The Effect of Deposition Temperature on the Interfacial Properties of $SiN_4$ Reduced Blanket Tungsten on TiN Glue Layer
(TiN glue layer위에 증탁되는 $SiN_4$ 환원 Blanket 텅스텐의 증착온도가 계면성질에 미치는 영향)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1993.11a
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- pp.86-86
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- 1993