• Title/Summary/Keyword: Ge redistribution

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Effect of Ge Redistribution and Interdiffusion during Si1-xGex Layer Dry Oxidation (Si1-xGex 층의 건식산화 동안 Ge 재 분포와 상호 확산의 영향)

  • Shin, Chang-Ho;Lee, Young-Hun;Song, Sung-Hae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.12
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    • pp.1080-1086
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    • 2005
  • We have studied the Ge redistribution after dry oxidation and the oxide growth rate of $Si_{1-x}Ge_x$ epitaxial layer. Oxidation were performed at 700, 800, 900, and $1,000\;^{\circ}C$. After the oxidation, the results of RBS (Rutherford Back Scattering) & AES(Auger Electron Spectroscopy) showed that Ge was completely rejected out of the oxide and pile up at $Si_{1-x}Ge_x$ interface. It is shown that the presence of Ge at the $Si_{1-x}Ge_x$ interface changes the dry oxidation rate. The dry oxidation rate was equal to that of pure Si regardless of Ge mole fraction at 700 and 800$^{\circ}C$, while it was decreased at both 900 and $1,000^{\circ}C$ as the Ge mole fraction was increased. The dry of idation rates were reduced for heavy Ge concentration, and large oxiidation time. In the parabolic growth region of $Si_{1-x}Ge_x$ oxidation, the parabolic rate constant are decreased due to the presence of Ge-rich layer. After the longer oxidation at the $1,000^{\circ}C$, AES showed that Ge peak distribution at the $Si_{1-x}Ge_x$ interface reduced by interdiffusion of silicon and germanium.

Study on Property Variations of $CoSi_2$ Electrode with Its Preparation Methods ($CoSi_2$ 전극 구조의 증착법에 따른 특성 변화 연구)

  • Nam, Hyoung-Gin
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.4
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    • pp.5-9
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    • 2007
  • Phase transition and dopant redistribution during silicidation of $CoSi_2$ thin films were characterized depending on their preparation methods. Our results indicated that cleanness of the substrate surface played an important role in the formation of the final phase. This effect was found to be reduced by addition of W resulting in the formation of $CoSi_2$. However, even in this case, the formation of the final phase was achieved at the cost of extra thermal energy, which induced rough interface between the substrate and the silicide film. As for the dopant redistribution, the deposition sequence of Co and Si on SiGe was observed to induce significant differences in the dopant profiles. It was found that co-deposition of Co and Si resulted in the least redistribution of dopants thus maintaining the original dopant profile.

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Spectroscopic Properties of Er-doped Sulfide Fiber (Er 첨가 황화물계 광섬유의 제조 및 분광학적 특성)

  • Choi, Yong-Gyu;Lim, Dong-Sung;Kim, Kyong-Hon;Park, Se-Ho;Heo, Jong
    • Journal of the Korean Ceramic Society
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    • v.37 no.8
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    • pp.781-786
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    • 2000
  • An Er-doped sulfide fiber was drawn, and its spectroscopic properties were analyzed. Compositions of a 1000 ppmwt Er3+-doped core and an undoped clad were Ge30-Ga1-Asg-S61 and Ge30-As8-S62, in at.%, respectively. Refractive index of the core composition was approximately 0.01 high than that of the clad. In order to enhance the mechanical stability as well as to prevent infiltration of impurity ions such as OH-, an UV-curable polymer was used for the coating. The optical loss of a fiber formed directly from a polymer coated core rod without cladding was ∼15 dB/m at 1.06$\mu\textrm{m}$. In the case of a fiber with core/clad structure, the optical loss was so high that the stimulated emission of erbium fluorescence was not evident. It is believed that presence of inhomogeneous core/clad interface and crystalline aggregates precipitated in the clad region were responsible for the high optical loss. On the other hand, fluorescence characteristics of Er3+ embedded in the core region were more or loss deteriorate compared to fiber preform, which is attributed to the redistribution of the Er ions along with the partial crystallization of the core glass during the fiberization process.

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Predictive Values of Early Rest/24 Hour Delay T1-201 Perfusion SPECT for Wall Motion Improvement in Patients with Acute Myocardial Infarction After Reperfusion (급성 심근 경색 환자에서 재관류 후 조기에 시행한 휴식/24시간 지연 T1-201 심근 SPECT의 심근벽 운동 호전 예측능)

  • Hyun, In-Young;Kwan, June
    • The Korean Journal of Nuclear Medicine
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    • v.32 no.3
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    • pp.259-265
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    • 1998
  • Purpose: We studied early rest/24 hour delay T1-201 perfusion SPECT for prediction of wall motion improvement after reperfusion in patients with acute myocardial infarction. Materials and Methods: Among 17 patients (male/female= 11/6, age: $59{\pm}13$) with acute myocardial infarction, 15 patients were treated with percutaneous transcoronary angioplasty (direct:2, delay: 11) and intravenous urokinase (2). Spontaneous resolution occurred in infarct-related arteries of 2 patients. We confirmed TIMI 3 flow of infarct-related artery after reperfusion in all patients with coronary angiography. We performed rest T1-201 perfusion SPECT less then 6 hours after reperfusion and delay T1-201 perfusion SPECT next day. T1-201 uptake was visually graded as 4 point score from normal (0) to severe defect (3). Rest T1-201 uptake ${\le}2$ or combination of rest T1-201 uptake ${\le}2$ or late reversibility were considered to be viable. Myocardial wall motion was graded as 5 point score from normal (1) to dyskinesia (5). Myocardial wall motion was considered to be improved when a segment showed an improvement ${\ge} 1$ grade in follow up echo compared with the baseline values. Results: Among 98 segments with wall motion abnormality, the severity of myocardial wall motion decrease was as follow: mild hypokinesia: 18/98 (18%), severe hypokinesia: 28/98 (29%), akinesia: 51/98 (52%), dyskinesia: 1/98 (1%). The wall motion improved in 85%. Redistribution (13%), and reverse redistribution (4%) were observed in 24 hour delay SPECT. Positive predictive value (PPV) and negative predictive value (NPV) of combination of late reversibility and rest T1-201 uptake were 99%, and 54%. PPV and NPV of rest T1-201 uptake were 100% and 52% respectively. Predictive values of combination of rest T1-201 uptake and late reversibility were not significantly different compared with predictive values of rest T1-201 uptake only. Conclusion: We conclude that early T1-201 perfusion SPECT predict myocardial wall motion improvement with excellent positive but relatively low negative predictive values in patients with acute myocardial infarction after reperfusion.

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