• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 조명전기설비학회논문지
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• 제16권6호
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• pp.60-65
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• 2002

본 연구의 목적은 헬륨의 순도가 셀레늄증기 레이저에서의 출력특성과 광이득에 미치는 영향을 측정, 비교해보는 것이다. 헬륨의 순도는 특수 헬륨필터로써 개선하였다. 본 측정에서는 개개의 선들이 복굴절필터에 의해서 선택 되어졌다. 대부분의 선들이 헬륨필터를 사용한 레이저에서 더 높은 output-coupling 출력과 소신호 이득을 보여 주고, 특히 강력한 선들(497.6 nm, 499.3 nm, 506.9 nm, 517.6 nm, 522.8 nm, 530.5 nm)과 청색선(460.4 nm, 464.8 nm)및 적색선(644.4 nm, 649.1 nm)에서 현저히 더 높은 값을 보여 준다.

• 한국화재소방학회논문지
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• 제32권5호
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• pp.52-56
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• 2018

화재로 인한 피해는 열상에 의한 피해보다는 연소 독성에 의한 피해가 치명적이며, 인명피해를 줄이기 위해 화재 상황에서 젖은 수건을 사용하여 화재로부터 발생되는 독성가스를 방호하도록 권장하고 있다. 본 연구에서는 젖은 수건을 통해 실제 화재에서 발생되는 가스를 대상으로 필터링 효과를 정량화하였다. 화재가스 중 세 가지 가스($CO_2$, HCl, HCN)를 대상으로 젖은 수건의 필터효과를 확인하기 위해 FT-IR을 이용하여 필터를 통과한 가스를 실시간 분석을 하였으며, 물에 잘 녹지 않는 $CO_2$에 비해 유독가스이며, 수용성 가스인 HCl, HCN은 젖은 수건에 의해 가스가 필터링 되면서 가스 검출 시점이 지연됨을 확인하였다. 따라서 실제 화재 시 독성가스 중 특히 수용성 가스의 경우 젖은 수건을 이용하게 되면 일정 시간 피난 시간을 확보할 수 있음을 확인하였다.

• 환경위생공학
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• 제22권2호
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• pp.9-20
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• 2007

The incineration process has commonly used for wastes amount reduction and thermal treatments of pollutants as the technologies accumulated. However, the process is getting negative public images owing to matter of hazardous pollutants emission. Specially dioxins became a main issue and were mostly emitted from municipal solid wastes incineration. In this reason, pyrolysis/gasification/melting process is presented as an alternative of incineration process. The pyrolysis/gasification/melting process, a novel technology, is middle of verification of commercial plant and development of technologies in Korea. But the survey about the pollutant emission from the process, and background data in these facilities is necessary. So in this survey, t is investigated that the behavior of chlorobenzenes and chlorophenols in plasma type pyrolysis/gasification/melting plant of pilot scale. We investigated discharging behavior of each phase of chlorobenzene through each process in the plsasma type pyrolysis/gasification/melting process. From this result, it was found that about 99 percent of particle-phase chlorobenzene was removed, but on the other hand gas-phase chlorobenzene was increased by about 600 percent through heat exchanger, flue gas cooling, system and semi dry absorption bag filter(SDA/BF). Also, this investigation presented that di-chlorobenzene(DCB) tri-chlorobenzene(TCB), tetra-chlorobenzene(TeCB), penta-chlorobenzene (PCB), except mono-chlorobenzene(MCB) and hexa-chlorobenzene(HCB) were increased through the flue gas cooling system and the semi dry absorption bag filter(SDA/BF). It was investigated that concentration of particle-phase chlorophenol was decreased by about 66 percent, but on the other hand, concentration of gas-phase chlorophenol was increased by about 170 percent through heat exchanger, flue gas cooling system, and semi dry absorption bag filter(SDA/BF). Also, it was found that di-chlorophenol(DCP), tri-chlorophenol(TCP), and penta-chlorophenol(PCP) were increased through the flue gas cooling system, and the semi dry absorption bag filter(SDA/BF). It can be considered that small-scale pilot facility and short investigation period might cause the concentration increase through the flue gas cooling system and the semi dry absorption bag filter(SDA/BF). A further study on real-scale pilot facility and accurate investigation may be required.

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2000년도 춘계학술대회 논문집
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• pp.369-370
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• 2000

석유화학공업단지, 도장공업, 유기용제 제조공정에서 휘발성유기화합물인 가스상 물질이 다양하게 배출되어진다. VOCs 제거하기 위해서 흡착, 연소, 광촉매, 코로나방전에 의한 플라즈마기술 등이 제어기술로 응용되고 있다. 또한 Bio필터를 이용한 휘발성 유기화합물의 제어기술은 비용절감을 위해서 이용되어왔지만, 생물학적 제어기술을 효과적으로 적용하기 위해서는 가스의 농도, 물리적 특성, 온도변화, 함수율 등의 영향인자에 따라서 재거효율이 민감하게 반응하는 특성 때문에 여러 가지 단점을 내포하고 있다. (중략)

• 한국표면공학회지
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• 제42권5호
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• pp.216-219
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• 2009

A surface acoustic wave (SAW) filter structure was fabricated employing $4{\mu}m$ thick nanocrystalline diamond (NCD) and $2.2{\mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and $Ar/O_2$ gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : $1.5/1.5{\mu}m$) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.

• 열병합발전
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• 통권68호
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• pp.14-18
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• 2009

• 한국세라믹학회지
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• 제39권2호
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• pp.210-215
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• 2002

본 연구에서는 $CO_2$ 흡수단이 있는 4.3${\mu}m$ 파장대역의 광학 필터를 전자빔 증발 장치를 이용하여 Ge와 $SiO_2$ 박막을 다층으로 설계, 제작하였다. 제작된 Ge/$SiO_2$ 다층박막 필터는 기준파장에 대하여 반가폭(FWHM) 204nm, 투과율 58.2%, 금지대역에 대하여 5% 이하의 차단특성을 나타내는 협대역 투과필터 (narrow band-pass filter: BPF)특성을 나타내었다. 광학적 대역투과필터를 사용하여, FT-IR내에 감지실을 설치하여 단식 필터(KBr+BPF)와 복식필터(BPF+BPF)의 $CO_2$ 농도별 감도특성을 비교측정 하였다. 측정시 $CO_2$의 농도는 500ppm을 단위로 500∼5000ppm의 범위까지 관찰하였는데, 복식 필터는 단식 필터에 비해 투과율이 낮았지만, 우수한 감도 특성을 보였다.

• 한국기후변화학회지
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• 제9권1호
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• pp.75-80
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• 2018

The problem of water shortages and water related disasters caused by climate change has increased the seriousness of water problems and the importance of water treatment technology capable of securing clean water is expanding. In this study, we analyzed not only the water pollutant generated by the filtration system technology of various water treatment technologies but also the indirect greenhouse gas emissions generation, and analyzed the influence on the environment. The subjects of study are Fabric Filter, Reverse Osmosis System and Pressurized Microfiltration Device which are widely used for water treatment and we analyzed the impact on the environment using the Life Cycle Assessment (LCA) method using the electricity amount necessary for use, the water purification efficiency, the throughput per ton and the cost. The amount of greenhouse gas generated when the Pressurized Microfiltration Device operates for 1 year is $2.15E+04kg\;CO_2-eq$., Fabric Filter is $3.29E+04kg\;CO_2-eq$., and Reverse Osmosis System is $1.68E+05kg\;CO_2-eq$. As a result of analyzing the amount of greenhouse gas generated at the time of purifying 1 ton of the Pressurized Microfiltration Device and the conventional filtration system, the Pressurized Microfiltration Device was $20.5g\;CO_2-eq$., Fabric Filter was $34.7g\;CO_2-eq$., and Reverse Osmosis System was $191.7g\;CO_2-eq$. The amount of greenhouse gas generated was calculated to be 41.0% less than that of the Fabric Filter by the Pressurized Microfiltration Device and 89.3% less than the Reverse Osmosis System. From the viewpoint of climate change, it is necessary to select a filtration system that takes climate change into account, not from the viewpoint of water quality removal efficiency and economic efficiency according to future water treatment applications, and it is necessary to select a water treatment filtration system more researches and improvements will be made for.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1999년도 추계종합학술대회 논문집
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• pp.1067-1070
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• 1999

Anesthesia gas to pour to patients affects the flow and volume as the pressure difference of an oxygen and an anesthesia gas. An anesthesia gas, being injurious and polluting an environment, must control the pressure of an oxygen gas because of being used by closing up tight. But a pressure sensor to use for measuring an oxygen gas appears other pressure as the characteristic and the error difference of elements to use for implementing an system. A medical machine such as an anesthesia ventilator must be accurate because of using for the person's body. So we intend to implement an system for a sensor pressure measurement not to be change regardless of an environment. This papers is the target that a sensor pressrue measurement to be changed in environment is equal to actual sensor pressure measurement. So an implemented system is using analog filter and digital filter to reduce a noise. And we are using auto-zeroing and calibration to correct a sensor pressure which is changed in environment. Through such a process we increase the accuracy and the confidence of an anesthesia ventilator by controlling the flow of an anesthesia gas.