1 |
Y. Kim, H. Lee, M. Sung, Y. Kim, and J. Cho, Flow analysis and temperature distribution of the inside of scrubber using micro wave, Proceedings of the KASI Fall Conference, Jeju Grand Hotel, Jeju Island, Korea (2014).
|
2 |
T. L. Bergman, A. S. Lavine, F. P. Incropera, and D. P. DeWitt, Introduction to Heat Transfer, 5th ed., John Wiley & Sons Inc., 943 (2007).
|
3 |
R. Span, E. W. Lemmon, R. T. Jacobsen, W. Wagner, and A. Yokozeki, A reference equation of state for the thermodynamic properties of nitrogen for temperatures from 63.151 to 1000 K and pressures to 2200 MPa, J. Phys. Chem. Ref. Data, 29(6), 1361-1433 (2000).
DOI
|
4 |
J. J. Hurly, Thermodynamic properties of gaseous nitrous oxide and nitric oxide from speed-of-sound measurements, Int. J. Thermophys., 24(6), 1611-1635 (2003).
DOI
|
5 |
ANSYS Incorporation, The Manual of ANSYS CFX, Version 18.0, USA (2017).
|
6 |
H. Park, W. Cha, and S. Uhm, Highly efficient thermal plasma scrubber technology for the treatment of perfluorocompounds (PFCs), Appl. Chem. Eng., 29(1), 10-17 (2018).
DOI
|
7 |
M. B. Chang and J. S. Chang, Abatement of PFCs from semiconductor manufacturing processes by nonthermal plasma technologies: a critical review, Ind. Eng. Chem. Res., 45, 4101-4109 (2006).
DOI
|
8 |
D. Choi, Gas Scrubber, Korean Patent, KR100325197B1 (2002).
|
9 |
S. Oh, J. Park, J. Jeong, B. Lee, and J. Kim, Continuous remove method and equipment of LED manufacturing process exhaust gas using wet-scrubber and catalyst reaction scrubber, Korean Patent, KR101211625B1 (2012).
|
10 |
Clean System Korea, Inc., Development of advanced eco-friendly treatment system for reducing the NOx, CO, and greenhouse gases emission in semiconductor processing, Research Report 012-091-061, The Ministry of Environment, Korea (2011).
|
11 |
S. Kim and Y. Chun, Numerical analysis of a gliding arc plasma scrubber for conversion, J. Korean Soc. Atmos. Environ., 30(4), 339-349 (2014).
DOI
|
12 |
L. S. Lebel, M. H. Piro, R. MacCoy, A. Clouthier, and Y. Chin, Concept for a cyclonic spray scrubber as a fission product removal system for filtered containment venting, Nucl. Eng. Des., 297, 60-71 (2016).
DOI
|
13 |
J. Lee, C. Jang, Y. Oh, H. Jung, and H. Jo, Internal flow analysis of semiconductor gas scrubber using CFD, Proceedings of the Korean Society for Computational Fluids Engineering Spring Conference, May 23, Pusan National University, Busan, Korea (2012).
|
14 |
A. Huang, N. Maeda, S. Sunada, T. Fukasawa, H. Yoshida, H. Kuo, and K. Fukui, Effect of cold air stream injection on cyclone performance at high temperature, Sep. Purif. Technol., 183, 293-303 (2017).
DOI
|
15 |
J. Park and K. Park, Effect of guide angle of swirl-type scrubber on flow characteristics of exhaust gas, J. Korean Soc. Mar. Eng., 41(9), 767-772 (2017).
DOI
|