• 제목/요약/키워드: Gas-phase deposition

검색결과 244건 처리시간 0.028초

대기 중 질소산화물의 건식침적 특성 (Characteristics of Atmospheric Dry Deposition of Nitrogen-containing Compounds)

  • 이승묵;한영지;정장표
    • 대한환경공학회지
    • /
    • 제22권4호
    • /
    • pp.775-784
    • /
    • 2000
  • 본 연구는 그리스 대체표면을 사용한 건식침적판(knife-leading-edge surrogate surface)과 물표면 채취기(water surface sampler)를 이용하여 질산염(입자상, 가스상)의 전식침적량을 직접 측정하였다. 평균 가스상 건식침적량($8.3mg/m^2/day$) 이 입자상 건식침적량($3.0mg/m^2/day$)에 비해 훨씬 큰 값을 나타내었다. 직접 측정한 질산염의 가스상 건식침적량과 대기 중 질산($HNO_3$) 농도 사이의 선형회귀분석을 통하여 질산의 가스상 질량전달계수률 구하였다. 이와 같이 구한 질산의 질량전달계수는 이산화황($SO_2$)의 질량전달계수의 약 2배가 되는 값을 보여주었다. 특히, 오존주의보시에는 Graham의 확산법칙을 사용하여 이산화황의 질량전달계수로부터 계산한 질산의 질량전달계수와 대기 중 질산 농도와의 곱으로 추정된 질산염의 가스상 건식침적량에 비해, 측정된 건식침적량이 훨씬 높은 값을 나타내는 특이한 현상을 보였다. 이 결과는 질산 외의 가스상 화학종이 질소산화물의 가스상 건식침적량에 영향을 미친다는 사실을 나타내고 있다. 이론적인 계산결과에 의하면 아질산($HNO_2$) 과 PAN이 질소산화물의 가스상 건식침적량에 기여할 가능성이 높은 것으로 나타났다.

  • PDF

RF 마그네트론 스터터링에 의한 ZnO박막증착 및 SAW 필터 특성 분석 (Deposition of ZnO Thin Films by RF Magnetron Sputtering and Charcaterization of the ZnO thin film SAW filter)

  • 이용의;양형국;김영진;한정인;김형준
    • 한국재료학회지
    • /
    • 제4권7호
    • /
    • pp.783-791
    • /
    • 1994
  • rf 마그네트론 스퍼터링법을 이용하여 7059 유리기판 위에 ZnO압전박막을 증착하고, 공정변수인 rf 인가전력, 반응기 압력, $O_{2}$/Ar의 조성비등이 증착되는 박막의 결정성 및 전기적 특성에 미치는 영향을 고찰하였다. 증착된 ZnO박막은 문헌에 보고된 증착속도보다 높은 값(200-1000$\AA$/min)을 가졌으며, XRD(002)피크의 rocking curve 표준편차가 SAW 필터로의 응용이 가능한 $6^{\circ}$미만의 값을 가졌다. $O_{2}$Ar 유입비가 25%이상의 경우에는 매우 높은 저항치를 가짐을 알 수 있었다. ZnO박막의 두께와 파장의 비, $\frac{h}{\lambda}$=0.25인 조건에서 필터를 제조하였다. 측정한 주파수 응답특성과 이론치에 의해 계산한 주파수응답특성은 비교적 잘 일치함을 알 수 있었다. 이때 중심주파수는 39.08MHz였으며, 상속도는 \ulcorner 2501m/sec, 삽입손실은 약 29dB였다.

  • PDF

Effect of Mixture Ratio Variation near Chamber Wall in Liquid Rocket Engine

  • Han, Poong-Gyoo;Kim, Kyoung-Ho
    • International Journal of Aeronautical and Space Sciences
    • /
    • 제4권2호
    • /
    • pp.51-60
    • /
    • 2003
  • An experimental research program is being undertaken to develop a regeneratively-cooled experimental thrust chamber of liquid rocket engine using liquefied natural gas and liquid oxygen as propellants. Prior to firing test using a regenerative cooling with liquefied natural gas in this program, several firing tests were conducted with water as a coolant. Experimental thrust chambers with a thrust of about 10tf were developed and their firing test facility was built up. Injector used in the thrust chamber was of shear-coaxial type appropriate for propellants of gas and liquid phase and cooling channels are of milled rectangular configuration. Periodical variation of the soot deposition and discoloration was observed through an eyes' inspection on the inner wall of a combustion chamber and a nozzle after each firing test, and an intuitive concept of the periodical variation of mixture ratio near the inner wall of a combustion chamber and a nozzle at once was brought about and analyzed quantitatively. Thermal heat flux to the coolant was calculated and modified with the periodical variation model of mixture ratio, and the increment of coolant temperature at cooling channels was compared with measured one.

$TiCl_4/AlCl_3/N_2/Ar/H_2$ 반응계를 사용하는 플라즈마화학증착법에 의한 $Ti_{1-x}Al_xN$ 박막의 구조분석 및 물성 (Structural Analyses and Properties of $Ti_{1-x}Al_xN$ Films Deposited by PACVD Using a $TiCl_4/AlCl_3/N_2/Ar/H_2$ Gas Mixture)

  • 김광호;이성호
    • 한국세라믹학회지
    • /
    • 제32권7호
    • /
    • pp.809-816
    • /
    • 1995
  • Ti1-xAlxN films were successfully deposited on high speed steel and silicon wafer by plasma-assisted chemical vapor deposition using a TiCl4/AlCl3/N2/Ar/H2 gas mixture. Plasma process enabled N2 gas to nitride AlCl3, which is not possible in sense of thermodynamics. XPS analyses revealed that the deposited layer contained Al-N bond as well as Ti-N bond. Ti1-xAlxN films were polycrystalline and had single phase, B1-NaCl structure of TiN. Interplanar distance, d200, of (200) crystal plane of Ti1-xAlxN was, however, decreased with Al content, x. Al incorporation into TiN caused the grain size to be finer and changed strong (200) preferred orientation of TiN to random oriented microstructure. Those microstructural changes with Al addition resulted in the increase of micro-hardness of Ti1-xAlxN film up to 2800Kg/$\textrm{mm}^2$ compared with 1400Kg/$\textrm{mm}^2$ of TiN.

  • PDF

Magnetron sputtering으로 증착한 ZnO 박막의 특성과 열처리에 따른 비저항과 미세구조 (A properties of ZnO thin film deposited by magnetron sputtering and its resistivity and microstructure due to annealing)

  • 이승환;성영권;김종관
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제10권2호
    • /
    • pp.126-133
    • /
    • 1997
  • In order to apply for the gas sensing layer and the piezoelectric thin film devices, we studied the effects of magnetron sputtering conditions and annealing temperature on the electrical and structual characteristics of the ZnO thin film. The optimal deposition conditions, in order to obtain a c axis of the ZnO (002) phase thin film which is perpendicular to SiO$_{2}$/Si substrate, were like these ; substrate temperature 150.deg. C, chamber pressure 2 mtorr, R.F. power 300 watts, gas flow ratio 0.4[O$_{2}$(Ar + $O_{2}$)]. When the ZnO thin film was annealed in 600.deg. C, $O_{2}$ gas ambient for 1 hr, the resistivity was 2.6 x 10$^{2}$.ohm.cm and the grain size of ZnO thin film was less than 1 .mu.m. So the ZnO thin film acquired from above conditions can apply for the gas sensing layer which require a c axis perpendicular to the substrate surface.

  • PDF

산소 분리를 위한 무공성 세라믹- 금속 복합 무기막 (Dense Ceramic-metal Composite Inorganic Membranes for Oxygen Separation)

  • 김진수
    • 한국막학회:학술대회논문집
    • /
    • 한국막학회 2002년도 춘계 총회 및 학술발표회
    • /
    • pp.35-41
    • /
    • 2002
  • Dense oxygen ionic conducting materials can be used for oxygen separation membranes at high temperatures. However, they show relatively low permeation flux because of their large resistances. To reduce resistances and improve the oxygen permeation flux, thin dense yttria-stabilized-zirconia (YSZ)/Pd composite dual-phase membranes were fabricated by a new approach that combines the reservoir method and chemical vapor deposition (CVD). A thin porous YSZ layer was coated on a porous alumina support by dip-coating the YSZ suspension. A continuous Pd phase was formed inside pores of the YSZ layer by the reservoir method. The residual pores of the YSZ/Pd layer were plugged with yttria/zirconia by CVD to ensure the gas tightness of the membranes. The oxygen permeation fluxes through these composite membrane were 2.0$\times$10$^{-8}$ mol/cm$^2$.s and 4.8$\times$10$^{-8}$ mol/cm$^2$.s at 105$0^{\circ}C$ when air and oxygen were used as the permeate gases, respectively. These oxygen permeation values are about 1 order of magnitude higher than those of pure YSZ membranes prepared under similar conditions.

  • PDF

진공 저온 분사 공정을 통해 형성된 Fe계 비정질 재료의 적층거동 및 미세구조 변화 관찰 (Deposition Behavior and Microstructure of Fe-based Amorphous Alloy Fabricated by Vacuum Kinetic Spraying Process)

  • 권주혁;박형권;이일주;이창희
    • 한국재료학회지
    • /
    • 제24권1호
    • /
    • pp.60-65
    • /
    • 2014
  • Fe-based amorphous coatings were fabricated on a soda-lime glass substrate by the vacuum kinetic spray method. The effect of the gas flow rate, which determines particle velocity, on the deposition behavior of the particle and microstructure of the resultant films was investigated. The as-fabricated microstructure of the film was studied by field emission scanning electron microscopy (FE-SEM) and high resolution transmission electron microscopy (HR-TEM). Although the activation energy for transformation from the amorphous phase to crystalline phase was lowered by severe plastic deformation and particle fracturing under a high strain rate, the crystalline phases could not be found in the coating layer. Incompletely fractured and small fragments 100~300 nm in size, which are smaller than initial feedstock material, were found on the coating surface and inside of the coating. Also, some pores and voids occurred between particle-particle interfaces. In the case of brittle Fe-based amorphous alloy, particles fail in fragmentation fracture mode through initiation and propagation of the numerous small cracks rather than shear fracture mode under compressive stress. It could be deduced that amorphous alloy underwent particle fracturing in a vacuum kinetic spray process. Also, it is considered that surface energy caused by the formation of new surfaces and friction energy contributed to the bonding of fragments.

Selective Growth of Nanosphere Assisted Vertical Zinc Oxide Nanowires with Hydrothermal Method

  • Lee, Jin-Su;Nam, Sang-Hun;Yu, Jung-Hun;Yun, Sang-Ho;Boo, Jin-Hyo
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
    • /
    • pp.252.2-252.2
    • /
    • 2013
  • ZnO nanostructures have a lot of interest for decades due to its varied applications such as light-emitting devices, power generators, solar cells, and sensing devices etc. To get the high performance of these devices, the factors of nanostructure geometry, spacing, and alignment are important. So, Patterning of vertically- aligned ZnO nanowires are currently attractive. However, many of ZnO nanowire or nanorod fabrication methods are needs high temperature, such vapor phase transport process, metal-organic chemical vapor deposition (MOCVD), metal-organic vapor phase epitaxy, thermal evaporation, pulse laser deposition and thermal chemical vapor deposition. While hydrothermal process has great advantages-low temperature (less than $100^{\circ}C$), simple steps, short time consuming, without catalyst, and relatively ease to control than as mentioned various methods. In this work, we investigate the dependence of ZnO nanowire alignment and morphology on si substrate using of nanosphere template with various precursor concentration and components via hydrothermal process. The brief experimental scheme is as follow. First synthesized ZnO seed solution was spun coated on to cleaned Si substrate, and then annealed $350^{\circ}C$ for 1h in the furnace. Second, 200nm sized close-packed nanospheres were formed on the seed layer-coated substrate by using of gas-liquid-solid interfacial self-assembly method and drying in vaccum desicator for about a day to enhance the adhesion between seed layer and nanospheres. After that, zinc oxide nanowires were synthesized using a low temperature hydrothermal method based on alkali solution. The specimens were immersed upside down in the autoclave bath to prevent some precipitates which formed and covered on the surface. The hydrothermal conditions such as growth temperature, growth time, solution concentration, and additives are variously performed to optimize the morphologies of nanowire. To characterize the crystal structure of seed layer and nanowires, morphology, and optical properties, X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), Raman spectroscopy, and photoluminescence (PL) studies were investigated.

  • PDF

가스 하이드레이트 부존층의 구조 파악을 위한 탄성파 전산처리 및 AVO 분석 (Seismic Pre-processing and AVO analysis for understanding the gas-hydrate structure)

  • 정부흥
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 한국신재생에너지학회 2005년도 춘계학술대회
    • /
    • pp.634-637
    • /
    • 2005
  • Multichannel seismic data acquired in Ulleung Basin of East Sea for gas hydrate exploration. The seismic sections of this area show strong BSR(bottom simulating reflections) associated with methane hydrate occurrence in deep marine sediments. Very limited information is available from deep sea drilling as the risk of heating and destabilizing the initial hydrate conditions during the processing of drilling is considerably high. Not so many advanced status of gas hydrate exploration in Korea, the most of information of gas hydrate characteristics and properties are inferred from seismic reflection data. In this study, The AVO analysis using the long offset seismic data acquired in Ulleung Basin used to explain the characteristics and structure of gas hydrate. It is used primarily P-wave velocity accessible from seismic data. To make a good quality of AVO analysis input data, seismic preprocessing including 'true gain correction', 'source signature deconvolution', twice velocity analysis and some kinds of multiple rejection and enhancing the signal to noise ratio processes is carried out very carefully. The results of AVO analysis, the eight kinds of AVO attributes are estimated basically and some others of AVO attributes are evaluated for interpretation of AVO analysis additionally. The impedance variation at the boundary of gas hydrate and free gas is estimated for investing the BSR characteristics and properties. The complex analysis is performed also to verifying the amplitude variation and phase shift occurrence at BSR. Type III AVO anomaly appearance at saturated free gas area is detected on BSR. It can be an important evidence of gas hydrate deposition upper the BSR.

  • PDF

플라즈마 화학증착법에 의해 제조된 (Ti$_{1-x}$AI$_{x}$)N 박막의 미세조직 및 기계적 특성에 관한 연구 (The Microstructure And The Mechanical Properties Of(Ti$_{1-x}$AI$_{x}$)N Coatings Deposited By Plasma Enhanced Chemical Vapor Deposition(PECVD))

  • 이동각;이승훈;한영훈;이정중
    • 한국표면공학회지
    • /
    • 제34권2호
    • /
    • pp.97-104
    • /
    • 2001
  • ($Ti_{ 1-x}$$Al_{ x}$)N has been deposited on high speed steel (HSS) substrate using PECVD from the gas mixture of $TiC1_4$, $AlC1_4$, $NH_3$, $H_2$, and Ar. The correlation between the microstructure and the mechanical properties was investigated. ($Ti_{1-x}$$Al_{ x}$)N showed single phase NaCl-structure up to X=0.87, while a mixed phase of NaCl Type (Ti, Al) N and wurtzite structure AlN was observed for 0.87$Ti_{1-x}$ $Al_{x}$ )N became by degrees as increasing X, which made the hardness of the coating higher by Al addition. When the coating was composed of a mixed phase, however, the hardness decreased abruptly due to the effect of soft AlN phase. The wear volume of the coatings could be obtained as the concentration of the coating was varied, and the relation between the wear volume and hardness or the adhesion strength was discussed.

  • PDF