• Journal of the Semiconductor & Display Technology
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• v.15 no.2
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• pp.26-31
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• 2016

The Townsend to glow discharge mode transition was investigated in the dielectric barrier discharge (DBD) helium plasma source which was powered by 20 kHz / $4.5 kV_{rms}$ high voltage at atmospheric pressure. The spatial profile of the electric field strength at each modes was measured by using the intensity ratio method of two helium emission lines (667.8 nm ($3^1D{\rightarrow}2^1P$) and 728.1 nm ($3^1S{\rightarrow}2^1P$)) and the Stark effect. ICCD images were analyzed with consideration for the electric field property. The Townsend discharge (TD) mode at the initial stage of breakdown has the light emission region located in the vicinity of the anode. The electric field of the light emitting region is close to the applied field in the system. Immediately, the light emitting region moves to the cathode and the discharge transits to the glow discharge (GD) mode. This mode transition can be understood with the ionization wave propagation. The electric field of the emitting region of GD near cathode is higher than that of TD near anode because of the cathode fall formation. This observation may apply to designing a DBD process system and to analysis of the process treatment results.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.5
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• pp.625-632
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• 2004

Perfluorocompounds ($PFC_s$), such as tetrafluoromethane ($CF_4$) and hexafluoroethane ($C_2F_6$), have been widely used as plasma etching and chemical vapor deposition (CVD) gases for semiconductor manufacturing processes. Since these $PFC_s$ are known to cause a greenhouse effect intensively, there has been a growing interest in reducing $PFC_s$ emissions. Among various $CF_4$ decomposing techniques, a dielectric barrier discharge (DBD) is considered as one of a promising candidate because it has been successfully used for generating ozone ($O_3$) and decomposing nitrogen oxide (NO). Firstly, optimal concentration of oxygen for $CF_4$ decomposition was found to figure out how many primary and secondary reactions are associated with DBD process. Secondary, to find effective discharge method for $CF_4$ decomposition, a streamer and a glow mode in DBD are experimentally compared, which includes (i) coaxialcylinder DBD, (ii) DBD reactor packed with glass beads. and (iii) a glow mode operation with a helium gas. The test results showed that optimal concentration of oxygen was ranged 500 ppm~1% for treating 500 ppm of $CF_4$ and helium glow discharge was the most efficient one to decompose $CF_4$.

• Analytical Science and Technology
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• v.8 no.4
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• pp.443-448
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• 1995

Three anode configurations of six-jet, cone-jet and cylindrical-jet are tested for their analytical performance under power mode operation. The effect of pressure, power and gas flow rate on atomic absorption signals have been studied. The increase of atomic absorption signal of sample element is observed at a fixed pressure in all configurations as the gas flow rate increase up to 300-600 seem, and as the power dissipated in the glow discharge cell increase. The lower the pressure is in the glow discharge cell at a fixed discharge power and argon flow rate, the greater the absorbance of sample element is. The optimum conditions are taken from these data and a calibration curve of Cu in low-alloy steel sample is obtained. In this calibration curve, six-jet configuration shows the best analytical results varies as the sample element.

• Analytical Science and Technology
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• v.6 no.4
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• pp.369-374
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• 1993

Plasma oscillation has been observed during the development of the glow discharge as detector for gas chromatography. The variation of oscillation frequency shows the better stability and detection limits than the changes in the dischange curent. To investigate the range of useful operating conditions and to gain insight into the mechanism, the effect of experimental parameters on plasma oscillation have been studied. This study includes the variation of discharge current, pressure and discharge gap. Frequency ranges of 10KHz to 10MHz have been observed with the various shapes of oscillation. Two kinds of mode for oscillation are observed with the variation of electrode gap at low pressure and low voltage.

• Analytical Science and Technology
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• v.10 no.5
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• pp.357-361
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• 1997

A Griemm type Glow Discharge cell is attached to a commercial quadrapole based ICP-MS and used for the analysis of surface analysis. By employing 2.0mm diameter, mode and proper experimental conditions, several layers of few ${\mu}m$ thickness are analysed within 30 minutes. Multi-layers of Cu-Ni, Fe-Ni are analyzed with the resolution of 10nm by GDMS. Proper experimental conditions make a flat bottom crater shape and good resolution for multi-layer depth profile study.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.67 no.4
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• pp.214-220
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• 2018

Light sources induced by gas discharge using rare gases have been widely used in the thin film deposition, the surface modification and the polymer etching. A dielectric barrier discharge (DBD) has been developed in order to consistently emit light and control the wavelength of the emission light. However, much research on the characteristics of the movement of discharge particles is required to improve the efficiency of the light lamp and the life-time of the light apparatus in detail. In this paper, we developed a He DBD discharge simulation tool and investigated the characteristics of discharge particles which were electrons, two positive ions ($He^+$, $He_2^+$) and 5 excited particles ($He^*(1S)$, $He^*(3S)$, $He^*$, $He^{**}$, $He^{***}$). The discharge currents showed the transition from pulse mode to continuous mode with the increase of power. With the accumulated charges on the barrier walls, the discharge current was rapidly increased and caused oscillation of the discharge voltage. As the gas pressure increased, $He_2^+$ and $He^*(3S)$ became the dominant activated particles. The input power was mostly consumed by electrons and $He_2^+$ ion. And the change curve showed that power consumption by electrons increased more with gas pressure than with source voltage or frequency.

• Macromolecular Research
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• v.10 no.5
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• pp.273-277
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• 2002

Ultra-thin polymer films containing cobalt(II) meso-tetraphenylporphyrin(CoTPP) have been prepared by vacuum codeposition of the metal complex and trans-2-butene as an organic monomer using an inductively coupled RF glow discharge operating at 7-9 Watts. The polymer films were characterized by sorption measurements. Sorption data obtained for polymer films containing CoTPP indicate that the CoTPP molecules are capable of reversibly binding oxygen molecules. It was found that the adjacent CoTPP molecules in the aggregated metal complex phase could irreversibly share the oxygen molecules. A dispersion of the metal complex molecules in the polymer matrix was made to maintain the reversible reactivity of the metal complex molecules with oxygen in the polymer films via vacuum evaporation process. The Henry mode solubility constant, the Langmuir mode capacity constant, the amount of binding oxygen, and the dissociation equilibrium in the dual mode sorption theory were discussed.

• Journal of Power Electronics
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• v.9 no.2
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• pp.164-172
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• 2009

Recently, 2-dimensional flat light sources have been attracting much attention for its use in LCD backlight applications because of its high luminous efficiency and uniformity. A long-gap discharge, mercury-tree flat fluorescent lamp has been developed, which shows a high brightness ($>5000\;cd/m^2$) and high luminous efficacy (60 lm/W). Additionally, it has a wide operating margin and stable driving condition with the aid of an auxiliary electrode. For driving the lamp, a narrow pulse power to maintain the glow discharge state is required. Since there has been no research for this kind of lamp driving, this paper proposes a newly developed short-pulse, high-voltage lamp-driving scheme. The proposed lamp system uses a ballast with a coupled-inductor in order to raise the short pulse voltage up to the lamp ignition level and to obtain energy-recovery action during the glow discharge mode. The operation principles are presented and also the system performances such as the lighting efficiency, spatial and angular uniformities are evaluated by hardware experiments. The results show that the proposed lighting system is a good candidate for the next-generation of LCD backlight systems.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.1
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• pp.80-84
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• 2014

The discharge characteristics of Surface Dielectric Barrier Discharge (SDBD) reactor are investigated to find optimal driving condition with adjusting various parameter. When the high voltage with sine wave form is applied to SDBD source, successive pulsed current waveforms are observed owing to multiple ignitions through the long discharge channel and wall charge accumulation on the dielectric surface. The discharge voltage, total charge between dielectrics, mean energy and power are calculated from measured current and voltage according to electrode gap and dielectric thickness. Discharge mode transition from filamentary to diffusive glow is observed for narrow gap and high applied voltage case. However, when the diffusive discharge is occurred with high applied voltage, the actual firing voltage is always lower than that with low driving voltage. The $Si_3N_4$, $MgF_2$, $Al_2O_3$ and $TiO_2$ are considered for dielectric protection and high secondary electron emission coefficient. SDBD with $MgF_2$ shows the lowest breakdown voltage. $MgF_2$ thin film is proposed as a protection layer for low voltage atmospheric dielectric barrier discharge devices.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1751-1754
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• 2004

Effects of delay on the discharge time lag and the controllability of weak discharge mode were studied under single cell driving circumstances of ac PDP. It was found that sufficient number of priming particle is necessary for inducing weak discharge in ramp voltage driving. Discharge time lag was reduced dramatically under priming condition. It is speculated that the increasement of strong discharge is related to the reduction of the $Xe^*(^3P_1)$ particles during the after glow.