• 한국광학회지
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• 제28권6호
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• pp.361-365
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• 2017

본 논문은 협대역의 플라즈모닉 흡수체 구현을 위한 금속 나노입자 주기구조 설계 및 제작에 관한 연구다. 제안된 플라즈모닉 흡수체의 상단 금속 나노입자는 주기적으로 홈이 파여있는 템플릿을 이용하여 전자빔 증착 후, 열처리하는 제작 기술로 형성하였다. 주기적 홈 템플릿 위에 제작된 금속 나노입자를, 따로 제작한 33 nm 두께의 $Al_2O_3$가 스퍼터 가공된 200 nm 두께의 금속 반사판-기판 상단에 옮기는 방법을 통해 플라즈모닉 흡수체를 제작하였다. 제작된 금속 나노입자는 평균 지름 46 nm, 주기 76 nm의 크기를 가졌다. 광학 측정 결과, 제작된 플라즈모닉 흡수체는 중심파장 572 nm, 반값전폭 109.9 nm의 플라즈모닉 공명 흡수를 나타내었다.

• Progress in Superconductivity
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• 제6권2호
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• pp.133-137
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• 2005

We fabricated the Au/Ni template for YBCO coated conductors and evaluated texture formation and the microstructural evolution. The cube textured Ni substrate was fabricated by rolling and recrystallization annealing, and subsequently Au layer formed on the substrate by electroless-plating method. The texture was evaluated by pole-figure with x-ray goniometer with orientation distribution function (ODF) analysis. The surface roughness and grain boundary morphology of template were characterized by atomic force microscopy (AFM) We observed that Au layer deposited epitaxially on Ni substrate and formed a strong cube texture when plating time was optimized. The full-width at half-maximum (FWHM) was $8.4^{\circ}$ for out-of-plane and $9.98^{\circ}$ for in-plane texture for plating time of 30 min. Microstructural observation showed that the Au layer was homogeneous and dense without formation of crack/microcrack. In addition, we observed that root-mean-square (RMS) and depth of grain boundary were 14.6 nm and 160 $\AA$ for the Au layer, respectively, while those were 27.0 nm and 800 $\AA$ for the Ni substrate, indicating that the electoless-plated Au layer had relatively smooth surface and effectively mollified grain groove.

• 센서학회지
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• 제18권3호
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• pp.239-244
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• 2009

We fabricated nano-templates by low temperature BCP(block copolymer) process at 180 $^{\circ}C$, then we deposited 10 nm-thick $TiO_2$ layers with ALD(atomic layer deposition) at low temperature of 150 $^{\circ}C$. Through FE-SEM analysis, we confirmed the successful formation of the groove-type(width of crest : 30 nm, width of trough : 18 nm) and the cylinder-type(diameter : 10 nm, distance between hole : 25 nm) templates. Moreover, after $TiO_2$-ALD processing, we confirmed the deposition of the uniform nano layers of $TiO_2$ on the nano-templates. Through AFM analysis, the pitches of the crest-through(in groove-type) and hole-hole(in cylinder-type) were the same before and after $TiO_2$-ALD processing. In addition, we indirectly determined the existence of the uniform $TiO_2$ layers on nano-templates as the surface roughness decreased drastically. We successfully fabricated nano-template at low temperature and confirmed that the three-dimensional nano-structure for sensor application could be achieved by $TiO_2$-ALD processing at extremely low temperature of 150 $^{\circ}C$.