• 한국진공학회지
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• 제9권1호
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.262.2-262.2
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• 2014

Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

• 한국자동차공학회논문집
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• 제2권4호
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• pp.112-119
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• 1994

This study is investigated into the dynamic effect of the manifold configuration during the gas exchange processes using both simulation and experiment, In theoretical study on the flow analysis, the characteristic method is applied to solve the compressible unsteady flow equation, involving the several steady flow boundary conditions. In order to excute the engine experiment efficiently, a data acquisition system is configured by using A/D converter and PC. Good results which coincided experimental data with simulation output were obtained, and it shows that this simulation method can be applied to obtain the optimal design parameters in the intake and exhaust systems.

• 한국가스학회지
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• 제3권2호
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• pp.62-69
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• 1999

본 논문에서는 혼합감도문제를 이용하여 강인한 서보계를 구성함으로서 동위치 제어 시스템의 제어계를 설계하는 방법을 제안하였고, LQG를 이용한 다변수 디지털 서보 제어기 및 H$\infty$ 최적 제어기와의 비교실험을 통하여 제안된 제어기의 유용성을 입증하였다.

• 지구물리와물리탐사
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• 제13권2호
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• pp.159-168
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• 2010

석유/가스 물리탐사 분야에서의 최근 추세는 3D 탄성파 탐사라 할 수 있다. 기존의 2D 자료처리와는 달리, 3D탄성파 탐사 자료처리는 고가의 상용 소프트웨어 시스템과 고성능 컴퓨터가 필요한 것으로 인식되어 왔다. 본 논문에서는 일반 개인용 컴퓨터(PC)를 기반으로 일반에게 공개되어 있는 비상업용의 공유 소프트웨어 시스템들인 "SU, SEPlib, SEPlib3D"들을 선택적으로 조합하여 적용하는 3D 탄성파 자료처리 방법론을 제시하고, 이를 실제 자료에 매우 근접한3D 합성 탄성파 자료인 SEG/EAGE 3D 합성 자료에 적용하여 실질적인 적용성을 시험해 보았다.

• 센서학회지
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• 제8권6호
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• pp.461-468
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• 1999

다중 센서 어레이와 신경회로망을 이용하여 메탄, 프로판, 부탄 등의 폭발성 가스의 종류 및 농도를 실시간으로 분석하고, 인식하여 결과를 실시간으로 출력할 수 있는 가스 인식 시스템을 구현하였다. 정유 공장이나 도시가스 배관 등에 비교적 많이 분포하는 폭발성 가스인 메탄, 프로판, 부탄 등의 가스들을 분류하고, 그 농도를 인식할 수 있는 시스템의 구현을 위해, 우선 9개의 후막형 반도체식 가스 센서로 구성된 가스 센서 어레이로부터 얻어지는 다차원 신호를 Principal Component Analysis(PCA)를 이용하여 그 특성을 분석하였다. 분석 결과를 바탕으로 오차역전파 학습 알고리즘을 갖는 다층 구조 신경회로망을 이용하여 가스 종류 및 농도를 정확하게 인식할 수 있는 가스 인식 시스템을 구현하였으며, 실시간 처리 시스템을 위해 TMS320C31 DSP 보드를 이용하여 가스인식 시스템을 구현하였다.

• International Journal of Precision Engineering and Manufacturing
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• 제3권2호
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• pp.45-51
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• 2002

Recently the interest for the environment is increasing. So the criterion for the evaluation of the burner has changed. For efficient driving problem, if the thermal efficiency is higher and the oxygen in exhaust gas is lower, then burner is evaluated better. For environmental problem. burner must satisfy NOx limit, soot limit and CO limit. Generally the experienced operator judge of the combustion status of the burner by the color of flame. we don't still have any satisfactory solution against it. the relation of the combustion status and the color of the flame hasn't still been established. This paper is the study about the relation of the combustion status and the color of the flame. This paper describes development of real time flame diagnosis technique that evaluate and diagnose combustion state such as consistency of components in exhaust gas, stability of flame in quantitative sense. In this paper, it was proposed on the flame diagnosis technique of burner using image processing algorithm, the parameter extracted from the image of the flame was used as the input variables of the flame diagnostic system. at first, linear regression algorithm and multiple regression algorithm was used to obtain linear multi-nominal expression. Using the constructed inference algorithm, the amount of NOx and CO of the combustion gas was successfully inferred. the combustion control system will be realized sooner or later.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.602-605
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• 2000

Recently, a study of intellectual smell recognition system is applied for the various fields such as control of food processing and survey of decay. A basic gas recognition system was implemented gases using four metal oxides semiconductor sensors as inputs. A CPLD chip of twenty thousand gates level was used for this purpose. The CPLD chip was designed and the availability of the one chip smell recognition system was tested.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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• pp.297-300
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• 2002

Application of electronic nose and PLD chip design was developed to be used in gas discrimination system for limited kinds of gas. An array of 4 metal oxide gas sensors with different selectivity patterns were used in order to measure gases. BP(Back Propagation) algorithm was designed and implemented on CPLD of two hundred thousand gate level chips by VHDL language for processing input signals from 4 kinds of gas sensors. This module successfully discriminated 4 kinds of gases and displayed the results on LCD and LED. The developed module could be used for various applications in the field of food process control and alcohol judgment.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2228-2231
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• 2007

Water gas shift reactor in fuel processing is an important part that converts carbon monoxide into hydrogen. Fuel processing system for PEMFC usually has two stages of WGS reactors, which are high temperature and low temperature shifter. In this study we prepared noble metal catalysts and compared their performances with that of a commercial iron chromium oxide catalyst. Noble metal catalysts and the commercial catalyst showed quite different temperature dependence of carbon monoxide conversion. The conversion of carbon monoxide at the commercial catalyst was very low at medium temperature(${\sim}300^{\circ}C$) and increased rapidly as temperature increased while the conversion at noble metal catalysts was high in the medium temperature range and decreased as temperature increased, which is thermodynamically expected. Their characteristics agreed well with the literature published, and we are accomplishing further study for improvement of the noble metal catalysts.