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THE CURRENT STATUS OF BIOMEDICAL ENGINEERING IN THE USA

  • Webster, John G.
    • Proceedings of the KOSOMBE Conference
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    • v.1992 no.05
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    • pp.27-47
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    • 1992
  • Engineers have developed new instruments that aid in diagnosis and therapy Ultrasonic imaging has provided a nondamaging method of imaging internal organs. A complex transducer emits ultrasonic waves at many angles and reconstructs a map of internal anatomy and also velocities of blood in vessels. Fast computed tomography permits reconstruction of the 3-dimensional anatomy and perfusion of the heart at 20-Hz rates. Positron emission tomography uses certain isotopes that produce positrons that react with electrons to simultaneously emit two gamma rays in opposite directions. It locates the region of origin by using a ring of discrete scintillation detectors, each in electronic coincidence with an opposing detector. In magnetic resonance imaging, the patient is placed in a very strong magnetic field. The precessing of the hydrogen atoms is perturbed by an interrogating field to yield two-dimensional images of soft tissue having exceptional clarity. As an alternative to radiology image processing, film archiving, and retrieval, picture archiving and communication systems (PACS) are being implemented. Images from computed radiography, magnetic resonance imaging (MRI), nuclear medicine, and ultrasound are digitized, transmitted, and stored in computers for retrieval at distributed work stations. In electrical impedance tomography, electrodes are placed around the thorax. 50-kHz current is injected between two electrodes and voltages are measured on all other electrodes. A computer processes the data to yield an image of the resistivity of a 2-dimensional slice of the thorax. During fetal monitoring, a corkscrew electrode is screwed into the fetal scalp to measure the fetal electrocardiogram. Correlations with uterine contractions yield information on the status of the fetus during delivery To measure cardiac output by thermodilution, cold saline is injected into the right atrium. A thermistor in the right pulmonary artery yields temperature measurements, from which we can calculate cardiac output. In impedance cardiography, we measure the changes in electrical impedance as the heart ejects blood into the arteries. Motion artifacts are large, so signal averaging is useful during monitoring. An intraarterial blood gas monitoring system permits monitoring in real time. Light is sent down optical fibers inserted into the radial artery, where it is absorbed by dyes, which reemit the light at a different wavelength. The emitted light travels up optical fibers where an external instrument determines O2, CO2, and pH. Therapeutic devices include the electrosurgical unit. A high-frequency electric arc is drawn between the knife and the tissue. The arc cuts and the heat coagulates, thus preventing blood loss. Hyperthermia has demonstrated antitumor effects in patients in whom all conventional modes of therapy have failed. Methods of raising tumor temperature include focused ultrasound, radio-frequency power through needles, or microwaves. When the heart stops pumping, we use the defibrillator to restore normal pumping. A brief, high-current pulse through the heart synchronizes all cardiac fibers to restore normal rhythm. When the cardiac rhythm is too slow, we implant the cardiac pacemaker. An electrode within the heart stimulates the cardiac muscle to contract at the normal rate. When the cardiac valves are narrowed or leak, we implant an artificial valve. Silicone rubber and Teflon are used for biocompatibility. Artificial hearts powered by pneumatic hoses have been implanted in humans. However, the quality of life gradually degrades, and death ensues. When kidney stones develop, lithotripsy is used. A spark creates a pressure wave, which is focused on the stone and fragments it. The pieces pass out normally. When kidneys fail, the blood is cleansed during hemodialysis. Urea passes through a porous membrane to a dialysate bath to lower its concentration in the blood. The blind are able to read by scanning the Optacon with their fingertips. A camera scans letters and converts them to an array of vibrating pins. The deaf are able to hear using a cochlear implant. A microphone detects sound and divides it into frequency bands. 22 electrodes within the cochlea stimulate the acoustic the acoustic nerve to provide sound patterns. For those who have lost muscle function in the limbs, researchers are implanting electrodes to stimulate the muscle. Sensors in the legs and arms feed back signals to a computer that coordinates the stimulators to provide limb motion. For those with high spinal cord injury, a puff and sip switch can control a computer and permit the disabled person operate the computer and communicate with the outside world.

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Research on Improvement of CH4 Reduction Performance of NGOC for CNG Bus (CNG 버스용 NGOC의 CH4 저감 성능 향상을 위한 연구)

  • Seo, Choong-Kil
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.5
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    • pp.708-715
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    • 2017
  • Recently, in order to meet the stricter emission regulations, the proportion of after-treatments for vehicles and vessels has been increasing gradually. The objective of this study is to investigate the improvement of $CH_4$ reduction ability of natural gas oxidation catalyst (NGOC), which reduces toxic gases emitted from CNG buses. Thirteen NGOCs were prepared, and the conversion performance of noxious gases according to the type of supports, the loading amount of noble metal, and surfactant and aging were determined. Support Zeolite supported on No. 3 $NGOC(1Pt-1Pd-3MgO-3CeO_2/(46TiO_2+23Al_2O_3+23Zeolite)$ is an anionic alkali metal/earth metal component that improved the oxidation reactivity between CO and NO and noble metal dispersion, and thus enhanced the $CH_4$ reduction ability. As the loading amount of Pd, a noble metal with a high selectivity to $CH_4$, was increased, the number of reaction sites was increased and the ability to reduce $CH_4$ was improved. No. 11 $NGOC(1Pt-1Pd-3MgO-3CeO_2/(Z20+Al80)$(pH=8.5), to which nitrate surfactant had been added, exhibited well dispersed catalyst particles with no agglomeration and improved the $CH_4$ reduction ability by 5-15%. The $NGOC(2Pt-2Pd-3Cr-3MgO/90Al_2O_3)$(48h aging), which was mildly thermal aged for 48h, increased the $CH_4$ reduction ability to about 10% or less as compared with No. 12 NGOC(Fresh).

THE LUMINOSITY-LINEWIDTH RELATION AS A PROBE OF THE EVOLUTION OF FIELD GALAXIES

  • GUHATHAKURTA PURAGRA;ING KRISTINE;RIX HANS-WALTER;COLLESS MATTHEW;WILLIAMS TED
    • Journal of The Korean Astronomical Society
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    • v.29 no.spc1
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    • pp.63-64
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    • 1996
  • The nature of distant faint blue field galaxies remains a mystery, despite the fact that much attention has been devoted to this subject in the last decade. Galaxy counts, particularly those in the optical and near ultraviolet bandpasses, have been demonstrated to be well in excess of those expected in the 'no-evolution' scenario. This has usually been taken to imply that galaxies were brighter in the past, presumably due to a higher rate of star formation. More recently, redshift surveys of galaxies as faint as B$\~$24 have shown that the mean redshift of faint blue galaxies is lower than that predicted by standard evolutionary models (de-signed to fit the galaxy counts). The galaxy number count data and redshift data suggest that evolutionary effects are most prominent at the faint end of the galaxy luminosity function. While these data constrain the form of evolution of the overall luminosity function, they do not constrain evolution in individual galaxies. We are carrying out a series of observations as part of a long-term program aimed at a better understanding of the nature and amount of luminosity evolution in individual galaxies. Our study uses the luminosity-linewidth relation (Tully-Fisher relation) for disk galaxies as a tool to study luminosity evolution. Several studies of a related nature are being carried out by other groups. A specific experiment to test a 'no-evolution' hypothesis is presented here. We have used the AUTOFIB multifibre spectro-graph on the 4-metre Anglo-Australian Telescope (AAT) and the Rutgers Fabry-Perot imager on the Cerro Tolalo lnteramerican Observatory (CTIO) 4-metre tele-scope to measure the internal kinematics of a representative sample of faint blue field galaxies in the red-shift range z = 0.15-0.4. The emission line profiles of [OII] and [OIII] in a typical sample galaxy are significantly broader than the instrumental resolution (100-120 km $s^{-l}$), and it is possible to make a reliable de-termination of the linewidth. Detailed and realistic simulations based on the properties of nearby, low-luminosity spirals are used to convert the measured linewidth into an estimate of the characteristic rotation speed, making statistical corrections for the effects of inclination, non-uniform distribution of ionized gas, rotation curve shape, finite fibre aperture, etc.. The (corrected) mean characteristic rotation speed for our distant galaxy sample is compared to the mean rotation speed of local galaxies of comparable blue luminosity and colour. The typical galaxy in our distant sample has a B-band luminosity of about 0.25 L$\ast$ and a colour that corresponds to the Sb-Sd/Im range of Hub-ble types. Details of the AUTOFIB fibre spectroscopic study are described by Rix et al. (1996). Follow-up deep near infrared imaging with the 10-metre Keck tele-scope+ NIRC combination and high angular resolution imaging with the Hubble Space Telescope's WFPC2 are being used to determine the structural and orientation parameters of galaxies on an individual basis. This information is being combined with the spatially resolved CTIO Fabry-Perot data to study the internal kinematics of distant galaxies (Ing et al. 1996). The two main questions addressed by these (preliminary studies) are: 1. Do galaxies of a given luminosity and colour have the same characteristic rotation speed in the distant and local Universe? The distant galaxies in our AUTOFIB sample have a mean characteristic rotation speed of $\~$70 km $s^{-l}$ after correction for measurement bias (Fig. 1); this is inconsistent with the characteristic rotation speed of local galaxies of comparable photometric proper-ties (105 km $s^{-l}$) at the > $99\%$ significance level (Fig. 2). A straightforward explanation for this discrepancy is that faint blue galaxies were about 1-1.5 mag brighter (in the B band) at z $\~$ 0.25 than their present-day counterparts. 2. What is the nature of the internal kinematics of faint field galaxies? The linewidths of these faint galaxies appear to be dominated by the global disk rotation. The larger galaxies in our sample are about 2"-.5" in diameter so one can get direct insight into the nature of their internal velocity field from the $\~$ I" seeing CTIO Fabry-Perot data. A montage of Fabry-Perot data is shown in Fig. 3. The linewidths are too large (by. $5\sigma$) to be caused by turbulence in giant HII regions.

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The Economic Effects of the New and Renewable Energies Sector (신재생에너지 부문의 경제적 파급효과 분석)

  • Lim, Seul-Ye;Park, So-Yeon;Yoo, Seung-Hoon
    • Journal of Energy Engineering
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    • v.23 no.4
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    • pp.31-40
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    • 2014
  • The Korean government made the 2nd Energy Basic Plan to achieve 11% of new and renewable energies distribution rate until 2035 as a response to cope with international discussion about greenhouse gas emission reduction. Renewable energies include solar thermal, photovoltaic, bioenergy, wind power, small hydropower, geothermal energy, ocean energy, and waste energy. New energies contain fuel cells, coal gasification and liquefaction, and hydrogen. As public and private investment to enhance the distribution of new and renewable energies, it is necessary to clarify the economic effects of the new and renewable energies sector. To the end, this study attempts to apply an input-output analysis and analyze the economic effects of new and renewable energies sector using 2012 input-output table. Three topics are dealt with. First, production-inducing effect, value-added creation effect, and employment-inducing effect are quantified based on demand-driven model. Second, supply shortage effects are analyzed employing supply-driven model. Lastly, price pervasive effects are investigated applying Leontief price model. The results of this analysis are as follows. First, one won of production or investment in new and renewable energies sector induces 2.1776 won of production and 0.7080 won of value-added. Moreover, the employment-inducing effect of one billion won of production or investment in new and renewable energies sector is estimated to be 9.0337 persons. Second, production shortage cost from one won of supply failure in new and renewable energies sector is calculated to be 1.6314 won, which is not small. Third, the impact of the 10% increase in new and renewable energies rate on the general price level is computed to be 0.0123%, which is small. This information can be utilized in forecasting the economic effects of new and renewable energies sector.

Review of Production, Husbandry and Sustainability of Free-range Pig Production Systems

  • Miao, Z.H.;Glatz, P.C.;Ru, Y.J.
    • Asian-Australasian Journal of Animal Sciences
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    • v.17 no.11
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    • pp.1615-1634
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    • 2004
  • A review was undertaken to obtain information on the sustainability of pig free-range production systems including the management, performance and health of pigs in the system. Modern outdoor rearing systems requires simple portable and flexible housing with low cost fencing. Local pig breeds and outdoor-adapted breeds for certain environment are generally more suitable for free-range systems. Free-range farms should be located in a low rainfall area and paddocks should be relatively flat, with light topsoil overlying free-draining subsoil with the absence of sharp stones that can cause foot damage. Huts or shelters are crucial for protecting pigs from direct sun burn and heat stress, especially when shade from trees and other facilities is not available. Pigs commonly graze on strip pastures and are rotated between paddocks. The zones of thermal comfort for the sow and piglet differ markedly; between 12-22$^{\circ}C$ for the sow and 30-37$^{\circ}C$ for piglets. Offering wallows for free-range pigs meets their behavioural requirements, and also overcomes the effects of high ambient temperatures on feed intake. Pigs can increase their evaporative heat loss via an increase in the proportion of wet skin by using a wallow, or through water drips and spray. Mud from wallows can also coat the skin of pigs, preventing sunburn. Under grazing conditions, it is difficult to control the fibre intake of pigs although a high energy, low fibre diet can be used. In some countries outdoor sows are fitted with nose rings to prevent them from uprooting the grass. This reduces nutrient leaching of the land due to less rooting. In general, free-range pigs have a higher mortality compared to intensively housed pigs. Many factors can contribute to the death of the piglet including crushing, disease, heat stress and poor nutrition. With successful management, free-range pigs can have similar production to door pigs, although the growth rate of the litters is affected by season. Piglets grow quicker indoors during the cold season compared to outdoor systems. Pigs reared outdoors show calmer behaviour. Aggressive interactions during feeding are lower compared to indoor pigs while outdoor sows are more active than indoor sows. Outdoor pigs have a higher parasite burden, which increases the nutrient requirement for maintenance and reduces their feed utilization efficiency. Parasite infections in free-range pigs also risks the image of free-range pork as a clean and safe product. Diseases can be controlled to a certain degree by grazing management. Frequent rotation is required although most farmers are keeping their pigs for a longer period before rotating. The concept of using pasture species to minimise nematode infections in grazing pigs looks promising. Plants that can be grown locally and used as part of the normal feeding regime are most likely to be acceptable to farmers, particularly organic farmers. However, one of the key concerns from the public for free-range pig production system is the impact on the environment. In the past, the pigs were held in the same paddock at a high stocking rate, which resulted in damage to the vegetation, nutrient loading in the soil, nitrate leaching and gas emission. To avoid this, outdoor pigs should be integrated in the cropping pasture system, the stock should be mobile and stocking rate related to the amount of feed given to the animals.

A Numerical Study on the CO2 Leakage Through the Fault During Offshore Carbon Sequestration (해양지중에 저장된 이산화탄소의 단층을 통한 누출 위험 평가에 관한 수치해석 연구)

  • Kang, Kwangu;Huh, Cheol;Kang, Seong-Gil
    • Journal of the Korean Society for Marine Environment & Energy
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    • v.18 no.2
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    • pp.94-101
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    • 2015
  • To mitigate the greenhouse gas emission, many carbon capture and storage projects are underway all over the world. In Korea, many studies focus on the storage of $CO_2$ in the offshore sediment. Assurance of safety is one of the most important issues in the geological storage of $CO_2$. Especially, the assessment of possibility of leakage and amount of leaked $CO_2$ is very crucial to analyze the safety of marine geological storage of $CO_2$. In this study, the leakage of injected $CO_2$ through fault was numerically studied. TOUGH2-MP ECO2N was used to simulate the subsurface behavior of injected $CO_2$. The storage site was 150 m thick saline aquifer located 825 m under the continental shelf. It was assumed that $CO_2$ leak was happened through the fault located 1,000 m away from the injection well. The injected $CO_2$ could migrate through the aquifer by both pressure difference driven by injection and buoyancy force. The enough pressure differences made it possible the $CO_2$ to migrate to the bottom of the fault. The $CO_2$ could be leaked to seabed through the fault due to the buoyancy force. Prior to leakage of the injected $CO_2$, the formation water leaked to seabed. When $CO_2$ reached the seabed, leakage of formation water stopped but the same amount of sea water starts to flow into the underground as the amount of leaked $CO_2$. To analyze the effect of injection rate on the leakage behavior, the injection rate of $CO_2$ was varied as 0.5, 0.75, and $1MtCO_2/year$. The starting times of leakage at 1, 0.75 and $0.5MtCO_2/year$ injection rates are 11.3, 15.6 and 23.2 years after the injection, respectively. The leakage of $CO_2$ to the seabed continued for a period time after the end of $CO_2$ injection. The ratios of total leaked $CO_2$ to total injected $CO_2$ at 1, 0.75 and $0.5MtCO_2/year$ injection rates are 19.5%, 11.5% and 2.8%, respectively.

A Study on the Effect of Fluidizing Media on the N2O Production in Fluidized Bed Incineration of Sewage Sludge (하수슬러지 유동층 소각에서 유동매체가 N2O 발생에 미치는 영향에 관한 연구)

  • Park, Jong-Ju;Lee, Seung-Jae;Ryu, In-Soo;Jeon, Sang Goo;Park, Yeong-Sung;Moon, Seung-Hyun
    • Clean Technology
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    • v.20 no.4
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    • pp.390-397
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    • 2014
  • This study was performed to investigate the effects of fluidizing media on $N_2O$ production in fluidized bed incineration of sewage sludge. The fluidized media were prepared in a form of 2 mm bead by mixing zeolite powders in our lab. Sand having 0.4 mm of the mean size showed 0.44 m/s of minimum fluidization velocity ($U_{mf}$), while the prepared zeolite media 0.5 m/s. When the ratio of fluidizing media height to the inside diameter of the incinerator (bed aspect ratio) increased from 1.4 to 3.1, it was found that $U_{mf}$ of the zeolite media was varied from 0.5 m/s to 0.7 m/s. Under the operation conditions in 1.79 of excess air ratio, $909^{\circ}C$ of bed temperature and ca. 1.65 m/s of superficial velocity, as the weight of fluidizing meadia was increased, $O_2$ concentration in the flue gas was slightly decreased, and $CO_2$ increased. Above 6 kg of fluidizing media weight (1.98 of bed aspect ratio), it was observed that $N_2O$ concentration was significantly reduced, which might result from the decomposition of $N_2O$ on the zeolite media rather than transformation of $N_2O$ to NOx. On the other hand, in a variation of the zeolite media mixing ratio to sand and bed temperature at a constant total bed height, significant difference was exhibited in $N_2O$ emission concentration according to the temperature. Considering the operation temperature in the incineration, the effective calcination temperature of the zeolite media was suggested to be around $900^{\circ}C$.

The Effect of Tillage Methods after Application of Liquid Pig Manure on Silage Barley Growth and Soil Environment in Paddy Field (돈분액비 시용 논에서 경운방법이 청보리 생육 및 토양환경에 미치는 영향)

  • Yang, Chang-Hyu;Lee, Sang-Bog;Kim, Taek-Kyum;Ryu, Jin-Hee;Yoo, Chul-Hyun;Lee , Jeong-Jun;Kim, Jae-Duk;Jung, Kwang-Yong
    • Korean Journal of Soil Science and Fertilizer
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    • v.41 no.5
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    • pp.285-292
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    • 2008
  • To investigate the effect of tillage methods on the silage barely growth and the soil environment in paddy field, liquid pig manure(LPM) was applied after harvesting rice at Jisan series soil for 2 years. Five plots, a LPM applied rate as N%; 0, 100, 150, 200(basal dressing) and 100(basal dressing)+50(additional fertilizer) were divided by tillage methods; non-tillage, non-tillage+rice straw and rotary tillage method. Emission amounts of $NH_3$ gas highly decreased in the rotary tillage and the non-tillage+rice straw plot compared to non-tillage plot. The contents of soil organic matter and exchangeable cation were increased in the applied LPM plot. $NH_4-N$ and $NO_3-N$ contents in soil were the highest in the non-tillage+rice straw plot and followed by the rotary tillage and highly decreased along with the growth of plant. Run-off rate of mineral components were higher in order of the rotary tillage plot£æthe non-tillage plot£æthe non-tillage+rice straw plot and then leached to $SO_4$, $NO_3-N$, K plentifully. The yield of silage barley in dry weight was higher in order of the non-tillage+rice straw plot>the rotary tillage plot>the non-tillage plot. To estimate the feed value of silage barley, crude protein, acid detergent fiber(ADF) and neutral detergent fiber(NDF) contents were analyzed. Crude protein and ADF contents were the highest at rotary tillage N150% plot as 9.7 and 29.4%, respectively. NDF contents was the highest at non-tillage+rice straw N150% plot as 56.7%. In conclusion, we recommend not to incinerate rice straw and to apply LPM at non-tillage status in cultivating the silage barley. This may prevent water pollution and increase barley yields.

An Experimental Study on the Pore Structure and Thermal Properties of Lightweight Foamed Concrete by Foaming Agent Type (기포제 종류에 따른 경량기포콘크리트의 기포구조 및 열적특성에 관한 실험적 연구)

  • Kim, Jin-Man;Choi, Hun-Gug;Park, Sun-Gyu
    • Journal of the Korea Institute of Building Construction
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    • v.9 no.4
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    • pp.63-73
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    • 2009
  • Recently, the use of lightweight panels in building structures has been increasing. Of the various lightweight panel types, styrofoam sandwich panels are inexpensive and are excellent in terms of their insulation capacity and their constructability. However, sandwich panels that include organic material are quite vulnerable to fire, and thus can numerous casualties in the event of a fire due to the lack of time to vacate and their emission of poisonous gas. On the other hand, lightweight foamed concrete is excellent, both in terms of its insulation ability and its fire resistance, due to its Inner pores. The properties of lightweight concrete is influenced by foaming agent type. Accordingly, this study investigates the insulation properties by foaming agent type, to evaluate the possibility of using light-weight foamed concrete instead of styrene foam. Our research found thatnon-heating zone temperature of lightweight foamed concrete using AP (Aluminum Powder) and FP (animal protein foaming agent) are lower than that of light-weight foamed concrete using AES (alkyl ether lactic acid ester). Lightweight foamed concrete using AES and FP satisfied fire performance requirements of two hours at a foam ratio 50, 100. Lightweight foamed concrete using AP satisfied fire performance requirements of two hours at AP ratio 0.1, 0.15. The insulation properties were better in closed pore foamed concrete by made AP, FP than with open pore foamed concrete made using AES.

PREPARATION OF AMORPHOUS CARBON NITRIDE FILMS AND DLC FILMS BY SHIELDED ARC ION PLATING AND THEIR TRIBOLOGICAL PROPERTIES

  • Takai, Osamu
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2000.11a
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    • pp.3-4
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    • 2000
  • Many researchers are interested in the synthesis and characterization of carbon nitride and diamond-like carbon (DLq because they show excellent mechanical properties such as low friction and high wear resistance and excellent electrical properties such as controllable electical resistivity and good field electron emission. We have deposited amorphous carbon nitride (a-C:N) thin films and DLC thin films by shielded arc ion plating (SAIP) and evaluated the structural and tribological properties. The application of appropriate negative bias on substrates is effective to increase the film hardness and wear resistance. This paper reports on the deposition and tribological OLC films in relation to the substrate bias voltage (Vs). films are compared with those of the OLC films. A high purity sintered graphite target was mounted on a cathode as a carbon source. Nitrogen or argon was introduced into a deposition chamber through each mass flow controller. After the initiation of an arc plasma at 60 A and 1 Pa, the target surface was heated and evaporated by the plasma. Carbon atoms and clusters evaporated from the target were ionized partially and reacted with activated nitrogen species, and a carbon nitride film was deposited onto a Si (100) substrate when we used nitrogen as a reactant gas. The surface of the growing film also reacted with activated nitrogen species. Carbon macropartic1es (0.1 -100 maicro-m) evaporated from the target at the same time were not ionized and did not react fully with nitrogen species. These macroparticles interfered with the formation of the carbon nitride film. Therefore we set a shielding plate made of stainless steel between the target and the substrate to trap the macropartic1es. This shielding method is very effective to prepare smooth a-CN films. We, therefore, call this method "shielded arc ion plating (SAIP)". For the deposition of DLC films we used argon instead of nitrogen. Films of about 150 nm in thickness were deposited onto Si substrates. Their structures, chemical compositions and chemical bonding states were analyzed by using X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy and infrared spectroscopy. Hardness of the films was measured with a nanointender interfaced with an atomic force microscope (AFM). A Berkovich-type diamond tip whose radius was less than 100 nm was used for the measurement. A force-displacement curve of each film was measured at a peak load force of 250 maicro-N. Load, hold and unload times for each indentation were 2.5, 0 and 2.5 s, respectively. Hardness of each film was determined from five force-displacement curves. Wear resistance of the films was analyzed as follows. First, each film surface was scanned with the diamond tip at a constant load force of 20 maicro-N. The tip scanning was repeated 30 times in a 1 urn-square region with 512 lines at a scanning rate of 2 um/ s. After this tip-scanning, the film surface was observed in the AFM mode at a constant force of 5 maicro-N with the same Berkovich-type tip. The hardness of a-CN films was less dependent on Vs. The hardness of the film deposited at Vs=O V in a nitrogen plasma was about 10 GPa and almost similar to that of Si. It slightly increased to 12 - 15 GPa when a bias voltage of -100 - -500 V was applied to the substrate with showing its maximum at Vs=-300 V. The film deposited at Vs=O V was least wear resistant which was consistent with its lowest hardness. The biased films became more wear resistant. Particularly the film deposited at Vs=-300 V showed remarkable wear resistance. Its wear depth was too shallow to be measured with AFM. On the other hand, the DLC film, deposited at Vs=-l00 V in an argon plasma, whose hardness was 35 GPa was obviously worn under the same wear test conditions. The a-C:N films show higher wear resistance than DLC films and are useful for wear resistant coatings on various mechanical and electronic parts.nic parts.

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