• 제목/요약/키워드: Glass machining

검색결과 159건 처리시간 0.025초

MEMS 공정에 적용하기 위한 마이크로 블라스터 식각 특성 (Etching Characteristics of Micro Blaster for MEMS Applications)

  • 조찬섭;배익순;이종현
    • 센서학회지
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    • 제20권3호
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    • pp.187-192
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    • 2011
  • Abrasive blaster is similar to sand blaster, and effectively removes hard and brittle materials. Exiting abrasive blaster has applied to rough working such as deburring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro abrasive blaster was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro blaster in MEMS process of glass and succeed in domestically producing complete micro blaster. Diameter of hole and width of line in this etching is 100 ${\mu}m$ ~ 1000 ${\mu}m$. Experimental results showed good performance in micro channel and hole in glass wafer. Therefore, this micro blaster could be effectively applied to the micro machining of semiconductor, micro PCR chip.

렌즈 성형용 유리탄소 금형의 초정밀연삭 (Ultraprecision Grinding of Glassy Carbon Core for Mold Press Lens)

  • 황연;차두환;김정호;김혜정
    • 한국정밀공학회지
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    • 제29권3호
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    • pp.261-265
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    • 2012
  • In this study, glassy carbon was ground for lens core of glass mold press. Ultraprecision grinding process was applied for machining of core surfaces. During the process, brittle crack occurred because of hard-brittleness of glassy carbon. Author investigated optimized grinding conditions from the viewpoint of ductile mode grinding. Geometrical undeformed chip thickness was adopted for critical chip thickness that enables crack free surface. Machined cores are utilized for biaspheric glass lens fabrication and surfaces of lens were compared for verification of ground surface.

Structural Analysis of a Cavitary Region Created by Femtosecond Laser Process

  • Fujii, Takaaki;Goya, Kenji;Watanabe, Kazuhiro
    • 동력기계공학회지
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    • 제19권3호
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    • pp.5-10
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    • 2015
  • Femtosecond laser machining has been applied for creating a sensor function in silica glass optical fibers. Femtosecond laser pulses make it possible to fabricate micro structures in processed regions of a very thin glass fiber line because femtosecond laser pulses can extremely minimize thermal effects. With the laser machining to optical fiber using a single shot of 210-fs laser at a wavelength of 800 nm, it was observed that a processed region surrounded a thin layer which seemed to be a hollow cavity monitored by scanning electron microscopy (SEM). This study aims at a theoretical investigation for the processed region by using a numerical analysis in order to embed sensing function to optical fibers. Numerical methods based finite element method (FEM) has been used for an optical waveguide modeling. This report suggests two types modeling and describes a comparative study on optical losses obtained by the experiment and the numerical analysis.

SU-8 마스크를 이용한 유리의 입자분사 미세가공 정밀도 평가 (Precision assessment of micro abrasive jet machining result on glass by using thick SU-8 as a mask)

  • ;고태조;김희술;박영우;이인환
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.493-494
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    • 2006
  • SU-8 can be implemented as a mask for micro Abrasive Jet Machining (micro-AJM) process [1]. In this paper, we will evaluate the quality of micro grooving result on glass substrate by micro-AJM process which using SU-8 as a mask. It was evaluated on width and edge profile of the micro grooving. The result was having distortion compare with the master film used to pattern the SU-8 mask. The value of distortion with other properties which came along with it, such as depth and surface roughness, can be optimized in order to fabricate micro-channel for micro-fluidic application.

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다구찌 기법을 이용한 유리소재의 블라스팅 가공공정의 최적화에 관한 연구 (A Study on the Optimization for the Blasting Process of Glass by Taguchi Method)

  • 유우식;김권흡;정영배
    • 산업경영시스템학회지
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    • 제30권2호
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    • pp.8-14
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    • 2007
  • The powder blasting process has become an important machining technique for the cost effective fabrication of micro devices. This process is similar to sand blasting, and effectively removes hard and brittle materials. A large number of investigations on the abrasive jet machining with such output parameters as material removal rate, penetration and surface roughness have been carried out and reported by various authors. To achieve higher surface roughness, to increase material removal rate and to identify the influence of blasting parameters on the output parameters, we use the taguchi method which is one of the design methods of experiments. We can select process parameters to optimize the blasting process of glass. Experimental results indicate that the taguchi method is useful as a robust design methodology for the powder blasting process.

비구면 Glass Rod 렌즈 금형의 초정밀 연삭가공 (Ultra-precision Grinding Machining of Glass Rod Lens Core With Aspheric)

  • 김우순;김동현
    • 한국공작기계학회논문집
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    • 제18권1호
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    • pp.76-82
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    • 2009
  • To obtain the surface roughness with nano order, we need a ultra-precision machine, cutting condition, and materials. In this paper, the cutting condition for getting nano order smooth surface of core have been examined experimentally by the ultra-precision machine and diamond wheels. The effects of the cutting velocity, the feed rate and depth of cut on the surface roughness were studied. And also, the surface roughness was measured by the Form Talysurf series PGI 840. The champion data of developed core was surface roughness Rmax 24.6nm, figure accuracy Rmax 68.9nm.

드릴에 의한 유리섬유강화플라스틱의 절삭특성에 관한 연구 (A Study on the Cutting Characteristics of the Glass Fiber Reinforced Plastics by Drill Tools)

  • 박종남;조규재
    • 한국정밀공학회지
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    • 제21권3호
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    • pp.15-21
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    • 2004
  • Composite materials are widely used to make all kinds of machine parts, internal and structural materials of cars, aerospace industries, building structures, ship materials, sporting goods and others. It is worth the while to use composite materials as various substitutions when compared with others. But the use is limited in the field of the mechanical processing because of its difficulties in processing. Thus, it is proved that the surface is rough in and out of the hole processing the GFRP with HSS drill in the vertical machining center.

파우더 블라스팅에 의한 OELD용 유리캡의 가공 및 크랙 특성 (Machining and Crack Characteristics of the Glass Cap for OELD by Powder Blasting)

  • 박동삼;강대규;김정근;성은제;한진용
    • 한국공작기계학회논문집
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    • 제15권5호
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    • pp.51-58
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    • 2006
  • The old technique of sandblasting which has been used for paint of scale removing, deburring and glass decorating has recently been developed into a powder blasting technique for brittle materials, capable of producing micro structures larger than $100{\mu}m$. Recently, this technique is applied to fabrication of the glass cap for OELD packaging. But, micro crack is generated on the blasted glass, which cause to decrease fracture strength. In this paper, we investigated the effect of blasting parameters on surface characteristics, surface shape and fracture strength of the powder blasted glass surface.

유리섬유 강화 폴리에스터의 드릴가공 특성 (Drilling Characteristics of Glass Fiber Reinforced Polyester)

  • 김성일
    • 한국생산제조학회지
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    • 제9권3호
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    • pp.90-95
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    • 2000
  • Today fiber composite materials are routinely used in such wide applications as ships automobiles aircraft space vehi-cles containers sporting goods and appliances. The current knowledge of machining glass fiber reinforced polyester com-posites unfortunately is inadequate for its optimum utilization in many applications. Therefore This paper deals with drilling characteristic of glass fiber reinforced polyester composites. In the drilling of glass fiber reinforced polyester the quality of the cut surfaces is strongly dependent on the drilling parameters. drilling tests were carried out on glass fiber reinforced polyester using standard HSS tools. The material containing random chopped strand fibers and woven roving was fabricated by hand lay-up The entrance and exit surface of the holes was examined. The cutting force was also mea-sured to analyze the drilling characteristics,.

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Abrasive Water-Jet이 가공물의 형상에 미치는 영향 (Influence of Abrasive Water-Jet on Workpiece Geometry)

  • 장현석;하만경;류인일;곽재섭;이상진;이기백
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2002년도 춘계학술대회 논문집
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    • pp.585-590
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    • 2002
  • Abrasive water-jet(AWJ) machining is a new cutting technology. The AWJ can cut various materials touch as metal, glass and stone. However, the AWJ machining makes troubles including kerf, rounding and side taper. In this study, we investigated the correlation between parameters of abrasive water-jet machining arid cutting characteristics. The machining parameter were the material thickness and the traverse speed. The experiment was conducted to cut the stainless steel(STS41) and the mild steel(SS41) specimens. The results of the experiment weirs presented as the relation between cutting conditions and trouble of a dimension error, a conner error, an uncut width and a kerf.

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