• Journal of computational fluids engineering
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• v.12 no.1
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• pp.28-34
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• 2007

This study evaluates the performance of the packed bed scrubber and proposes the optimization of spray system for improvements of collection efficiency. The packed bed scrubber is used primarily in the semiconductor manufacturing process. The mean diameter of entering solid particles in scrubber is the submicron. The impaction between water droplets and solid particles is an important factor in removing the solid particles. Thus, the coverage area of spray system influences on the collection efficiency. The collection efficiency of a single droplet is calculated through the mathematical model and numerical calculations are performed for coverage area for each nozzle type (Droplet diameters: 500, 319.5, $289.5{\mu}m$) and injected directions (0, 15, $30^{\circ}$). In case of nozzle type 3, the collection efficiency of a single droplet is highest but the collection efficiency of spray system has lowest value because the ratio of flow rate between the gas and water is below 0.1. The results show the coverage area ratio is about 85% in the case of nozzle type 3 and downward sirection $15^{\circ}$. It was shown that a coverage area increase by two times than an existing spray system. In simulation of demister, collection efficiency by demister is predicted about 80% and the pressure drop in demister is below 3.5 Pa.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.1
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• pp.81-87
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• 2006

In marine air pollution control, SCR (Selective Catalytic Reduction) is reconized as the most effect method to control NOx, but on the other hand. seawater scrubber applying the basic characteristic that is naturally alkaline (pH typically around 8.1) is viewed as an economical SOx removal system at present. Especially, seawater scrubber would not be necessary to follow any of the various land based flue gas desulfurization methods. i.e. wet, dry or alkali scrubbing. However, these methods are not readily adaptable to marine conditions due to the quantifies of consumables required i.e. lime or limestone, the means of operation and the commercial availability. This research is undertaken to develop a new method as the main target of eliminating all exhaust emissions, particularly vessel, because of easy access to seawater and apt to apply a wet scrubber system. First, using the acidic seawater by seawater electrolysis, nitric monoxide(NO) is adequately oxidized to nitric dioxide $(NO_2)$by ClOx-in the acidic seawater, the electrolyzed alkaline seawater by electrolysis which contains mainly NaOH together with alkali metal ions $(i.e\;Na^{+}\;K^{+},\;Mg_{2}\;^{+},\;Ca_{2}\;^{+})$, is used as the absorption medium of NOx, the SOx are absorbed by relatively high solubility compared to other components of exhaust pollutants. The results found that the NOx and SOx removals could be achieved nearly Perfect.

• 한국연소학회:학술대회논문집
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• 2014.11a
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• pp.139-140
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• 2014

Stabilization characteristics of highly $N_2$-diluted $CH_4-O_2$ flame in an axially two-section porous inert medium were experimentally investigated for its application to the waste gas scrubber in semiconductor manufacturing processes. The flame behaviors were observed with respect to the fuel and $N_2$ flow rates and the equivalence ratios. As a result, four kinds of flame behaviors such as stable, flashback crossing the interface, blowout and sudden extinction were observed.

• Journal of Korean Society for Atmospheric Environment
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• v.8 no.4
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• pp.262-268
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• 1992

The trend of international concerns on environmental conservation and domestic demand of ambient air quality improvement, specially on sulfur dioxide level has resulted in the establishment of mid-term strategy of environmental improvement and stepwise strengthening of emission regulations in this decade in Korea. Development of flue gas desulfurization(FGD) process is becoming an essential task to be accomplished especially for the power plants and large industrial facilities. This study is an initial stage researc focusing on the mass transfer principles in wet type FGD process and the effects of operating variables of a jet bubbling scrubber utilizing limestone slurry on sulfur dioxide removal efficiency. Experimental results showed this type of scrubbing system has some advantages in terms of mass transfer mechanism and removal efficiency. More rigorous research is needed for the reaction system and the comparison with existing FGD processess for the possible development of a process which is compatative in view of installation cost and treatment of by-products.

• Proceedings of the KIPE Conference
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• 2003.07a
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• pp.260-263
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• 2003

When ICP(Inductive Coupled Plasma type etching and wafer manufacturing is being processed in semiconductor process, a noxious gas in PFC and CFC system is generated. Gas cleaning dry scrubber is to remove this noxious gas. This paper describes a power source device, 2MHz switching frequency class 2kW RF Generator, used as a main power source of the gas cleaning dry scrubber. The power stage of DC/DC converter is consist of full bridge type converter with 100kHz switching frequency Power amplifier is push pull type inverter with 2MHz switching frequency, and transmission line transformer. The adequacy of the circuit type and the reliability of generating plasma in various load conditions are verified through 50$\Omega$ dummy load and chamber experiments result.

• Transactions of the Korean Society of Automotive Engineers
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• v.8 no.6
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• pp.79-86
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• 2000

The effects of recirculated exhaust gas on the wears of piston and piston rings were investigated by the experiment with a two-cylinder, four cycle, indirect injection diesel engine operating at an engine load of 75% and an engine speed of 1600 rpm. For the purpose of comparison between the wear rates of two cylinders with and without EGR, the recirculated exhaust gas was sucked into one of two cylinders after the soot contenets in exhaust emissions were removed by an intentionally designed cylinder-type scrubber equipped with 6 water injectors(A water injector has 144 nozzles of 1.0 mm diameter), while only the fresh air was inhaled into the other cylinder. These experiments were carried out on the fuel injection timing fixed at 15.3$^{\circ}$ BTDC. It was found that the wear rate of piston skirt with EGR increased a little bit, but the piston head diameter increased, rather than decreased, owing to soot adhesion and erosion wear, and especially larger with EGR, and that the wear rates of the top and second piston ring(compression ring)thickness with EGR were more than twice the wear rate of top ring in case of no EGR, but the wear rate of oil rings thickness without EGR increased greater than that with EGR.

• Transactions of the Korean hydrogen and new energy society
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• v.20 no.4
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• pp.352-359
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• 2009

KEPRI is developing a Korean type coal-gasification system and the scale is 20 ton/day. Prior to this pilot plant, a 1 ton/day class gasification system will be used for pre-testing of several coal types. This paper introduces the configuration and design conditions of this 1 ton/day class system, presenting the gas/coal ratio, oxygen/coal ratio, cold gas efficiency, CFD analysis of gasifier, and others. The existing combustion furnace for residual oil was retrofitted as a coal gasifier and a vertical and down-flow type burner was manufactured. Ash removal is carried out through a water quencher and a scrubber following the quencher, and the sulfur is removed by adsorption in the activated carbon tower. The gas produced from the gasifier is burned at the flare stack. In this paper, the results of design conditions and initial operation conditions of I ton/day gasification system are compared together.

• Applied Chemistry for Engineering
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• v.29 no.5
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• pp.510-518
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• 2018

Recently, lots of interests have been concentrated on the scrubber system that abates waste gases produced from semiconductor manufacturing processes. An effective design of the thermal decomposition reactor inside a scrubber system is significantly important since it is directly related to the removal performance of pollutants and overall stabilities. In the present study, a computational fluid dynamics (CFD) analysis was conducted to figure out the thermal and flow characteristics inside the reactor of wet scrubber. In order to verify the numerical method, the temperature at several monitoring points was compared to that of experimental results. Average error rates of 1.27~2.27% between both the results were achieved, and numerical results of the temperature distribution were in good agreement with the experimental data. By using the validated numerical method, the effect of the reactor geometry on the heat transfer rate was also taken into consideration. From the result, it was observed that the flow and temperature uniformity were significantly improved. Overall, our current study could provide useful information to identify the fluid behavior and thermal performance for various scrubber systems.

• Journal of Korean Society for Atmospheric Environment
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• v.15 no.E
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• pp.29-38
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• 1999

This study identified emission sources and emissions of air pollutants such as volatile organic compounds (VOCs), solvents, and acid gases produced from chemical plants. We collected air samples from various processes, reactors and facilities using VOC detectors and workers' experience. We identified chemical structures and emission concentrations of air pollutants. We analyzed total emissions of air pollutants emitted from the chemical plants. Also, we developed some emission reduction technologies based on chemical types and emission situations of the identified air pollutants. For reduction of air emissions of acid gases, we employed a method improving solubility of pollutants by reducing scrubber operation temperature, increasing surface area for effective contact of gas and liquid, and modifying or changing chemicals used in the acid scrubbers. In order to reduce air emissions of both amines and acid gases, which have had different emission sources each other but treated by one scrubber, we first could separate gas components. And then different control techniques based on components of pollutants were applied to the emission sources. That is, we first applied condensation and then acid scrubbing method using H2SO4 solution for amine treatment. However, we only used an acid scrubbing method using H2O and NaOH solution for acid gas treatment. In order to reduce air emissions of solvents such as dimethylformamide and toluene, we applied condensation and activated carbon adsorption. In order to reduce air emissions of mixture gases containing acid gases and slovents, which could not be separated in the processes, we employed a combination of various air pollution control devices. That is, the mixture gases were passed into the first condenser, the acid scrubber, the second condenser, and the activated carbon adsorption tower in sequence. In addition, for improvement of condensation efficiency of VOCs, we changed the type of the condensers attached in the reactors as a control device modification. Finally, we could successfully reduce air emissions of pollutants produced from various chenmical processes or facilities by use of proper control methods according to the types and specific emission situations of pollutants.

• Journal of Korean Society for Atmospheric Environment
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• v.6 no.1
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• pp.85-96
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• 1990

Simultaneous removal efficiencies of hydrophilic and hydrophobic gaseous pollutants are experimentally determined, and the macroscopic removal mechanism of pollutants in a dry scrubber is analyzed using the extended model of three phase equilibrium distribution of pollutant at high temperatures that can describe the different morphological conditions of adsorbent and water at varying relative humidities. For the simplicity, the inside of spray dryer is divided into three regions of ; (1) absorption, (2) three-phase equilibrium, and (3) adsorption, and the removal efficiencies of each pollutants at three regions are observed at different experimental conditions to estimate the effects of important parameters of dry scrubber. The laboratory experiments simulate the three regions of spray dryer with the temperature control and thus evaporation rate of water from the slurry particle. $SO_2$ as a hydrophilic gaseous pollutant and vinyl chloride as a hydrophobic toxic gas are selected for the future field application to soid waste incineration, and the two types of slurry are made of the two sorbents ; 10 wt.% $Ca(OH)_2$, and 10 wt.% NaOH. Result of temperature effect shows the height of absorption plus three-phase region is decreased as the operation temperature is increased, which results in the lower removal efficiency of $SO_2$ but higher removal for vinyl chloride in the adsorption region of dry scrubber. The removal efficiency of $SO_2$ is higher by NaOH slurry than by $Ca(OH)_2$ slurry due to the hygroscopic nature of NaOH, while the removal of vinyl chloride is higher in $Ca(OH)_2$ case. From the analysis of redults using three-phase equilibrium distribution model, the effective two-phase partition coefficients can be obtained, and the possible extention in the application of the three-phase equilibrium model in a dry scrubber design has been demonstrated.