• Journal of the Korean Vacuum Society
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• v.9 no.1
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.262.2-262.2
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• 2014

Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

• Transactions of the Korean Society of Automotive Engineers
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• v.2 no.4
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• pp.112-119
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• 1994

This study is investigated into the dynamic effect of the manifold configuration during the gas exchange processes using both simulation and experiment, In theoretical study on the flow analysis, the characteristic method is applied to solve the compressible unsteady flow equation, involving the several steady flow boundary conditions. In order to excute the engine experiment efficiently, a data acquisition system is configured by using A/D converter and PC. Good results which coincided experimental data with simulation output were obtained, and it shows that this simulation method can be applied to obtain the optimal design parameters in the intake and exhaust systems.

• Journal of the Korean Institute of Gas
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• v.3 no.2 s.7
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• pp.62-69
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• 1999

This paper presents a design method of dynamic positioning control system(DPS) for floating Platform with rotatable and retractable thrusters using H$\infty$ servo control design method. The norm band of uncertainty is captured by multiplicative perturbation between nominal model and reduced order model. A controller robust to the uncertainty is designed applying H$\infty$ synthesis. The control law satisfying robust stability and nominal performance condition is determined through the mixed sensitivity approach. The control algorithm was evaluated on the basis of computer simulation for a proposed DPS design method and experiments was carried out with an image processing method for measurement of DPS position in a water tank The results of overall experiments show that proposed control method will be good to keep at a specified position. And they are compared with the experimental results by LQG synthesis and H$\infty$ optimal control design method.

• Geophysics and Geophysical Exploration
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• v.13 no.2
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• pp.159-168
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• 2010

Recent trend in petroleum/gas exploration is an application of 3D seismic exploration technique. Unlike the conventional 2D seismic data processing, 3D seismic data processing is considered as the one which requires expensive commercial software systems and high performance computer. This paper propose a practical 3D seismic processing methodology on a personal computer using public domain software such as SU, SEPlib, and SEPlib3D. The applicability of the proposed method has been demonstrated by successful application to a well known realistic 3D synthetic data, SEG/EAGE 3D salt model data.

• Journal of Sensor Science and Technology
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• v.8 no.6
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• pp.461-468
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• 1999

In this paper, we have implemented a gas recognition system for classification and identification of explosive gases such as methane, propane, and butane using a sensor array and an artificial neural network. Such explosive gases which can be usually detected in the oil factory and LPG pipeline are very dangerous for a human being. We analyzed the characteristics of a multi-dimensional sensor signals obtained from the nine sensors using the principal component analysis(PCA) technique. Also, we implemented a gas pattern recognizer using a multi-layer neural network with error back propagation learning algorithm, which can classify and identify the sorts of gases and concentrations for each gas. The simulation and experimental results show that the proposed gas recognition system is effective to identify the explosive gases. And also, we used DSP board(TMS320C31) to implement the proposed gas recognition system using the neural network for real time processing.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.2
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• pp.45-51
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• 2002

Recently the interest for the environment is increasing. So the criterion for the evaluation of the burner has changed. For efficient driving problem, if the thermal efficiency is higher and the oxygen in exhaust gas is lower, then burner is evaluated better. For environmental problem. burner must satisfy NOx limit, soot limit and CO limit. Generally the experienced operator judge of the combustion status of the burner by the color of flame. we don't still have any satisfactory solution against it. the relation of the combustion status and the color of the flame hasn't still been established. This paper is the study about the relation of the combustion status and the color of the flame. This paper describes development of real time flame diagnosis technique that evaluate and diagnose combustion state such as consistency of components in exhaust gas, stability of flame in quantitative sense. In this paper, it was proposed on the flame diagnosis technique of burner using image processing algorithm, the parameter extracted from the image of the flame was used as the input variables of the flame diagnostic system. at first, linear regression algorithm and multiple regression algorithm was used to obtain linear multi-nominal expression. Using the constructed inference algorithm, the amount of NOx and CO of the combustion gas was successfully inferred. the combustion control system will be realized sooner or later.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.602-605
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• 2000

Recently, a study of intellectual smell recognition system is applied for the various fields such as control of food processing and survey of decay. A basic gas recognition system was implemented gases using four metal oxides semiconductor sensors as inputs. A CPLD chip of twenty thousand gates level was used for this purpose. The CPLD chip was designed and the availability of the one chip smell recognition system was tested.

• Proceedings of the IEEK Conference
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• 2002.06b
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• pp.297-300
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• 2002

Application of electronic nose and PLD chip design was developed to be used in gas discrimination system for limited kinds of gas. An array of 4 metal oxide gas sensors with different selectivity patterns were used in order to measure gases. BP(Back Propagation) algorithm was designed and implemented on CPLD of two hundred thousand gate level chips by VHDL language for processing input signals from 4 kinds of gas sensors. This module successfully discriminated 4 kinds of gases and displayed the results on LCD and LED. The developed module could be used for various applications in the field of food process control and alcohol judgment.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2228-2231
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• 2007

Water gas shift reactor in fuel processing is an important part that converts carbon monoxide into hydrogen. Fuel processing system for PEMFC usually has two stages of WGS reactors, which are high temperature and low temperature shifter. In this study we prepared noble metal catalysts and compared their performances with that of a commercial iron chromium oxide catalyst. Noble metal catalysts and the commercial catalyst showed quite different temperature dependence of carbon monoxide conversion. The conversion of carbon monoxide at the commercial catalyst was very low at medium temperature(${\sim}300^{\circ}C$) and increased rapidly as temperature increased while the conversion at noble metal catalysts was high in the medium temperature range and decreased as temperature increased, which is thermodynamically expected. Their characteristics agreed well with the literature published, and we are accomplishing further study for improvement of the noble metal catalysts.