• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.248-251
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• 2002

We measured the electron drift velocity, W, in 0.5% $SF_{6}$-Ar mixture over the E/N range from 30 Td to 300 Td and gas pressure range from 0.1 to 8 Torr by the double shutter drift tube with a variable drift distance. This coefficient in the mixture was calculated over the same E/N and gas pressure range by using the two-term approximation of the Boltzmann equation. And the measured and calculated values at different gas number density at each E/N was appreciable dependence in the results on the gas number density,

• 한국분무공학회지
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• 제8권2호
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• pp.7-15
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• 2003

The effects of fuel density and fuel viscosity on spray characteristics were investigated under two different gas turbine fuels and various fuel supply pressure conditions through measurement of SMD, number density and volume flux by using PDPA system in dual orifice injector for gas turbine engines. In this study, we found out that the droplet size and spray structure are strongly depend on fuel density for dual orifice injector. The spray characteristics of high density fuel in dual orifice injector are similar with the characteristics of low density fuel in single orifice injector. The shear region between primary main fuel stream and secondary main fuel stream is examined in low density fuel condition but not exist in high density fuel condition, then this shear region is very important in quality of gas turbine spray. There are worth consideration for the effect of fuel density on spray characteristics in frontal device design to improve combustion efficiency.

• 한국분무공학회지
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• 제5권3호
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• pp.37-44
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• 2000

High velocity, gas-assisted liquid drop trajectories were investigated under well-controlled experimental conditions at elevated gas densities and room temperature. A monodisperse stream of drops which are generated by a vibrating-orifice drop generator were injected into a transverse high velocity gas stream. The gas density and air jet velocity were adjusted independently to keep the Weber numbers constant. The Weber numbers studied were 72, 148, 270, 532. The range of experimental conditions included studied the three drop breakup regimes previously referred as bag, stretching/thinning and catastrophic breakup regimes. High-magnification photography and conventional spray field photographs were taken to study the microscopic breakup mechanisms and the drop trajectories in high velocity gas flow fields, respectively. The parent drop trajectories were affected by the gas density and the gas jet velocities and do not show similarity with respect to the either Weber or the Reynolds number, as expected.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1990년도 하계학술대회 논문집
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• pp.459-461
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• 1990

Me performed an experiment about preionization electron number density of charge transfer type KrF excimer laser. At the total pressure of 1.8 and 2.2 atm with helium (He) buffer gas, the experimental range of the electron number density is 8-9 ${\times}$ 10 cm The distance between electrode and preionization pin is 15 mJ at charging voltage of 27kV,gas pressure of 2.2 atm,gas mixture of F /Kr/He = 0.3/396.7(%).

• 한국분무공학회지
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• 제10권4호
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• pp.32-46
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• 2005

The breakup characteristics of liquid sheets formed by the impinging and swirl type injectors were studied as increasing the Weber number (or injection condition) and the ambient gas pressure to 4.0.MPa. In the case of impinging type injector. we compared the changes of breakup lengths between laminar and turbulent sheets. which are formed by the impingement of laminar and turbulent jets. respectively. The results showed that both sheets expand as increasing the injection velocity irrespective of the ambient gas density when the gas based Weber number is low. When the Weber number is high, however, the breakup of turbulent sheet depends on the hydraulic force of jets as well as the aerodynamic force of ambient gas which determines the breakup of laminar sheet. Using the experimental results. we could suggest empirical models on the breakup lengths of laminar and turbulent sheets. In the case of swirl type injector. as $We_l$, and ambient gas density increased, the disturbances on the annular liquid sheet surface were amplified by the increase of the aerodynamic forces. and thus the liquid sheet disintegrated near from the injector exit. Finally, the measured breakup length of swirl type injector according to the ambient gas density and $We_l$, was compared with the result by the linear instability theory. We found that the corrected breakup length relation derived from linear instability theory considering the attenuation of sheet thickness agrees well with our experimental results.

• 대한화학회지
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• 제30권3호
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• pp.327-332
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• 1986

유도결합 플라스마 공간내의 전자밀도를 측정하였다. 전자밀도의 측정시 유도결합 플라스마의 작동조건은, (1) 냉각기체만 사용할 때, (2) 냉각기체와 운반기체만을 사용할 때, (3) 보통의 작동조건은, 즉 에아로졸을 포함한 운반기체를 사용할 때, (4) 약 88%의 에아로졸을 제거시켰을 때, 그리고 (5) 과량의 리튬을 주입시켰을 때로서 분류하였다. 보통의 작동조건에서 플라스마의 낮은 부분에서는 전자밀도가 상당히 감소하여 플라스마내의 가장 전자밀도가 큰 곳보다 약 80배 감소하였다. 이온화 방해영향을 일으키는 알칼리금속을 과량으로 넣었을 때 전자밀도의 변화는 관찰되지 않았고 유도코일의 power를 증가시키면 전자밀도도 증가하였다.

• 전기학회논문지
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• 제66권2호
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• pp.370-378
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• 2017

A fluid model of 2D axis-symmetry based on inductively coupled plasma (ICP) reactor using $N_2/NH_3/SiH_4$ gas mixture has been developed for hydrogenated silicon nitride ($SiN_x:H$) deposition. The model was comprised of 62 species (electron, neutral, ions, and excitation species), 218 chemical reactions, and 45 surface reactions. The pressure (10~40 mTorr) and gas mixture ratio ($N_2$ 80~96 %, $NH_3$ 2~10 %, $SiH_4$ 2~10 %) were considered simulation variables and the input power fixed at 1000 W. Different distributions of electron, ions, and molecules density were observed with pressure. Although ionization rate of $SiH_2{^+}$ is higher than $SiH_3{^+}$ by electron direct reaction with $SiH_4$, the number density of $SiH_3{^+}$ is higher than $SiH_2{^+}$ in over 30 mTorr. Also, number density of $NH^+$ and $NH_4{^+}$ dramatically increased by pressure increase because these species are dominantly generated by gas phase reactions. The change of gas mixture ratio not affected electron density and temperature. With $NH_3$ and $SiH_4$ gases ratio increased, $SiH_x$ and $NH_x$ (except $NH^+$ and $NH_4{^+}$) ions and molecules are linearly increased. Number density of amino-silane molecules ($SiH_x(NH_2)_y$) were detected higher in conditions of high $SiH_x$ and $NH_x$ molecules density.

• Journal of Electrical Engineering and Technology
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• 제10권4호
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• pp.1734-1737
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• 2015

Insulating characteristics of Cl₂-He mixture gases in gas discharges were analysed to evaluate ability of these gases for using in medium voltage and many industries. These are electron transport coefficients, which are the electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient, in Cl₂-He mixtures. A two-term approximation of the Boltzmann equation was used to calculate the electron transport coefficients for the first time over a wide range of E/N (ratio of the electric field E to the neutral number density N). The limiting field strength values of E/N, (E/N)_lim, for these binary gas mixtures were also derived and compared with those of the pure SF₆ gas.

• 한국연소학회지
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• 제3권2호
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• pp.51-63
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• 1998

Air-assisted atomizer flames are investigated numerically to study spray structures in nonburning and burning conditions based on experimental data. A PDA is used to measure droplet size, velocity, and number density for both nonburning and burning spray. Computations utilize time-averaged gas-phase equations and $k-{\varepsilon}$ turbulence model for simplicity. The major features of the liquid-phase model are that a SSF approach is used to represent the effect of gas-phase turbulence on droplet trajectories and vaporization, an infinite-diffusion model is employed to represent the transient liquid-phase process. Computation and experiment results show that the droplet acceleration and evaporation proceed quickly in near the atomizer, characterizing high number densities and a strong convective effect. The primary combustion zone, however, is dorminated by the gas phase reaction and exhibits a sheath combustion.

• 한국분무공학회지
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• 제1권2호
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• pp.42-49
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• 1996

The structure of sprays from a simplex type pilot nozzle atomizer is studied experimentally by measuring velocities, Sauter mean diameter, and number density. Interaction of the spray with gas-phase flow field generated from a 1 MW range industrial gas turbine combustor adopt ing a counter-swirler is investigated. Various spray behaviors are reported. Especially interest ing characteristics are the tangential motion of the spray and of the spray with swirl interaction. It shows a Rankine combined vortex type of velocity characteristics, having linear velocity profile inside the inner core whole small particles exist and rapidly decreasing velocity profiles outside. Interacting spray has relatively uniform number density profiles compared to the nozzle spray itself.