• 한국환경과학회지
• /
• 제27권8호
• /
• pp.621-629
• /
• 2018

Many chemically active species such as ${\cdot}H$, ${\cdot}OH$, $O_3$, $H_2O_2$, hydrated $e^-$, as well as ultraviolet rays, are produced by Dielectric Barrier Discharge (DBD) plasma in water and are widely use to remove non-biodegradable materials and deactivate microorganisms. As the plasma gas containing chemically active species that is generated from the plasma reaction has a short lifetime and low solubility in water, increasing the dissolution rate of this gas is an important challenge. To this end, the plasma gas and water within reactor were mixed using the air-automizing nozzle, and then, water-gas mixture was injected into water. The dissolving effect of plasma gas was indirectly confirmed by measuring the RNO (N-Dimethyl-4-nitrosoaniline, indicator of the formation of OH radical) solution. The plasma system consisted of an oxygen generator, a high-voltage power supply, a plasma generator and a liquid-gas mixing reactor. Experiments were conducted to examine the effects of location of air-automizing nozzle, flow rate of plasma gas, water circulation rate, and high-voltage on RNO degradation. The experimental results showed that the RNO removal efficiency of the air-automizing nozzle is 29.8% higher than the conventional diffuser. The nozzle position from water surface was not considered to be a major factor in the design and operation of the plasma reactor. The plasma gas flow rate and water circulation rate with the highest RNO removal rate were 3.5 L/min and 1.5 L/min, respectively. The ratio of the plasma gas flow rate to the water circulation rate for obtaining an RNO removal rate of over 95% was 1.67 ~ 4.00.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
• /
• pp.65-65
• /
• 1999

Dry etching technique provides more easy controllability on the etch profile such as anisotropic etching than wet etching process and the results of lots of researches on the characterization of various plasmas or ion beams for semiconductor etching have been reported. Chlorine-based plasmas or chlorine ion beam have been often used to etch several semiconductor materials, in particular Si-based materials. We have studied the effect of He flow rate on the Si and SiO2 dry etching using chlorine-based plasma. Experiments were performed using reactive ion etching system. RF power was 300W. Cl2 gas flow rate was fixed at 58.6 sccm, and the He flow rate was varied from 0 to 120 sccm. Fig. 1 presents the etch depth of si layer versus the etching time at various He flow rate. In case of low He flow rate, the etch rate was measured to be negligible for both Si and SiO2. As the He flow increases over 30% of the total inlet gas flow, the plasma state becomes stable and the etch rate starts to increase. In high Ge flow rate (over 60%), the relation between the etch depth and the time was observed to be nearly linear. Fig. 2 presents the variation of the etch rate depending on the He flow rate. The etch rate increases linearly with He flow rate. The results of this preliminary study show that Cl2/He mixture plasma is good candidate for the controllable si dry etching.

• 한국전산유체공학회지
• /
• 제17권1호
• /
• pp.86-93
• /
• 2012

A numerical investigation is conducted to search for the optimal flow rate for a rotating-disk chemical vapor decomposition reactor operating at a high temperature and a low pressure. The flow of a gas mixture supplied into the reactor is modeled by a laminar flow of an ideal gas obeying the kinetic theory. The axisymmetric two-dimensional flow in the reactor is simulated by employing a CFD package FLUENT. With operating pressure and temperature fixed, numerical computations are performed by varying rotation rate and flow rate. Examination of the structures of flow and thermal fields leads to a flow regime diagram illustrating that there are a stable plug-like flow regime and a few unfavorable flow regimes induced by mass unbalance or buoyancy. The criterion for sustaining a plug-like flow regime is discussed based on a theoretical scaling argument. Interpretation of the flow regime map suggests that a favorable flow is attainable with a minimum flow rate at the smallest rotation rate guaranteeing the dominance of rotation effects over buoyancy.

• 한국가스학회지
• /
• 제18권2호
• /
• pp.21-27
• /
• 2014

MILD 연소는 고온의 배기가스를 연소로 내에 재유입 되는 양에 따라 질소산화물 저감 특성에 많은 영향을 받는다. 본 연구에서는 MILD 연소로에서 고온의 배기가스를 연소로 내에 재순환하기 위해 코안다 노즐을 사용하였는데. 코안다 노즐의 중심에 중심 축소관을 설치한 경우와 설치하지 않은 경우에 고압공기 유량, 배기가스 유입량 특성을 수치해석을 통해 살펴봄으로써 최적의 코안다 노즐 형상을 도출하는 것을 연구의 목적으로 하였다. 본 연구의 전산 해석의 결과는 혼합가스 출구의 압력이 대기압일 때는 중심축소관이 없을 때가 배기가스 유입량이 약 18% 크게 나타나고 혼합가스 출구 압력이 증가하면 중심축소관이 있을 때가 유입량이 더 큼일 알 수 있었다. 이에 대한 분석은 노즐 목에서의 압력, 유입가스 입구와 혼합가스 출구 압력 그리고 유동 단면적으로 구성한 유입 구동력으로 해석 가능하였다.

• 한국철도학회논문집
• /
• 제10권5호
• /
• pp.563-568
• /
• 2007

디젤 엔진의 배기가스 유량을 측정하기 삼각 분리 막대형 차압유량계를 개발하였다. 3 종류의 삼각 막대형 차압유량계를 제작하였고 실험 평가하였다. 삼각 막대형 외부형상이 유선형에 가까울수록 차압유량계에서의 상류부 와 하류부의 차압이 감소하는 경향을 나타내었다. 삼각막대형 차압유량계를 사용하여 고온 및 상온 조건에서 유량 검정을 하였다. 고온 조건에서의 유량계 검정을 위해 버너를 제작하였다. 삼각막대형 상류부 및 하류부 간의 차압과 질량 유량의 실험식을 구했다. 또한 실험식은 기체 온도에 의한 보정을 포함하고 있다.

• 반도체디스플레이기술학회지
• /
• 제17권4호
• /
• pp.91-96
• /
• 2018

In this study temperature distribution and gas flow inside a planetary type reactor in which a number of satellites on a spinning susceptor were rotating were analyzed using numerical simulation. Effects of flow rates on gas flow and temperature distribution were investigated in order to obtain design parameters. The commercial computational fluid dynamics software CFD-ACE+ was used in this study. The multiple-frame-of-reference was used to solve continuity, momentum and energy conservation equations which governed the transport phenomena inside the reactor. Kinetic theory was used to describe the physical properties of gas mixture. Effects of the rotation speed of the satellites was clearly seen when the inlet flow rate was small. Thickness of the boundary layer affected by the satellites rotation became very thin as the flow rate increased. The temperature field was little affected by the incoming flow rate of precursors.

• 대한기계학회논문집B
• /
• 제23권10호
• /
• pp.1327-1339
• /
• 1999

Characteristics of two-phase flow and heat transfer were numerically investigated in a submerged gas Injection system. Effects of both the gas flow rate and bubble size were investigated. In addition, heat transfer characteristic and effects of heat transfer were investigated when temperature of the injected gas was different from that of the liquid. The Eulerian approach was used for the formulation of both the continuous and the dispersed phases. The turbulence in the liquid phase was modeled by the use of the standard $k-{\varepsilon}$ turbulence model. The interphase friction and heat transfer coefficient were calculated by means of correlations available in the literature. The turbulent dispersion of the phases was modeled by introducing a "dispersion Prandtl number". The plume region and the axial velocities are increased with increases in the gas flow rate and with decreases in the bubble diameter. The turbulent flow field grows stronger with the increases in the gas flow rate and with the decreases in the bubble diameter. In case that the heat transfer between the liquid and the gas is considered, the axial and the radial velocities are decreased in comparison with the case that there is no temperature difference between the liquid and the gas when the temperature of the injected gas is higher than the mean liquid temperature. The results in the present research are of interest in the design and the operation of a wide variety of material and chemical processes.

• 한국시뮬레이션학회논문지
• /
• 제7권2호
• /
• pp.17-32
• /
• 1998

The flow fields in Gas Bubble Driven Circulation Systems were numerically analyzed. In various gas flow rate and bubble size, the flow characteristics were predicted. Eulerian-Eulerian approach was used for the formulation of both the continuous and dispersed phases. The modification of the general purpose computer program PHOENICS code was employed to predict the mean flow fields, turbulent characteristics, gas dispersion, volume fraction. The predicted shows very satisfactory agreement with experimental results for all regions of ladle. The results are of interest in the design and operation of wide variety of material processing.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2000년도 춘계학술대회논문집B
• /
• pp.175-179
• /
• 2000

A combustion project was completed regarding the development of a high-flow-rate purge burner in cooperation with three city gas companies(Pusan, Taegu, Samchulli). The project, started in May 1991, aimed at purging the line-packed-gas safely and quickly before getting into gas pipe working or relocation. According to the results, the purging noise is less than 80dB due to silencer screen. multi-nozzle and outlet inserted tube employed. In addition, the developed burner shows an increased work efficiency of 40-50% more as compared to the performance of conventional purge equipments. The project result is regarded as the first high-flow-rate purge burner developed within Korea. contributing to shortening purge hours, safe field work and easiness of purge site selection.

• 한국진공학회지
• /
• 제22권3호
• /
• pp.111-118
• /
• 2013

대기압 플라즈마 제트 장치의 유량 변화에 대한 플라즈마 방전 특성을 실험적으로 조사하고 이를 유체역학적으로 해석하였다. 유리관에 주입되는 아르곤 기체의 유량 변화에 대한 레이놀즈 수(Re)로 결정되는 기체 흐름의 형태 변화와 베르누이 정리에 의한 압력 변화가 플라즈마 발생에 영향을 준다. 유리관 내부에 발생하는 플라즈마의 길이 변화의 실험을 통하여, 아르곤 기체에 대한 레이놀즈 수가 Re<2,000이면 층류이고, Re>4,000이면 난류가 형성된다. 이는 일반 유체에서 알려진 결과와 일치한다. 층류에서 유량의 증가로 플라즈마의 길이가 증가한다. 층류와 난류의 전환 영역에서 플라즈마의 길이는 줄어든다. 난류 영역에서는 방전 기체의 흐름이 불규칙함으로서 방전 경로가 흐트러져 플라즈마 칼럼의 길이가 매우 짧아지고 급기야 플라즈마가 소멸된다. 층류에서 주입 유량의 증가로 유리관 내의 유속이 증가하면, 베르누이 정리에 의하여 유리관 내부의 압력이 낮아진다. 관내의 압력이 낮아지면, 파센 법칙에 의하여 관내의 전기장의 세기가 증가하여 방전 전압이 낮아진다. 따라서 주입 유량이 증가하면, 동일한 구동 전압에서 유리관에 발생하는 플라즈마의 길이는 길어진다. 층류의 방전은 유리관 밖에서도 층류의 흐름이 일정 길이로 유지되므로 시료 표면에 조사되는 플라즈마 빔의 직경은 유리관의 직경 이하로 유지된다.