• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.4
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• pp.89-94
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• 2008

Differential pressure flow meters which have a shape of triangular separate bar(TSB) were tested for investigating the flow rate characteristics of the flow meters with varying the temperature of the gas flow. Three kinds of the triangular separate bar flow meters whose aerodynamic angles are different one another are used. The mass flow rate of the flow meters are evaluated using a non-dimensional parameter which includes the gas temperature, exhaust gas pressure and differential pressure at the flow meters, and atmospheric pressure. A burner system which is similar to gas turbine was used for raising the gas flow temperature. The burner system was operated with varying the air/fuel ratio by controlling both the fuel injection rate from the fuel nozzle and air flow rate from a blower. An empirical correlation between the mass flow rate at the TSB flow meter and the non-dimensional parameter was obtained. The empirical correlation showed linear relationship between the mass flow rate and the non-dimensional parameter H. Also, the mass flow rate characteristics at the TSB flow meter was affected by the gas temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.123-124
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• 2011

플라즈마 화학적 기상 증착(plasma enhanced chemical vapor deposition)공정 중 NH3 gas flow rate, RF power, SiH4 gas flow rate을 고정시키고 N2O gas flow rate을 0 sccm부터 250 sccm까지 변화시키는 조건 하에 SiON박막을 증착한 후 그 투과율, 굴절률을 측정하고 분석하였다. N2O gas flow rate조건별 시편들은 증착율을 계산하여 350 nm 두께로 동일하게 SiON을 증착하였고, borofloat위에 SiON을 증착한 샘플은 투과율을, 실리콘기판 위에 SiON을 증착한 샘플로는 굴절률을 측정하였다. 투과율의 경우는 UV/Vis spectrometer를 이용해 633 nm, 1550 nm 두 가지 파장 대 모두에서 N2O gas flow rate이 가장 큰 250 sccm일 때 가장 높은 것을 알 수 있었고 N2O gas flow rate이 낮아질수록 투과율 또한 작아지는 경향을 보였다. 굴절률은 ellipsometer를 이용해 측정하였으며 633 nm 파장에서 N2O gas flow rate가 가장 낮은 0 sccm일 때 굴절률이 가장 큰 값을 가지고 N2O gas flow rate이 커질수록 굴절률은 지수함수적으로 감소되었다(n=1.837~1.494). 이는 N2O gas flow rate이 낮을수록 SiN계열에 커질수록 SiO2계열에 가까워지는 현상으로 이해된다. 이러한 실험분석 결과는 향후 실리카 도파로의 설계 및 최적화를 위해 사용될 수 있다.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 2000.11c
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• pp.662-669
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• 2000

Based on the viscous flow characteristics of gas through capillary tube, a simple and low cost system was developed for controlling gas concentration for use in C.A experiments. The gas flow rate through capillary tube had a linear relationship with pressure, $(length)^{-1}$ and $(radius)^4$ of capillary tube, which agreed well with Hagen-Poiseuille's law. The developed system could control the gas concentration in storage chamber within ${\pm}0.3%$ deviation compared to the preset concentration. The required time for producing target gas concentration in storage chamber was exactly predicted by the model used in this study, and it required much longer time than the calculated time which divided the volume of chamber by flow rate. Therefore, for producing target gas concentration as quickly as possible, it needs to supply higher flow rate of gas during the initial stage of experiment when gas concentration in storage chamber has not reached at target value. It appeared that the developed system was very useful for C.A experiments. Because one could decide a desired flow rate by the prediction model, control flow rate freely and easily by changing pressure in the pressure-regulating chamber and the accuracy was high.

• 한국연소학회:학술대회논문집
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• 1999.10a
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• pp.129-138
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• 1999

In this paper, our main issue is that establishing the control procedure of continuous gas flow rate according to combustion fan RPM. For this, first, we decide the optimum operating condition of gas swirl burner through analysis of combustion characteristics - thermal efficiency, combustion efficiency and exhaust gases such as CO, $CO_{2}$, $O_{2}$, $NO_{x}$ and THC. Second, fuel gas flow rate of gas valve is decided with considering excess air ratio and combustion fan RPM is decided by the target of combustion air flow rate. Finally, experimental operating equation is acquired by regression for gas valve and combustion fan. This equation is the control equation of continuous gas flow rate and always gas flow rate is decided by combustion fan operating RPM.

• YAKHAK HOEJI
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• v.39 no.5
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• pp.480-486
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• 1995

The change in discharge current of a glow discharge has been shown the potential sensitive detector for gas chromatography. To investigate the effect of carrier gas on the electrical characteristics of the discharge and the peak response, the discharge pressure, gas flow rate, and discharge gap have been studied. The discharge gas included the Ar, He, and N$_{2}$. The gas flow rate has been found one of the important parameters to affect both the electrical characteristics and the peak response.

• Electrical & Electronic Materials
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• v.9 no.2
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• pp.188-195
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• 1996

The AlSi etching process using the MERIE type reactor carried out with different process parameters such as C1$_{2}$ and N$_{2}$ gas flow rate, RF power and chamber pressure. The etching characteristics were evaluated in terms of etch rate, selectivity, uniformity and etched profile. As the N2 gas flow rate is increased, the AlSi etch rate is decreased and uniformity has remained constant within .+-.5%. The etch rate is increased and uniformity is decreased, according to increment of the C1$_{2}$ gas flow rate, RF power and chamber pressure. Selective etching of TEOS with respect to AlSi is decreased as the RF power is increased while it is increased by increment of the C1$_{2}$ gas flow rate and chamber pressure, on the other hand, selective etching of photoresist with respect to AlSi is increased by increment of the C1$_{2}$ gas flow rate and chamber pressure, it is decreased as the N$_{2}$ gas flow rate is increased.

• Journal of the Korean Society of Combustion
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• v.18 no.2
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• pp.17-22
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• 2013

In this study, we tested the absorption of $CO_2$ in combustion gas into an alkaline wastewater to simultaneously control $CO_2$ and wastewater. During the experiment, we investigated the effects of operating parameters on neutralization characteristics of the wastewater by using $CO_2$ in a bench-scale semi-batch jet loop reactor (0.1 m diameter and 1.0 m in height). The operating parameters investigated in the study are gas flow rate of 1.0-2.0 L/min, liquid recirculation flow rate of 4-32 L/min, and liquid temperature of $20-25^{\circ}C$. It was shown that the initial pH of wastewater rapidly decreased with increased gas flow rate for a given liquid recirculation flow rate. This was due to the increase in the gas holdup and the interfacial area at higher gas flow rate in the reactor. At constant gas flow rate, the time required to neutralize the wastewater initial pH of 10.1 decreased with liquid recirculation flow rate ($Q_L$), reached a minimum value in the range of $Q_L$ = 16-24 L/min, and then increased with further increase in $Q_L$. Further, the time required to neutralize the wastewater was shortened at higher temperatures.

• Journal of the Korean Society of Combustion
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• v.18 no.3
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• pp.38-43
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• 2013

In this study, we tested the absorption of $CO_2$ in combustion gas into an alkaline wastewater to simultaneously control $CO_2$ and wastewater. During the experiment, we investigated the effects of operating parameters on neutralization characteristics of the wastewater by using $CO_2$ in a bench-scale semi-batch jet loop reactor (0.1 m diameter and 1.0 m in height). The operating parameters investigated in the study are gas flow rate of 1.0-2.0 L/min, liquid recirculation flow rate of 4-32 L/min, and liquid temperature of $20-25^{\circ}C$. It was shown that the initial pH of wastewater rapidly decreased with increased gas flow rate for a given liquid recirculation flow rate. This was due to the increase in the gas holdup and the interfacial area at higher gas flow rate in the reactor. At constant gas flow rate, the time required to neutralize the wastewater initial pH of 10.1 decreased with liquid recirculation flow rate ($Q_L$), reached a minimum value in the range of $Q_L$ = 16-24 L/min, and then increased with further increase in $Q_L$. Further, the time required to neutralize the wastewater was shortened at higher temperatures.

• Current Optics and Photonics
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• v.6 no.3
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• pp.297-303
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• 2022

Multiple fiber Bragg gratings (FBGs) have been proposed and demonstrated for gas-flow measurements in a flow channel, using the temperature-difference method. This sensor consists of two FBG temperature sensors and two coil heaters. Coil heaters are used to heat the FBGs. The flow rate of the gas can be obtained by monitoring the difference in the Bragg-wavelength shifts of the two FBGs, which has features that exclude the effect of temperature fluctuations. In this study, experiments are conducted to measure the wavelength shift based on the flow rate, and to evaluate the gas-flow rate in a gas tube. Experimental results show that the sensor has a linear characteristic over a flow-rate range from 0 to 25 ℓ/min. The measured sensitivity of the sensor is 3.2 pm/(ℓ/min) at a coil current of 120 mA.

• 한국전산유체공학회:학술대회논문집
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• 2002.05a
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• pp.146-151
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• 2002

Characteristics of flow rate control has been studied for a cavitating venturi adopted in a liquid rocket propellant feed system. Numerical simulation has been peformed to give about $10\%$ discrepancy of mass flow rate to the experimental data for cavitating flow regime. Mass flow rate is confirmed to be saturated for pressure difference higher than $3\times10^5$pa when the upstream pressure is fixed to $22.8\times10^5$pa and the downstream pressure is varied. The evaporation amount depends substantially to non-condensable gas concentration. However the mass flow rate characteristic is relatively insensitive to the mass fraction of non-condensable gas. So it is reduced by only $2\%$ when the non- condensable gas concentration is increased from 1.5PPM to 150PPM. From the previous comparison the expansions of the non-condensable gas and the evaporation of liquid are verified to have same effect to pressure recovery.