• Title/Summary/Keyword: Grind

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Review for Features of Wafer In-feed Grinder Structure (실리콘 웨이퍼 단면 연삭기 구조물 특성평가)

  • Ha S.B.;Choi S.J.;Ahn D.K.;Kim I.S.;Choi Y.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.555-556
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    • 2006
  • In recent years, the higher flatness level in wafer shape has been strictly demanded with a high integration of the semiconductor devices. It has become difficult for a conventional wafer preparing process to satisfy those demands. In order to meet those demands, surface grinding with in-feed grinder is adopted. In an in-feed grinding method, a chuck table fur fixing a semiconductor wafrr rotates on its rotation axis with a slight tilt angle to the rotation axis of a cup shaped grinding wheel and the grinding wheel in rotation moves down to grind the wafer. So, stability of the grinder structure is very important to aquire a wafer of good quality. This paper describes the features of the in-feed grinder and some FEM analysis results of the grinder structure.

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A Study on the In-process Measurement of Metallic Surface roughness in Cylindrical Grinding by Diode Laser (원통연삭가공시 반도체 레이저 빔을 이용한 금속표면거칠기의 인프로세스 측정)

  • 김희남
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1995.03a
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    • pp.1-8
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    • 1995
  • This paper proposed a simple method for measuring surface roughness of ground surface. utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens a detecting unit with polygon mirror and CCD array sensor. and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultanilusly monitor the state of the grind wheel. The experimental results, showed that the increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min. the feed rate is 0.2m/min-0.9m/min, the dressing speed is 0.2mm/rev-0.4mm/rev, the stylus method and the in-process method can be obtained the same results. thus under limited working conditions. using the proposed system. the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

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The Effect of Cutting Edge on the Surface Roughness In Cutting Brittle Materials (취성재료의 가공시 절삭날이 표면거칠기에 미치는 영향)

  • Kim, Joo-Hyun
    • Journal of the Korean Society for Precision Engineering
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    • v.13 no.1
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    • pp.53-61
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    • 1996
  • A clear understanding of the surface formation mechanism due to cutting is very important to help produce a good quality surface. Much of the roughness along the length of a bar being cut in a lathe can be explained in terms of macroscopic tool shape and feed rate. However, the roughness along the direction of cutting requires a different explanation. The formation of surface roughness is a problem in flow and fracture of materials in the vicinity of the tool edge. On a microscopic scale the cutting edge is rounded because it is impossible to grind a perfectly sharp cutting edge. Even if a perfectly sharp cutting edge were obtained it would soon become dull as a result of rapid breakdown and wear of the cutting edge. A research project is proposed in which in the main object is to model the surface formation mechanism due to cutting. The tool was assumed to be dull, that is, its edge has a finite radius. In order to study the effect of the radius of cutting edge on the surface formation, tools having different cutting edges were used. For orthogonal cutting experiment, cast iron and glass were chosen as brittle materials. Plowing forces acting in the cutting edge were estimated and its effect on the surface roughness was studied by observing the machined surface using optical microscope.

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Characteristic Changes on Nonwoven Fabric by Charcoal Printing (숯 날염에 의한 부직포의 특성 변화)

  • ;;;田村照子;小紫朋子
    • Journal of the Korean Society of Clothing and Textiles
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    • v.28 no.2
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    • pp.303-311
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    • 2004
  • The purposes of this study were to investigate characteristic changes on nonwoven fabric by the charcoal printing. It separate grind charcoal as two different size of particles 45-52${\mu}{\textrm}{m}$ and 53-65${\mu}{\textrm}{m}$ for hand screen printing on three kind of nonwoven fabrics. To examine the effect of charcoal printing on nonwoven fabric were to obselve surface changes by a scanning electron microscope, dyeability by using spectrophotometer, moisture regain by oven method, air permeability, anion property, deodoriration and antibacterial activity. The results were as follows: When charcoal powder concentration increased from 3 to 9%, K/S value also increased from 3.06 to 8.55. When charcoal concentration increased, moisture regain also increased. In same concentration, moisture regain occurred higher as particle of small size. Air permeability decreased when the charcoal printing concentration increased. Anion occurrence appeared 140-160ion/cc from three different kinds of nonwoven fabrics in 3% and 9% charcoal concentration. Therefore, occurred anion ineffectively. In concentration of 3%, rate of deodorization measured as 89%, 83% and 87%, and 9% concentration caused 96%, 86% and 93% of high deodorization. Antibacterial activity examination in nonfinished nonwoven fabric resulted range of 60%, however, 3% and 9% concentration finished nonwoven fabric resulted 99.9% of excellent antibacterial activity.

A Study of Effecting Factor in the Reology and Physical Properties of Cements (시멘트 유동성과 물성에 미치는 영향인자에 관한 연구)

  • 엄태선;최상흘
    • Journal of the Korean Ceramic Society
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    • v.34 no.10
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    • pp.1027-1036
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    • 1997
  • The reology and several physical properties of cements are studied by varying the different mineral composition and particle size distribution(PSD) of cements with closed circuit ball mill for high workability, low heat of hydration, and high strength. In this study, we found that the workability of concretes is related to the viscosity of cement, and affects to strength. Here, this workability is affected by mineral composition (C3A) and the PSD. Especially, rosin-rammer index and 44${\mu}{\textrm}{m}$ residue in the PSD of cements are affected to water demand, casting property, slump loss, strength of cements. From the above results, the conditions of cement for high workability, low heat of hydration and high strength are to use low C3A clinker, 5-10% slag addition, and to grind cement below 0.7 rosin-rammer index, above 3.5-4.5% 44 ${\mu}{\textrm}{m}$ residue, 4000$\pm$100 $\textrm{cm}^2$/g blaine. Such cements are, therefore, supurior to super low heat cement and slag-blended cement in comparing the physical properties of strength, slump, slump-flow, adiabetic temperature, etc.

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Performance Evaluation of Concrete Polishing Robot with Omnidirectional Mobile Mechanism (전방향 이동 메커니즘을 적용한 콘크리트 폴리싱 로봇의 성능평가)

  • Cho, Gangik;Chu, Baeksuk
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.25 no.2
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    • pp.112-117
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    • 2016
  • In the construction industry, concrete polishing is used to grind and rub the surface of concrete grounds with polishing machines to increase the strength of the concrete after deposition. Polishing is performed manually in spite of the generation of dust and the requirement of frequent replacements of the polishing pad. The concrete polishing robot developed in this research is a novel polishing automation system for preventing the workers from being exposed to poor working environments. This robot is able to change multiple polishing tools automatically; however, the workers can conveniently replace the worn-out polishing pads with new ones. The mobile platform of the polishing robot employs omnidirectional wheels to enable a flexible motion even in small and complicated workspaces. To evaluate the performance of the developed concrete polishing robot, extensive experiments including square trajectory tracking, automatic tool changing, actual polishing, and path generation simulation were performed.

A Study on the In-Process Measurement of Metallic Surface Roughness in Cylindrical Grinding by Diode Laser (원통연삭가공시 반도체 레이저 빔을 이용한 금속표면거칠기의 인프로세스 측정)

  • 김희남;이주상
    • Journal of the Korean Society of Safety
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    • v.10 no.3
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    • pp.30-41
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    • 1995
  • This paper proposed a simple method for measuring surface roughness of ground surface. Utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens, a detecting unit with polygon mirror and CCD array sensor, and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultaniously monitor the state of the grind wheel. The experimental results, showed that the Increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min, the table speed is 0.2n1/min -0.9m/min, the dressing speed is 0.2mm/rev~0.4mm/rev, the stylus method and the in-process method can be obtained the same results. Thus, under limited working conditions, using the proposed system, the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

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An Experimental Study on the Optimum Grinding of Alumina Ceramic Parts (알루미나 세라믹스 부품의 최적화 연삭 가공공정에 관한 기초적 연구 -기계적 특성 치에 의한 최적 가공 기법의 판명-)

  • 강재훈;김원일
    • Transactions of the Korean Society of Automotive Engineers
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    • v.1 no.2
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    • pp.103-116
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    • 1993
  • Recently, engineering ceramics called as the 3 material have been concerned significantly with some excellent mechanical properties and many functions as new materials for high precision mechanical components and engineering parts for at large. Then, for designing engineering parts using engineering ceramics, bending strength value data with high reliability is more essential than any other mechanical properties. But, because of brittleness and structural characteristic, it is very hard to grind with conventional tools, and the generation of cracks and various defects of engineering ceramics parts during grinding machining process are serious problems. Thus, in present study, surface grinding experiments with various machining conditions using resin bond diamond wheels are carried out to obtain the most excellent guality of testpiece surface and optimum step of grinding process for the high efficient stock removal rate to save running time. As the results from grinding experiments and 3-points bending strength test of ground Al2O3 ceramics parts on Korean Standard, manufactured in our country and Japan, basic technology and know-how to develop the optimum grinding machining conditions and also high bending strength values with high reliability are obtained.

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A Study on the Surface Grinding Characteristic of Engineering Cramics (엔지니어링 세라믹스의 평면 연삭 가공 특성에 관한 연구)

  • Kang, J.H.;Heo, S.J.;Kim, W.L.
    • Transactions of the Korean Society of Automotive Engineers
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    • v.2 no.6
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    • pp.38-49
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    • 1994
  • In this study, grindability of some representative engineering ceramics are experimentally investigated using resin bond diamond wheel with conventional surface grinding machine, and proper grinding conditions which can be obtained from various experimental results are established also for mechanical components which are proper to domestic circumstances with high reliability. And through the results of experiment, it is confirmed that grinding energies of the ceramics, especially in the case of $Al_2O_3$, are lower than steel with same machining condition in the conventional grinding because of their fine-brittle fracture mode type removal process, though the ceramics are well-known to unmachinable materials. And moreover, the total pass numbers needed for spark-out process to be completed are depend on their mechanical properties because that grinding stiffness is different from each other. The grinding force, ginding power and ground surface roughness are also measured and compared. Furthermore, the experiments carried out in this study, some useful results are obtained with can guide to grind engineering ceramics with conventional surface grinding machine.

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Assessment of Two Wall Film Condensation Models of RELAP5/MOD3.2 in the Presence of Noncondensable Gas in a Vertical Tube

  • Park, Hyun-Sik;No, Hee-Cheon;Bang, Young-Seok
    • Nuclear Engineering and Technology
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    • v.31 no.5
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    • pp.465-475
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    • 1999
  • The objective of the present work is to assess the analysis capability of two wall film condensation models, the default and the alternative models, of RELAP5/MOD3.2 on condensation experiments in the presence of noncondensable gas in a vertical tube of PCCS of CP-1300. In the calculation of a base case the default model of RELAP5/MOD3.2 under-predicts the heat transfer coefficients, and Its alternative model over-predicts them throughout the condensing tube, Also, both models over-predict the void fractions. The nodalization study shows that the variation of the node number does not change both modeling results of RELAP5/MOD3.2 Sensitivity study for varying input parameters shows that the inlet steam-air mixture flow rate, the inlet air mass fraction, and the inlet saturated steam temperature give significant changes of their heat transfer coefficients Run statistics show that the grind time of the default model is always higher than that of the alternative model by about 23%.

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