• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• Journal of the Korean Ceramic Society
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• v.31 no.6
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• pp.637-642
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• 1994

Using SHS(Self-propagating High-temperature Synthesis) method, the optimum synthetic condition of titanium carbonitride was established by controlling the parameters such as relative density of mixture (Ti+C), nitrogen pressure, additive amounts of titanium hydride(TiH1.924) and protecting heat loss. Under 1 atm nitrogen pressure, nitridation ratio with changing relative density of the sample compacts has a maximum (87.2%) at about 55%, and in the case of enveloping the pellet with a quartz tube, the highest nitridation ratio of 90% was obtained at about 68%. At relative density of 55%, nitridation ratio with the nitrogen pressure has a miximum (87.3%) at 7 atm. As the amounts of additive titanium hydride increased, nitridation ratio decreased at below 7 atm nitrogen pressure and, increased at above this pressure until percent of addition percent reached 15 wt% and decreased abruptly upon futher increases in titanium hydride. In the synthesis of TiCxNy by combustion reaction, heat transfer from combustion zone to preheating zone and nitrogen gas penetration into the compact were found to be important factors affecting the TiCxNy formation. It was difficult to obtain high nitridation ratio when the conbustion temperature was either too high or too low, and it seems that the retention of high temperature after a combustion wave sweeped through the reactant mixture pellet is critical to obtain a satisfactory nitridation ratio.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.368-368
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• 2008

Ion implantation has been widely developed during the past decades to become a standard industrial tool. To comply with the growing needs in ion implantation, innovative technology for the control of ion beam parameters is required. Beam current, beam profile, ion fractions are of great interest when uniformity of the implant is an issue. Especially, it is important to measure the spatial distribution of beam power and also the energy distribution of accelerated ions. This energy distribution is influenced by the proportion of mass for ion in the plasma generator(ion source) and by charge exchange and dissociation within the accelerator structure and also by possible collective effects in the neutralizer which may affect the energy and divergence of ions. Hydrogen atom has been the object of a good study to investigate the energy distribution. Hydrogen ion sources typically produce multi-momentum beams consisting of atomic ion ($H^+$) and molecular ion ($H_2^+$ and $H_3^+$). In the beam injector, the molecular ions pass through a charge-exchanges gas cell and break up into atomic with one-half (from $H_2^+$) or one-third (from $H_3^+$) according to their accelerated energy. Burrell et al. have observed the Doppler shifted lines from incident $H^+$, $H_2^+$, and $H_3^+$ using a Doppler shift spectroscopy. Several authors have measured the proportion of mass for hydrogen ion and deuterium using an ion source equipped with a magnetic dipole filter. We developed an ion implanter with 50-KeV and 20-mA ion source and 100-keV accelerator tube, aiming at commercial uses. In order to measure the proportion of mass for ions, we designed a filter system which can be used to measure the ion fraction in any type of ion source. The hydrogen and helium ion species compositions are used a filter system with the two magnets configurations.

• Journal of Bio-Environment Control
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• v.18 no.3
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• pp.200-207
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• 2009

This study was conducted to analyze the variations of air temperature, relative humidity and pressure in a low pressure chamber for plant growth. The low pressure chamber was composed of an acrylic cylinder, a stainless plate, a mass flow controller, an elastomer pressure controller, a read-out-box, a vacuum pump, and sensors of air temperature, relative humidity, and pressure. The pressure leakage in the low pressure chamber was greatly affected by the material and connection method of tubes. The leakage rate in the low pressure chamber with the welding of the stainless tubes and a plate decreased by $0.21kPa{\cdot}h^{-1}$, whereas the leakage in the low pressure chamber with teflon tube and rubber O-ring was given by $1.03kPa{\cdot}h^{-1}$. Pressure in the low pressure chamber was sensitively fluctuated by the air temperature inside the chamber. An elastomer pressure controller was installed to keep the pressure in the low pressure chamber at a setting value. However, inside relative humidity at dark period increased to saturation level.. Two levels (25 and 50kPa) of pressure and two levels (500 and 1,000sccm) of mass flow rate were provided to investigate the effect of low pressure and mass flow rate on relative humidity inside the chamber. It was concluded that low setting value of pressure and high mass flow rate of mixed gas were the effective methods to control the pressure and to suppress the excessive rise of relative humidity inside the chamber.

• Journal of The Korean Society of Clinical Toxicology
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• v.4 no.1
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• pp.69-72
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• 2006

Dicamba is a benzoic acid and classified as a chemically related chlorophenoxy herbicide which is widely used for the control of broad-leaved weeds. While the chlorophenoxy herbicide poisoning is known to be uncommon, its ingestion can result in serious or sometimes fatal outcome. A 65-year-old man ingested about 300 ml of dicamba in a suicidal attempt and three hours later he was admitted hospital, complaining abdominal pain, nausea and vomiting. On admission his vital signs were normal and laboratory findings were not remarkable except metabolic acidosis in arterial blood gas analysis. Shortly after the admission endotracheal tube was inserted due to altered mental state and activated charcoal was given after performing gastric lavage. However, his vital signs became unstable 6hrs after the ingestion and mechanical ventilation was started with administration of inotropic agents. In spite of urine alkalization for rapid elimination of the absorbed dicamba, the metabolic acidosis was aggravated with concomitant rhabdomyolysis and acute renal failure, and he died 24 hrs after the ingestion.

• Journal of the Korean Ceramic Society
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• v.13 no.1
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• pp.25-29
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• 1976

The properties vary with quality of ferric-oxide that is major material of ferrites. In this point of view, a manufacturing method of pure and homogeneous fine ferric oxide is very important. The characters of this study are as follows: 1) Ferric oxide was made from waste pickling liquor of steel. 2) The crude ferric-oxide that is made by roasting the pickling liquor was dissolved in 20% HCI solution and then produced ferric chloride is purified by ethyl ether extraction. 3) The methanol solution of purified ferric chloride was sprayed into the refractory tube with compressed air and propane gas and then ignited leading to the ferric-oxide powder. 4) The produced oxide powder was introduced to the scrubber type vessel throught cooling system in order to collect the powder. 5) Crystalline phase of the powder was identified by X-ray diffraction and particle size, crystalline shape of the powder were investigated by settling method and electron microscope and the effects of concentration of ferric chloride in methanol on grain size were discussed. Results were obtained as fellows: 1) Total impurity in the ferric oxide produced from waste pickling liquor was 3.7%. 2) The solubilityof crude ferric oxide that was made from waste pickling liquor in HCI solution increased with the HCI concentration and reached to saturation range at 15% HCI concentration. 3) Extraction of FeCl3 increased with HCI concentration which is solvent. 4) Alpha ferric oxide obtained was very fine crystalline particles, the mean crystalline grain increased with the concentration of ferric chloride, and mean grain size distributed from 3.5$\mu$(at 0.5mole/l) to 0.5$\mu$(at 0.05mole/l).

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.6
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• pp.1253-1259
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• 2005

This paper dealt with the development of surge protection devices (SPDs) that can protect high speed computer network devices from overvoltages caused by switching operations or lightning surges. The designed SPD is a form of hybrid circuit which is composed of a gas tube having large current diverting capability, high response bi-directional avalanche diodes, and fast recovery diodes to reduce insertion loss on high frequency domain. Surge protection and signal transmission characteristics of the fabricated SPD was tested according to the international standards, IEC 61000-4-5 and IEC 61643-21. From the test results, the SPD is satisfied with the international standards and the high cut-off frequency was 204 MHz. Also, the SPD showed a good performance without an insertion loss on a field test of 100 Mbps class Local Area Network.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.35 no.1
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• pp.27-32
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• 2007

this paper the acoustic signature from a supersonic nozzle is measured and compared to the result of a program developed for a gas turbine noise prediction. In order to measure the jet Mach Number, the pressure and temperature at the settling chamber was measured along with pressures from a pitot-tube placed near the exit. The results are also compared to the ones obtained with a shadow graph technique. Jet noise produced by an imperfectly expanded jet contains shock associated noise, which consist of broadband noise and screech tone noise. For subsonic condition, the directivity is dominant to the downstream direction due to turbulence mixing noise. For supersonic conditions, however, the directivity is dominant toward upstream direction due to shock associated noise. The comparison with a jet exhaust noise prediction code shows good agreement at supersonic conditions but needs to be improved at subsonic speeds.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.25.2-25.2
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• 2010

CNT(Carbon Nanotube)는 특이한 구조 및 뛰어난 물성을 갖고 있어, 여러가지 분야에 응용 가능한 신소재로서 연구되어 왔다. 또한 모양 및 구조에 따라 기계, 전기, 화학적인 특성이 달라 다양한 분야에서 활용이 가능하다. 외국에서는 FED tip, TR, 디스플레이 소자, 수소저장체, 고강도 복합체 및 대 표면적 전극 등 CNT의 다양한 특성을 이용한 응용이 연구되고 있는 반면, 국내에서는 이론연구와 합성연구에 편중되어 있다. 본 연구에서는 열 화학 기상법 (Thermal CVD)을 이용하여 MWNT(Multi-wall nano tube)를 성장시켜 촉매두께, 온도, gas변수에 따른 CNT의 양상을 분석하였다. Ni catalyst는 DC magnetron sputter를 이용하여 5~50nm 두께로 증착하였으며, 성장온도는 $800^{\circ}C$에서 $950^{\circ}C$까지 변화시켰다. 기판의 pre-treatment 로 ammonia($NH_3$) gas를 주입한 후, carbon precursor인 methane($CH_4$) gas와 $H_2$ dilute gas를 1:4의 비율로 주입하여 CNT를 성장시켰다. FE-SEM과 TEM, 그리고 XRD를 이용해 성장된 CNT의 형상 및 구조를 분석한 결과, 낮은 온도에서는 100nm이상의 두께를 갖는 수직형상의 MWNT가 성장되었으며, $900^{\circ}C$이상의 높은 온도에서는 20nm이하의 amorphous carbon nano rod가 성장되었다. 각각의 MWNT, carbon nano rod는 온도가 높을수록 직경이 증가하는 추세를 나타냈으며, Ni catalyst가 얇아질수록 수직형상을 갖는 결과가 나타났다. 또한 ammonia gas의 pre-treatment여부에 따라 CNT의 수직 형상이 좌우되는 결과를 확인하였다. 향후 성장된 MWNT의 최적 조건을 도출하여 디스플레이 소자인 FED(Field Emission Display)분야 등에 응용 가능할 것으로 전망된다.

• Korean Journal of Materials Research
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• v.23 no.4
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• pp.246-249
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• 2013

Nano-sized ${\beta}$-SiC nanoparticles were synthesized combined with a sol-gel process and a carbothermal process. TEOS and carbon black were used as starting materials for the silicon source and carbon source, respectively. $SiO_2$ nanoparticles were synthesized using a sol-gel technique (Stober process) combined with hydrolysis and condensation. The size of the particles could be controlled by manipulating the relative rates of the hydrolysis and condensation reactions of tetraethyl orthosilicate (TEOS) within the micro-emulsion. The average particle size and morphology of synthesized silicon dioxide was about 100nm and spherical, respectively. The average particles size and morphology of the used carbon black powders was about 20nm and spherical, respectively. The molar ratio of silicon dioxide and carbon black was fixed to 1:3 in the preparation of each combination. $SiO_2$ and carbon black powders were mixed in ethanol and ball-milled for 12 h. After mixing, the slurries were dried at $80^{\circ}C$ in an oven. The dried powder mixtures were placed in alumina crucibles and synthesized in a tube furnace at $1400{\sim}1500^{\circ}C$ for 4 h with a heating rate of $10^{\circ}C$/min under flowing Ar gas (160 cc/min) and furnace cooling down to room temperature. SiC nanoparticles were characterized by XRD, TEM, and SAED. The XRD results showed that high purity beta silicon carbide with excellent crystallinity was synthesized. TEM revealed that the powders are spherical shape nanoparticles with diameters ranging from 15 to 30 nm with a narrow distribution.