one-axial linear patterns as a reference target for surface encoding. A upper layer of the superposed pattern is the transparent glass with grooves cut in it at a fixed pitch. The position is sensed by detecting a shift of beam due to difference of a refractive index. And a lower layer is the aluminum with color-coated grooves. The amount of beam reflected on the layer varies according to its targeting position and is detected for encoding. For the above reference pattern, we can detect two-axial positions using only the single beam. Furthermore, the pattern size can be expanded with a size of the detector kept constant, meaning that the measured range can be expanded easily. In this paper, we review the existing optical encoding methods for grid pattern, and discuss the hardware implementation of the suggested surface encoding method.

• Electrical & Electronic Materials
• /
• v.10 no.7
• /
• pp.668-673
• /
• 1997

A Single-crystalline Mn-Zn Ferrite (110 orientation) was masklessly etched by focused Ar laser irradiation in an H$_3$PO$_4$ solution. The depth of the etched grooves increases with increasing a laser power, decreasing a scan speed, and increasing the H$_3$PO$_4$concentration. The width of the etched grooves increases with a increasing laser power, but was relatively insensitive to the scan speed and H$_3$PO$_4$concentration. High etching rate of up to 714 ${\mu}{\textrm}{m}$/s and an aspect ratio of 6 for vertical slab structure have been obtained by the light-guiding effect of the laser bean in the H$_3$PO$_4$ solution.

• Proceedings of the KIEE Conference
• /
• 1996.11a
• /
• pp.439-441
• /
• 1996

A simple coupling method between APD(avalanche photodiode) arrays and SMF(single mode fiber) arrays on a Silicon carrier composed of V-grooves is proposed and carried out. Jacketed fibers embedded in V-grooves are used as alignment marks instead of patterned pedestals or solder bumps and a optical receiver module are packaged.

• Proceedings of the Korean Powder Metallurgy Institute Conference
• /
• 2006.09a
• /
• pp.576-577
• /
• 2006

This study was conducted to improve the durability and decrease the friction of the sintered bushing used in the joints of construction equipment. Research was carried out to examine the effects of the groove pattern on the inner surface. The following results were obtained: (1) The bushing (EK Bush) with grooves on the inner diameter showed increased durability as compared to a non-grooved bushing. (2) The helical-grooved bushing showed the least amount of wear; it was １/10 of the wear of the non-grooved bushing. (3) If the distance between grooves was decreased, then the coefficient of friction also decreased.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.07a
• /
• pp.193-194
• /
• 2005

By the high-temperature pad conditioning process: The slurry residues in pores and grooves of the polishing pad were clearly removed. These clear pores and enlarged grooves made the slurry attack the oxide surface. The changed slurry properties by high-temperature pad conditioning process made the oxide surface hydro-carbonate to be removed easily.

• KSTLE International Journal
• /
• v.6 no.2
• /
• pp.51-57
• /
• 2005

Surface texturing of tribological applications is an attractive technology of engineered surface. Therefore, reduction of friction is considered to be necessary for improved efficiency of machines. The current study investigated the potential of textured micro-scale grooves on bearing steel flat mated with pin-on-disk. We discuss reducing friction due to the influence of sliding direction at surface pattern. We can indicate lubrication mechanism as a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter for the lubrication condition. It was found that the friction coefficient was changed by the surface pattern and sliding direction, even when surface pattern was the same. It was thus verified that micro-scale grooves could affect the friction reduction considerably under mixed and hydrodynamic lubrication conditions. The lubrication regime influences the friction coefficient induced by the sliding direction of groove pattern. The friction coefficient depends on a combination of resistance force and hydrodynamic.

• Transactions of Materials Processing
• /
• v.3 no.3
• /
• pp.282-290
• /
• 1994

The outer race of BJ type C.V.Joint has a complicated shape and ball grooves. It is produced by cold or warm precision forging. Especially, the precision level of the ball grooves determines the quality of the part. The objective of the present study is to develop process conditions of the cold forging using the plasticine. Because the cold forging consists of forward extrusion, upsetting, backward extrusion and cold sizing, the study was focused on finding the best perform for each process. The data obtained from the study will be used in the design of the cold forging process for the outer race.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.5 s.170
• /
• pp.37-44
• /
• 2005

In this paper, wire electrochemical machining (Wire ECM) with ultra short pulses is presented. Platinum wire with $10{\mu}m$ diameter was used as a tool and 304 stainless steel was locally dissolved by electrochemical machining in 0.1M $H_{2}SO_4$ electrolyte. Wire ECM can be easily applied to the fabrication of arbitrarily shaped micro-grooves without tool wear. The change of machining gap according to applied pulse voltage, pulse on-time and pulse period was investigated and the optimal pulse condition for stable machining was obtained. Using this method, various micro-grooves with less than $20{\mu}m$ width were fabricated.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.29 no.4 s.235
• /
• pp.435-440
• /
• 2005

In this paper, slurry fluid motion, abrasive particle motion, and roles of groove patterns on the pads are numerically investigated in the 2D and 3D geometries. The simulation results are analyzed in terms of experimental removal rate and WIWNU (Within Wafer Non-Uniformity) for ILD (Inter Level Dielectric) CMP process. Numerical investigations reveal that the grooves in the pad behave as uniform distributor of abrasive particles and enhance the removal rate by increasing shear stress. Higher removal rate and desirable uniformity are numerically and experimentally observed at the pad with grooves. Numerical analysis is very well matched with experimental results and helpful fur understanding polishing mechanism and local physics.