• Journal of Magnetics
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• v.10 no.3
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• pp.122-127
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• 2005

New classes of LC resonators for micro magnetic sensor device were proposed and fabricated. The first type LC resonator (Type I) consists of a small piece of microwire and two cylindrical electrodes at the end of the microwire without direct contact to its ferromagnetic core. In type I resonator the ferromagnetic core of the microwire and cylindrical electrodes act as an inductor and two capacitors respectively to form a LC circuit. The second type LC resonator (Type II) consists of a solenoidal micro-inductor with a bundle of soft magnetic microwires as a core. The solenoidal micro-inductors fabricated by MEMS technique were $500\sim1,000\;\mu{m}$ in length with $10\sim20$ turns. A capacitor is connected in parallel to the micro-inductor to form a LC circuit. A tiny glass coated $CO_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire was fabricated by a glass-coated melt spinning technique. A supergiant magneto-impedance effect was found in a type I resonator as much as 400,000% by precise tuning frequency at around 518.51 MHz. In type II resonator the changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. The phase angle between current and voltage was also strongly dependent on the magnetic field. The drastic increments of magnetoimpedance at near the resonance frequency were observed in both types of LC resonators. Accordingly, the sudden change of the phase angle, as large as $180^{\circ}C$, evidenced the occurrence of the resonance at a given external magnetic field.

• Journal of Magnetics
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• v.7 no.4
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• pp.160-164
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• 2002

A new discovery of the super-giant magneto-impedance (SGMI) effect was found out in a LC-resonator consisted of a glass-coated amorphous $CO_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire. The measurement was carried out at high frequency range from 100 MHz up to 1 GHz of an ac-current flowing along the wire and at varying axial dcmagnetic field in its range of $\pm$120 Oe. The wires, about 16${\mu}m$ in diameter, were fabricated by a glass-coated melt spinning technique. The shape of the impedance curves plotted vs. a dc-field is changing dramatically with the frequency. The phase angle was also strongly dependent on this field. The external dc-magnetic field changes the circumferential permeability as well as the penetration depth, both in turn change the impedance of the sample. The drastic increments of SGMI at high frequency can be understood in terms of the LC-resonance phenomena. The sudden change of the phase angle, as large as $180^{\circ}$ evidenced the occurrence of the resonance at a given intensity of the external dc-field. The maximum ratio of SGMI reached in the experiment by precise tuning frequency equals 450,000％ at the frequency of around 551.9075 MHz.

• Proceedings of the Korean Magnestics Society Conference
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• 2007.05a
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• pp.143.1-143.1
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• 2007

• Journal of the Korean Magnetics Society
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• v.17 no.3
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• pp.141-146
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• 2007

A new class of LC-resonator for micro magnetic sensor device was invented and fabricated by means of MEMS technique. The micro LC-resonator consists of a solenoidal micro-inductor with a bundle of soft magnetic microwire cores and a capacitor connected in parallel to the micro-inductor. The core magnetic material is a tiny glass coated $Co_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire fabricated by a glasscoated melt spinning technique. The core materials were annealed at various temperatures $150^{\circ}C,\;200^{\circ}C\;,250^{\circ}C\;,$ and $300^{\circ}C$ for 1 hour in a vacuum to improve soft magnetic properties. The solenoidal micro-inductors fabricated by MEMS technique were $500{\sim}1,000{\mu}m$ in length with $10{\sim}20$ turns. The changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. Since the permeability of ultra soft magnetic microwire is changing rapidly as a function of external magnetic field. The inductance ratio as well as magnetoimpedance ratio (MIR) in a LC-resonator was varied drastically as a function of external magnetic field. The MIR curves can be tuned very precisely to obtain maximum sensitivity. A prototype magnetic sensor device consisting of the developed microinductors with a multivibrator circuit was test successfully.