• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.10
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• pp.1406-1418
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• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• Proceedings of the KSME Conference
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• 2001.06e
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• pp.305-310
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• 2001

This paper presents the computational method for analyzing the compressible flow fields in a high voltage gas circuit breaker. There are many difficult problems in analyzing the gas flow in GCB due to complex geometry, moving boundary, shock wave and so on. In particular, the distortion problem of the grid due to the movement of moving parts can be worked out by the fixed grid technique. Numerical simulations are based on a fully implicit finite volume method of the compressible Reynolds-averaged Navier-Stokes equations to obtain the pressure, density, and velocity through the entire interruption process. The presented method is applied to the real circuit breaker model and the pressure in front of the piston is good agreement with the experimental one.

• Korean Journal of Crystallography
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• v.14 no.2
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• pp.56-61
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• 2003

Nanocrystalline hydrogenated silicon (nc-Si : H) thin films were deposited at room temperature by plasma enhanced chemical vapor deposition (PECVD): a mixture of SiH₄ and H₂ gas was introduced into the evacuated reaction chamber. When the H₂ gas flow rate was low, the density of Si-H₃ bonds was high in the films. On the other hand, when the H₂ gas flow rate was high, e.g., 100 sccm, a large number of Si-H bonds contributed to the passivation of the surface of the large volume of Si nanocrystallites. The relative fraction of the Si-H₃ and Si-H₂ bonds in the amorphous matrix varied sensitively with the H₂ gas flow rate. The variation was associated with the change in the intensity as well as the wavelength of the main PL peaks, indicating the change in the total volume as well as the size of the Si nanocrystallites in the films.

• Journal of the Korean institute of surface engineering
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• v.36 no.6
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• pp.480-490
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• 2003

Effects of plasma-nitriding on the pitting corrosion of Fe-30at%Al-5at%Cr alloy containing Ti, Hf, and Zr were investigated using potentiostat in 0.1M HCl. The specimen was casted by the vacuum arc melting. The subsequent homogenization was carried out in Ar gas atmosphere at $1000^{\circ}C$ for 7days and phase stabilizing heat treatment was carried out in Ar gas atmosphere at $500^{\circ}C$ for 5 days. The specimen was nitrided in the $N_2$, and $H_2$, (1:1) mixed gas of $10^{-4}$ torr at $480^{\circ}C$ for 10 hrs. After the corrosion tests, the surface of the tested specimens were observed by the optical microscopy and scanning electron microscopy(SEM). For Fe-30at%Al-5Cr alloy, the addition of Hf has equi-axied structure and addition of Zr showed dendritic structure. For Fe-30at%Al-5Cr alloy containing Ti, plasma nitriding proved beneficial to decrease the pitting corrosion attack by increasing pitting potential due to formation of TiN film. Addition of Hf and Zr resulted in a higher activation current density and also a lower pitting potential. These results indicated the role of dendritic structure in decreasing the pitting corrosion resistance of Fe-30Al-5Cr alloy. Ti addition to Fe-30Al-5Cr decreased the number and size of pits. In the case of Zr and Hf addition, the pits nucleated remarkably at dendritic branches.

• Journal of Mechanical Science and Technology
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• v.19 no.2
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• pp.664-673
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• 2005

The heat transfer characteristics of rarefied flows in a micro-actuator are studied numerically. The effect of Knudsen number (Kn) on the heat transfer of the micro-actuator flows is also examined. The Kn based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo calculations have been performed to estimate the performance of the micro-actuator. The results show that the magnitude of the temperature jump at the wall increases with Kn. Also, the heat transfer to the isothermal wall is found to increase significantly with Kn.

• Korean Journal of Materials Research
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• v.30 no.10
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• pp.533-541
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• 2020

UO₂ kernels, a key component of fuel elements for high temperature gas cooled reactors, have usually been prepared by sol-gel methods. Sol-gel processes have a number of advantages, such as simple processes and facilities, and higher sphericity and density. In this study, to produce 900 ㎛-sized UO₂ particles using an external gelation process, contact length extension of the NH₃ gas of the broth droplets pass and the improvement of the gelation device capable of spraying 14 M-NH₄OH solution are used to form 3,000 ㎛-sized liquid droplets. To produce high-sphericity and high-density UO₂ particles, HMTA, which promotes the gelation reaction in the uranium broth solution, is added to diffuse ammonium ions from the outside of the gelation solution during the aging process and generate ammonium ions from the inside of the ADU gel particles. Sufficient gelation inside of ADU gel particles is achieved, and the density of the UO₂ spheres that undergo the subsequent treatment is 10.78 g/㎤; the sphericity is analyzed and found to be 0.948, indicating good experimental results.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.1
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• pp.116-124
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• 2007

An optical method to measure the size and number density of soot aggregates in diesel exhaust has been proposed in this study. Two laser beams in co-axial alignment transmit a soot loaded exhaust gas flow, and the transmittance at each wavelength is detected by a photo diode simultaneously. The volume equivalent diameter and number density of soot aggregates in the optical path can be theoretically given by the transmittance values measured at two wavelengths. A test conducted by a single cylinder, 4 cycle, small and DI diesel engine shows that the temporal variations of the size and number density of soot aggregates in the diesel exhaust can be measured by the proposed method at a transient mode operation. It is found that the volume equivalent diameter varied temporally from 70 to 110 nm during the period that high soot concentration is observed. One can also conclude that the optical length longer than 1 m in the dynamic range regarding this method is preferable for measuring soot concentration at the level of $1\;mg/m^3$.

• Journal of Power System Engineering
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• v.14 no.2
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• pp.71-77
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• 2010

This paper was studied on microstructure, mechanical properties and corrosion characteristics of 316L stainless steel pipe welds was fabricated by orbital welding process. S-Ar specimen was fabricated by using Ar purge gas and S-$N_2$ specimen was fabricated by using $N_2$ purge gas. Ferrite was not detected in weld metal of S-$N_2$ specimen but the order of 0.13 Ferrite number(FN) was detected in weld metal of S-Ar specimen. Oxygen and Nitrogen concentration of S-$N_2$ specimen was higher than S-Ar specimen on HAZ and inner bead. The welds microstructural characteristics of S-Ar and S-$N_2$ specimens are similar. The microvickers hardness values of S-Ar and S-$N_2$ specimens welds were similar and average values of each regions were in the range of 174~194. The microstructures of S-Ar and S-$N_2$ weld metal were full austenite by primary austenite solidification. The Solidification structures of S-Ar and S-$N_2$ weld metal were formed directional dendrite toward bead center. The potentiodynamic polarization curve of STS 316L pipe welds exhibited typical active, passive, transpassive behaviour. Corrosion current density$(I_{corr.})$ and corrosion rate values of S-Ar specimen in 0.1M HCl solution were $0.95{\mu}A/cm^2$ and $0.31{\mu}A$/year respectively. The values of S-$N_2$ specimen were $1.4{\mu}A/cm^2$ and $0.45{\mu}m$/year.

• Journal of the Korean Institute of Gas
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• v.23 no.3
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• pp.27-32
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• 2019

In this study, the vorticity distribution and the temperature distribution change around a circular cylinder were compared and analyzed with time for constant inlet velocity and periodic inlet velocity. Also, the frequency characteristics of the flow were analyzed by analyzing the time variation of lift and drag and their PSD(power spectral density). In the case of constant inlet velocity, the well known Karman vorticity distribution was shown, and vortices were alternately generated at the upper and lower sides of the circular cylinder. In case of periodic inlet velocity, it was observed that vortex occurred simultaneously in the upper and lower sides of the circular cylinder. In both cases, it was confirmed that the time dependent temperature distribution changes almost the same behavior as the vorticity distribution. For the constant inlet velocity, the vortex flow frequency is 31.15 Hz, and for the periodic inlet velocity, the vortex flow frequency is equal to the preriodic inlet velocity at 15.57 Hz. The mean surface Nusselt number was 99.6 for the constant inlet velocity and 110.7 for the periodic inlet velocity, which showed 11.1% increase in surface heat transfer.

• Journal of the Korean Institute of Gas
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• v.9 no.4 s.29
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• pp.6-10
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• 2005

This paper was studied on the damage behavior of stainless steel (STS 304) for gas boiler with specific resistance. The electrochemical polarization test of STS304 for gas boiler was carried out. And the anodic polarization and damage aspect, such as pitting corrosion, was considered. With being low specific resistance, the passive current density of STS 304 increases, passive region and pitting potential is low. Also, the patting aspect of STS304 In specific resistance $74{\Omega}{\cdot}m$ water little appears, the pitting number increases and the damage behavior, such as pitting aspect, gradually grow bigger with being low specific resistance.