Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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The Microstructure And The Mechanical Properties Of(Ti$_{1-x}$AI$_{x}$)N Coatings Deposited By Plasma Enhanced Chemical Vapor Deposition(PECVD)

플라즈마 화학증착법에 의해 제조된 (Ti$_{1-x}$AI$_{x}$)N 박막의 미세조직 및 기계적 특성에 관한 연구

  • Lee, D.K. (School of Materials and Engineering, Seoul National University) ;
  • Lee, S.H. (School of Materials and Engineering, Seoul National University) ;
  • Han, Y.H. (School of Materials and Engineering, Seoul National University) ;
  • Lee, J.J. (School of Materials and Engineering, Seoul National University)
  • 이동각 (서울대학교) ;
  • 이승훈 (서울대학교) ;
  • 한영훈 (서울대학교) ;
  • 이정중 (서울대학교)
  • Published : 2001.04.01
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Abstract

($Ti_{ 1-x}$$Al_{ x}$)N has been deposited on high speed steel (HSS) substrate using PECVD from the gas mixture of $TiC1_4$, $AlC1_4$, $NH_3$, $H_2$, and Ar. The correlation between the microstructure and the mechanical properties was investigated. ($Ti_{1-x}$$Al_{ x}$)N showed single phase NaCl-structure up to X=0.87, while a mixed phase of NaCl Type (Ti, Al) N and wurtzite structure AlN was observed for 0.87$Ti_{1-x}$ $Al_{x}$ )N became by degrees as increasing X, which made the hardness of the coating higher by Al addition. When the coating was composed of a mixed phase, however, the hardness decreased abruptly due to the effect of soft AlN phase. The wear volume of the coatings could be obtained as the concentration of the coating was varied, and the relation between the wear volume and hardness or the adhesion strength was discussed.

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