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http://dx.doi.org/10.4191/KCERS.2002.39.2.210

Fabrication and CO2-sensing Characteristics of Optical Band-Pass Filter for 4.3 CO2 Wavelength  

Lee, Sang-Hoon (Department of Inorganic Materials Engineering, Pusan National University)
Kim, Soo-Hyun (Department of Inorganic Materials Engineering, Pusan National University)
Kim, Kwang-Ho (Department of Inorganic Materials Engineering, Pusan National University)
Publication Information
Journal of the Korean Ceramic Society / v.39, no.2, 2002 , pp. 210-215 More about this Journal
Abstract
Optical Band-pass Filter(BPF) for the selected wavelength of 4300 nm was designed and fabricated on Si wager by alternately depositing Ge and $SiO_2$ thin layers by an electron beam evaporation technique. The fabricated BPF showed the optical transmittance characteristics of 58.2% with FWHM(Full Width at Half Maximum) of 204 nm at 4300 nm, but showed the transmittance less than 5% due to the reflectance over all the wavelength ranges except 4300 nm band. The $CO_2$ sensitivity of BPF was investigated with the transmittance as a function of $CO_2$ gas concentration using a sensing cell attached to FT-IR instrument. The transmittance of BPF was almost linearly decreased with increasing of $CO_2$ concentration in the range of from 500 to 5000 ppm. The sensing structure using double BPFs showed higher slop of transmittance vs $CO_2$ concentration, and thus higher gas sensitivity than that using a single BPF, even though the former had relatively lower transmittance.
Keywords
$SiO_2$; Ge; Optical filters; BPF; Gas-sensor; $CO_2$ gas;
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