• 대한기계학회논문집B
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• 제26권10호
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• pp.1406-1418
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• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.305-310
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• 2001

This paper presents the computational method for analyzing the compressible flow fields in a high voltage gas circuit breaker. There are many difficult problems in analyzing the gas flow in GCB due to complex geometry, moving boundary, shock wave and so on. In particular, the distortion problem of the grid due to the movement of moving parts can be worked out by the fixed grid technique. Numerical simulations are based on a fully implicit finite volume method of the compressible Reynolds-averaged Navier-Stokes equations to obtain the pressure, density, and velocity through the entire interruption process. The presented method is applied to the real circuit breaker model and the pressure in front of the piston is good agreement with the experimental one.

• 한국결정학회지
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• 제14권2호
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• pp.56-61
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• 2003

Nanocrystalline hydrogenated silicon (nc-Si : H) thin films were deposited at room temperature by plasma enhanced chemical vapor deposition (PECVD): a mixture of SiH₄ and H₂ gas was introduced into the evacuated reaction chamber. When the H₂ gas flow rate was low, the density of Si-H₃ bonds was high in the films. On the other hand, when the H₂ gas flow rate was high, e.g., 100 sccm, a large number of Si-H bonds contributed to the passivation of the surface of the large volume of Si nanocrystallites. The relative fraction of the Si-H₃ and Si-H₂ bonds in the amorphous matrix varied sensitively with the H₂ gas flow rate. The variation was associated with the change in the intensity as well as the wavelength of the main PL peaks, indicating the change in the total volume as well as the size of the Si nanocrystallites in the films.

• 한국표면공학회지
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• 제36권6호
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• pp.480-490
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• 2003

Effects of plasma-nitriding on the pitting corrosion of Fe-30at%Al-5at%Cr alloy containing Ti, Hf, and Zr were investigated using potentiostat in 0.1M HCl. The specimen was casted by the vacuum arc melting. The subsequent homogenization was carried out in Ar gas atmosphere at $1000^{\circ}C$ for 7days and phase stabilizing heat treatment was carried out in Ar gas atmosphere at $500^{\circ}C$ for 5 days. The specimen was nitrided in the $N_2$, and $H_2$, (1:1) mixed gas of $10^{-4}$ torr at $480^{\circ}C$ for 10 hrs. After the corrosion tests, the surface of the tested specimens were observed by the optical microscopy and scanning electron microscopy(SEM). For Fe-30at%Al-5Cr alloy, the addition of Hf has equi-axied structure and addition of Zr showed dendritic structure. For Fe-30at%Al-5Cr alloy containing Ti, plasma nitriding proved beneficial to decrease the pitting corrosion attack by increasing pitting potential due to formation of TiN film. Addition of Hf and Zr resulted in a higher activation current density and also a lower pitting potential. These results indicated the role of dendritic structure in decreasing the pitting corrosion resistance of Fe-30Al-5Cr alloy. Ti addition to Fe-30Al-5Cr decreased the number and size of pits. In the case of Zr and Hf addition, the pits nucleated remarkably at dendritic branches.

• Journal of Mechanical Science and Technology
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• 제19권2호
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• pp.664-673
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• 2005

The heat transfer characteristics of rarefied flows in a micro-actuator are studied numerically. The effect of Knudsen number (Kn) on the heat transfer of the micro-actuator flows is also examined. The Kn based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo calculations have been performed to estimate the performance of the micro-actuator. The results show that the magnitude of the temperature jump at the wall increases with Kn. Also, the heat transfer to the isothermal wall is found to increase significantly with Kn.

• 한국재료학회지
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• 제30권10호
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• pp.533-541
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• 2020

UO₂ kernels, a key component of fuel elements for high temperature gas cooled reactors, have usually been prepared by sol-gel methods. Sol-gel processes have a number of advantages, such as simple processes and facilities, and higher sphericity and density. In this study, to produce 900 ㎛-sized UO₂ particles using an external gelation process, contact length extension of the NH₃ gas of the broth droplets pass and the improvement of the gelation device capable of spraying 14 M-NH₄OH solution are used to form 3,000 ㎛-sized liquid droplets. To produce high-sphericity and high-density UO₂ particles, HMTA, which promotes the gelation reaction in the uranium broth solution, is added to diffuse ammonium ions from the outside of the gelation solution during the aging process and generate ammonium ions from the inside of the ADU gel particles. Sufficient gelation inside of ADU gel particles is achieved, and the density of the UO₂ spheres that undergo the subsequent treatment is 10.78 g/㎤; the sphericity is analyzed and found to be 0.948, indicating good experimental results.

• 한국자동차공학회논문집
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• 제15권1호
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• pp.116-124
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• 2007

An optical method to measure the size and number density of soot aggregates in diesel exhaust has been proposed in this study. Two laser beams in co-axial alignment transmit a soot loaded exhaust gas flow, and the transmittance at each wavelength is detected by a photo diode simultaneously. The volume equivalent diameter and number density of soot aggregates in the optical path can be theoretically given by the transmittance values measured at two wavelengths. A test conducted by a single cylinder, 4 cycle, small and DI diesel engine shows that the temporal variations of the size and number density of soot aggregates in the diesel exhaust can be measured by the proposed method at a transient mode operation. It is found that the volume equivalent diameter varied temporally from 70 to 110 nm during the period that high soot concentration is observed. One can also conclude that the optical length longer than 1 m in the dynamic range regarding this method is preferable for measuring soot concentration at the level of $1\;mg/m^3$.

• 동력기계공학회지
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• 제14권2호
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• pp.71-77
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• 2010

This paper was studied on microstructure, mechanical properties and corrosion characteristics of 316L stainless steel pipe welds was fabricated by orbital welding process. S-Ar specimen was fabricated by using Ar purge gas and S-$N_2$ specimen was fabricated by using $N_2$ purge gas. Ferrite was not detected in weld metal of S-$N_2$ specimen but the order of 0.13 Ferrite number(FN) was detected in weld metal of S-Ar specimen. Oxygen and Nitrogen concentration of S-$N_2$ specimen was higher than S-Ar specimen on HAZ and inner bead. The welds microstructural characteristics of S-Ar and S-$N_2$ specimens are similar. The microvickers hardness values of S-Ar and S-$N_2$ specimens welds were similar and average values of each regions were in the range of 174~194. The microstructures of S-Ar and S-$N_2$ weld metal were full austenite by primary austenite solidification. The Solidification structures of S-Ar and S-$N_2$ weld metal were formed directional dendrite toward bead center. The potentiodynamic polarization curve of STS 316L pipe welds exhibited typical active, passive, transpassive behaviour. Corrosion current density$(I_{corr.})$ and corrosion rate values of S-Ar specimen in 0.1M HCl solution were $0.95{\mu}A/cm^2$ and $0.31{\mu}A$/year respectively. The values of S-$N_2$ specimen were $1.4{\mu}A/cm^2$ and $0.45{\mu}m$/year.

• 한국가스학회지
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• 제23권3호
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• pp.27-32
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• 2019

본 연구에서는 단일 원관에서 입구의 유속이 일정한 경우와 주기적인 변동이 있는 경우에 대하여 시간에 따라 원관 주위에서 와류 분포와 온도 분포 변화를 비교 분석하였다. 또한, 양력과 항력의 시간 변화와 PSD(power spectral density)를 분석하여 유동의 주파수 특성을 규명하였다. 일정 입구 유속의 경우는 잘 알려진 칼만 와류 분포를 보여 주었으며 원관의 상하에서 교대로 와류가 발생하는 것을 관찰할 수 있었다. 주기적인 입구 유속 변동의 경우는 원관의 상하에서 동시에 와류가 발생하는 것을 관찰할 수 있었다. 두 가지 모두 시간에 따른 온도 분포 변화는 와류 분포 변화와 거의 유사하게 거동하는 것을 확인할 수 있었다. 일정 입구 유속의 경우의 와류 유동 주파수는 31.15 Hz 이며 주기적인 입구 유속의 경우는 와류 유동 주파수는 입구 유속의 주파수와 동일하게 15.57 Hz으로 나타났다. 원관 표면 평균 누셀수는 일정 입구 유속의 경우는 99.6이며 주기적인 입구 유속 변동의 경우는 110.7로 나타나서 주기적인 입구 속도 변동의 경우가 열전달이 11.1% 증가하는 것을 알 수 있었다.

• 한국가스학회지
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• 제9권4호
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• pp.6-10
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• 2005

이 논문은 비저항에 따른 가스보일러용 오스테나이트계 스테인리스강(STS304)재의 손상거동에 관해 연구하기 위하여, 비저항에 따른 전기화학적 분극시험을 수행하였다. 그리고 비저항에 따른 가스보일러용 STS304강의 양극분극특성 및 손상거동인 공식양상을 고찰하였다. 비저항이 감소할수록 STS304강의 부동태유지전류밀도는 증가하고 부동태영역은 작아지고 있으며, 관통전위는 낮아지고 있다 또한 비저항이 가장 높은 $74{\Omega}{\cdot}m$중에서 손상거동인 공식양상은 거의 나타나지 않고, 비저항이 낮아질수록 손상거동인 공식양상은 더욱 성장되고, 공식수가 점점 증가하는 경향을 보이고 있다.