• The Journal of Engineering Geology
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• v.12 no.1
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• pp.35-51
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• 2002

This study aims to establish the methodology for design of an optimum water curtain system of the unlined underground oil storage cavern satisfying the requirements of hydrodynamic performance in a volcanic terrain of the south coastal area. For the optimum water curtain system in the storage facility, the general characteristics of groundwater flow system in the site are quantitatively described, i.e. distribution of hydraulic gradients, groundwater inflow rate into the storage caverns, and hydrogeologic influence area of the cavern. In this study, numerical models such as MODFLOW, FracMan/MAFIC and CONNECTFLOW are used for calculating the hydrogeological stability parameters. The design of a horizontal water curtain system requires considering the distance between water curtain and storage cavern, spacing of the water curtain boreholes, and injection pressure. From the numerical simulations at different scales, the optimum water curtain systems satisfying the containment criteria are obtained. The inflow rates into storage caverns estimated by a continuum model ranged from about 120 m$^3$/day during the operation stage to 130~140m$^3$/day during the construction stage, whereas the inflow rates by a fracture network model are 80~175m$^3$/day. The excavation works in the site will generate the excessive decline of groundwater level in a main fracture zone adjacent to the cavern. Therefore, the vertical water curtain system is necessary for sustaining the safe groundwater level in the fracture zone.

• The Korean Journal of Pharmacology
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• v.20 no.1 s.34
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• pp.1-11
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• 1984

The present study was performed to determine oxygen metabolites involved in cell-free MPO/$H_2O_2/Cl^-$ system by observing the effects of their scavengers on NADH oxidation and ethylene production from methional by the action of MPO prepared from human leukocytes. It was clearly demonstrated that NADH was oxidized by the cell-free MPO/$H_2O_2/Cl^-$ system as evidenced by complete inhibition of the oxidation of the substrate in the presence of eiher azide or catalase, or by omitting $Cl^-$. The MPO-mediated oxidation of NADH was completely abolished by a $^1O_2$ quencher, DABCO but not by $OH{\cdot}$ scavengers, mannitol, benzoate, formate and methanol. In ethylene assay, no ethylene was detected from methional in the MPO/$H_2O_2/Cl^-$ system with evident production of the gas by xanthine-oxidase and $Cu^{++}-H_2O_2$ systems which are suggested to generate $OH{\cdot}$. From the results obtained, it is concluded that $^1O_2$ is a major mediator with exclusion of $OH{\cdot}$ involvement in the cell-free MPO-mediated oxidation.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.3 no.2
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• pp.149-157
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• 2005

PFC(Perfluorocarbon) decontamination process is one of best methods to remove hot particulate adhered at inside surface of hot cell and surface of equipment in hot cell. It was necessary to develop a particulate filtration equipment to reuse PFC solution used on PFC decontamination due to its high cost and to minimize the volume of second wastewater. Contamination characteristics of hot particulate were investigated and then a filtration process was presented to remove hot particulate in PFC solution generated through PFC decontamination process. The removal efficiency of PVDF(Poly vinylidene fluoride), PP(Polypropylene), Ceramic(Al$_{2}$O$_{3}$ filter showed more than 95$\%$. The removal efficiency of PVDF filter was a little lower than those of other kiters at same pressure(3psi). A ceramic filter showed a higher removal efficiency with other filters, while a little lower flux rate than other filters. Due to inorganic composition, a ceramic filter was highly stable against radio nuclides in comparison with PVDF and PP membrane, which generate H$_{2}$ gas in e-radioactivity atmosphere. Therefore, the adoption of ceramic filter is estimated to be suitable for the real nitration process.

• Journal of Energy Engineering
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• v.19 no.2
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• pp.136-142
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• 2010

Combustion reactivity and thermal behavior of two imported coals used as a pulverized fuel of commercially thermal power plant were investigated by thermogravimetric analysis (TGA) and large scale test furnace of 200 kg/hr. TGA results showed that combustion efficiency of high moisture coal has lower than reference coal due to the slow combustion completion rate although it has the low ignition temperature, and activation energies of high moisture coal with 79 kJ/mol for overall combustion was higher than reference coal of 53 kJ/mol. Test furnace results ascertained that flame of black band of high moisture coal during the combustion in boiler broke out compared to reference coal and then it becomes to unburned carbon due to the less reactivity and combustion rate. But, Blending combustion of high moisture coal with design coal of high sulfur are available because sulfur content of high moisture coal was too low to generate the low SOx content in flue gas from boiler during the combustion. The ash analysis results show that it was not expected to be associated with slagging and fouling in pulverized coal fired systems due to the low alkali metal content of $Na_2O$ and $K_2O$ compared to bituminous coal.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.380-386
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• 2006

In this study, we had designed and fabricated the plasma focus device which can generate the light source for EUV(Extreme Ultra Violet) lithography. And we also have investigated the basic electrical characteristics of currents, voltages, resistance and inductance of this system. Voltage and current signals were measured by C-dot and B-dot probe, respectively. We applied various voltages of 1.5, 2, 2.5 and 3 kV to the anode electrode and observed voltages and current signals in accordance with various Ar pressures of 1 mTorr to 100 Torr in diode chamber. It is observed that the peak values of voltage and current signals were measured at 300 mTorr, where the inductance and impedance were also estimated to be 73 nH and $35 m{\Omega}$ respectively. The electron temperature has been shown to be 13000 K at the diode voltage of 2.5 kV and this gas pressure of 300 mTorr. It is also found that the ion density Ni and ionization rate 0 have been shown to be $N_i = 8.25{\times}10^{15}/cc$ and ${\delta}$= 77.8%, respectively by optical emission spectroscopy from assumption of local thermodynamic equilibrium(LTE) plasma.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.3.1-3.1
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• 2010

Water splitting reaction using photocatalysts is of great interest in the utilization of solar energy [1]. In the present work, visible light-responsive $TiO_2$ thin films (Vis-$TiO_2$) were prepared by a radio frequency magnetron sputtering (RF-MS) deposition method and applied for the separate evolution of $H_2$ and $O_2$ from water as well as the photofuel cell. Special attentions will be focused on the effect of HF treatment of Vis-$TiO_2$ thin films on their photocatalytic activities. Vis-$TiO_2$ thin films were prepared by an RF-MS method using a calcined $TiO_2$ plate and Ar as the sputtering gas. The Vis-$TiO_2$ thin films were then deposited on the Ti foil substrate with the substrate temperature at 873 K (Vis-$TiO_2$/Ti). Vis-$TiO_2$/Ti thin films were immersed in a 0.045 vol% HF solution at room temperature. The effect of HF treatments on the activity of Vis-$TiO_2$/Ti thin films for the photocatalytic water splitting reaction have been investigated. Vis-$TiO_2$/Ti thin films treated with HF solution (HF-Vis-$TiO_2$/Ti) exhibited remarkable enhancement in the photocatalytic activity for $H_2$ evolution from a methanol aqueous solution as well as in the photoelectrochemical performance under visible light irradiation as compared with the untreated Vis-$TiO_2$/Ti thin films. Moreover, Pt-loaded HF-Vis-$TiO_2$/Ti thin films act as efficient and stable photocatalysts for the separate evolution of $H_2$ and $O_2$ from water under visible light irradiation in the presence of chemical bias. Thus, HF treatment was found to be an effective way to improve the photocatalytic activity of Vis-$TiO_2$/Ti thin films. Furthermore, unique separate type photofuel cell was fabricated using a Vis-$TiO_2$ thin film as an electrode, which can generate electrical power under solar light irradiation by using various kinds of biomass derivatives as fuel. It was found that the introduction of an iodine ($I^-/{I_3}^-$) redox solution at the cathode side enables the development of a highly efficient photofuel cell which can utilize a cost-efficient carbon electrode as an alternative to the Pt cathode.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.239-240
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• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.148-148
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• 2011

Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H, ${\mu}c$-Si:H, Si3N4, and SiO2 take a significant portion of processes. In order to achieve higher deposition rate (DR), good uniformity in large-area reactor, and good film quality (low defect density, high film strength, etc.), the application of VHF (>40 MHz) CCP is indispensible. However, the electromagnetic wave effect in the VHF CCP becomes an issue to resolve for the achievement of good uniformity of plasma and film. Here, we propose a new electrode as part of a method to resolve the standing wave effect in the large-area VHF CCP. The electrode is split up a series of strip-type electrodes and the strip-type electrodes and the ground ones are arranged by turns. The standing wave effect in the longitudinal direction of the strip-type electrode is reduced by using the multi-feeding method of VHF power and the uniformity in the transverse direction of the electrodes is achieved by controlling the gas flow and the gap length between the powered electrodes and the substrate. Also, we provide the process results for the growths of the a-Si:H and the ${\mu}c$-Si:H films. The high DR (2.4 nm/s for a-Si:H film and 1.5 nm/s for the ${\mu}c$-Si:H film), the controllable crystallinity (~70%) for the ${\mu}c$-Si:H film, and the relatively good uniformity (1% for a-Si:H film and 7% for the ${\mu}c$-Si:H film) can be obtained at the high frequency of 40 MHz in the large-area discharge (280 mm${\times}$540 mm). Finally, we will discuss the issues in expanding the multi-electrode to the 8G class large-area plasma processing (2.2 m${\times}$2.4 m) and in improving the process efficiency.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2005.06a
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• pp.32-39
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• 2005

When PFC(Perfluorocarbonate) decontamination technology is applied to removal of radioactive contaminated particulate adhered at surface during the operation of nuclear research facilities, it is necessary to develop a filtration equipment to reuse of PFC solution due to high price, also to minimize the volume of second wastewater. Contaminated characteristics of hot particulate was investigated and a filtration process was presented to remove suspended radioactive particulate from PFC decontamination wastewater generated on PFC decontamination. The range of size of hot particulate adhered at the surface of research facilities measured by SEM was $0.1{\sim}10{\mu}m$. Hot particulate of more than $2{\mu}m$ in PFC contamination wastewater was removed by first filter and then hot particulate of more than $0.2{\mu}m$ was removed by second filter. Results of filter experiments showed that filtration efficiency of PVDF(Poly vinylidene fluoride), PP(Polypropylene), Ceramic filter was $95{\sim}97\%$. A ceramic filter showed a higher filtration efficiency with a little low permeate volume. Also, a ceramic of inorganic compound could be broken easily on experiment and has a high price but was highly stable at radioactivity in comparison of PVDF and PP of a macromolecule which generate $H_2$ gas in alpha radioactivity environment.

• Applied Chemistry for Engineering
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• v.16 no.4
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• pp.474-484
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• 2005

Biological treatment is a promising alternative to conventional air pollution control methods. Bioreactors for air pollution control have found most of their success in the treatment of dilute and high flow waste air streams containing volatile organic compounds and odor compounds. They offer several advantages over traditional technologies such as incineration or adsorption. These include lower treatment costs, absence of formation of secondary pollutants, no spent chemicals, low energy demand and low temperature treatment. The most widely used bioreactor for air pollution control is biofilter, but it has several limitations. In the past years major progress has been accomplished in the development of vapor phase bioreactor, in particular biotrickling filters. Biotrickling filters are more complex than biofilters, but are usually more effective, especially for the treatment of compounds which are difficult to degrade or compounds that generate acidic by-products. While the level of understanding of biotrickling filtration process for VOCs still remains limited, the evident success of biotreatment of VOC in air stimulated the pursue of acitve research. This paper presents fundamental and theoretical/practical aspect of air pollution control in biotrickling filter. Special emphasis is given to the operating parameters and the factors influencing performance for air pollution control in biotrickling filter.