• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1082-1086
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• 2004

In silicon wafer manufacturing process, the grinding process has been adopted to improve the flatness of wafer. The grinding of wafer is usually used by the infeed grinding machine. The infeed grinding machine has been depended on imports. Therefore, it is necessary to develop the infeed grinding machine because the demand of the infeed grinding machine is increasing more and more. This paper describes the technologies of infeed grinding machine and intend to introduce the studies in the development of the intelligent grinding system for grinding of wafer. The air bearing spindle for the infeed grinding machine was developed by domestic technologies and the grinding part design of the intelligent grinding system for wafer grinding was completed.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.5
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• pp.59-65
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• 1998

In order to utilize the information of well-know grinding database or grinding machine characteristics, a database needs to be designed by considering the delicate property of the machine tools for the high precision and quality of the demanding specification. Among the machine tools for the high precision and quality of the demanding specification. Among the machine tools, machining conditions of the grinding are various and knowledge repeatance obtained form the grinding process are less credable. therefore it is desirable for database, which is used to set the grinding conditions, to utilize the maximum machine tool capability. The present paper studied on the occurance limit of chatter vibration and burn considering the characteristics of machine tool. And also basic experiments were performed to establish the optimum grinding conditions which could maximize the grinding efficiency.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.193-200
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• 2006

To perform the finish grinding process of ferrules which are widely used as fiber optic connectors, a high-precision centerless grinding machine is necessary. The high-precision centerless grinding machine is consisted of the hydrostatic GW and RW spindle systems, hydrostatic RW feeding mechanism, RW swivel mechanism, on-machine GW and RW dressers, and concrete-filled steel bed. In this study, the thermal characteristics of the high-precision centerless grinding machine such as the temperature distribution, temperature rise and thermal deformation, are estimated based on the virtual prototype of the grinding machine and the heat generation rates of heat sources related to the machine operation conditions. The reliability of the predicted results is demonstrated by the temperature characteristics measured from the physical prototype. Especially, the predicted and measured results show the fact that the high-precision centerless grinding machine has very stable thermal characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.04b
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• pp.272-276
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• 1993

We made to develop CNC Tool Grinding Machine automating the linear motion of X,Y,Z axis of table, and thetilting and rotation of tool holding vice by using Encorder to increase the efficiency of tool grinding for the Conventional Tool Grinding Machine. We did not consider the part of static, dynamic and thermal behavior that must necessary consider when wedesign, because we used existing Conventional Tool Grinding Machine as it is. We investigated simulation to make existing Conventional Tool Grinding Machine like CNC. We also designed it, and we compared the capability of existing Conventional Tool Grinding and CNC Tool Grinding Machine, and we investigated, too.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.8-13
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• 1997

In order to utilize the information of well-known grinding data or grinding machine, a database needs to be designed by considering the delicate property of the machine tools for the high precision and quality of the demanding specification. Among the machine tools, machining conditions of the grinding are various and knowledge repeatance obtained form the grinding process are less credable.Therefore it is desirable for D/B, which is used to set the grinding conditions, to utilize the maximum machine tool capability. The present paper studied occurance limit of chatter vibration and burn considering the characteristics of machine tool. And also basic experiments were performed to establish optimum grinding canditions which can maximize the machining efficiency.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.172-179
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• 2005

A high-precision centerless grinding machine has been recognized as a core equipment performing the finish outer-diameter grinding process of ferrules which are widely used as fiber optic connectors. In this study, in order to realize the high-precision centerless grinding machine, the structural characteristic analysis and evaluation are carried out on the virtual prototype consisted of the steel bed, hydrostatic GW and RW spindle systems, hydrostatic RW feed mechanism, RW swivel mechanism, and on-machine GW and RW dressers. The loop stiffnesses of centerless grinding machine are estimated based on the relative deformations between GW and RW caused by the grinding forces. And the simulated results illustrate that the concrete-filled bed has the considerable effect on the improvement of the structural stiffness of centerless grinding machine.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.4
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• pp.34-39
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• 2006

High-precision centerless grinding machines are emerging as a means of finishing the outer diameter grinding process required for ferrules, which are widely used as fiber optic connectors. In this study, a structural characteristic analysis and evaluation were carried out using a virtual prototype of a centerless grinding machine to realize systematic design technology and performance improvements required to manufacture ferrules. The prototype consisted of a concrete-filled bed, hydrostatic grinding wheel (GW) and regulating wheel (RW) spindle systems, a hydrostatic RW feed mechanism, a RW swivel mechanism, and on-machine GW and RW dressers. The loop stiffness values of the centerless grinding machine were estimated based on the relative displacements between the GW and RW caused by grinding forces. The simulated results illustrated that a concrete-filled bed considerably improved the structural stiffness and accuracy of a high-precision centerless grinding machine.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.1
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• pp.20-25
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• 2012

A Crankshaft multi grinding machine is developed for manufacturing of high precision crankshaft. The grinding head part of the developed machine should be moved precisely during grinding of work materials. In this paper, structural and modal analysis for the crankshaft multi grinding machine is carried out to check the design criteria of the machine. The analysis is carried out by FEM simulation using the commercial software. The machine is modeled by placing proper shell and solid finite elements. The results of structural and modal analysis confirmed that the structural characteristics of grinding machine and the structural safety are considered secure.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.58-64
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some finding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipment with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6 nm in Ra.

• Transactions of the Korean Society of Automotive Engineers
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• v.21 no.2
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• pp.9-16
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• 2013

The comparisons of performance characteristics between the super-mirror face grinding machine using variable air pressure developed in this laboratory to grind precisely the sliding face of a surface hardened workpiece with thermal spray and the conventional one are investigated by measuring the surface roughness and hardness for a SCM440. To process variously workpiece according to shape, size and materials, the rotating and contacting forces of the developed grinding machine can be changed by air pressure. The surface roughness of processed workpiece can be also attained to state of mirror face by grinding precisely the sliding face with changing the rotating speed of diamond wheel. It is possible to be attached to the various machine tools because the super-mirror face grinding machine using variable air pressure is a small size. The grinding efficiency is elevated because it can be worked by two or more grinding machines attached to concurrently a machine tool for the large workpiece. In this study, results show that the cusp height of the super-mirror face grinding machine for the particle size of 100 and $1500No./mm^2$ is lower than that of the conventional one because the vibration is reduced by rotating very fast the diamond wheel with a pressed air and it can be processed by rotating the diamond wheel with a constantly varied air pressure perpendicular to workpiece surface, and that the workpiece in the super-mirror face grinding machine for the particle size of $3000No./mm^2$ can be processed to state of mirror face that is rarely seen by the cusp height. It is also found that the surface hardness of both the conventional and the super-mirror face grinding machines are increased as the particle size of diamond wheel is reduced, and the surface hardness of the super-mirror face grinding machine is HRC 1.1 ~ 1.8 higher than that of the conventional one.