Browse > Article
http://dx.doi.org/10.14478/ace.2018.1034

Effect of Inlet Shape on Thermal Flow Characteristics for Waste Gas in a Thermal Decomposition Reactor of Scrubber System  

Yoon, Jonghyuk (Plant Engineering Center, Institute for Advanced Engineering)
Kim, Youngbae (Plant Engineering Center, Institute for Advanced Engineering)
Song, Hyungwoon (Plant Engineering Center, Institute for Advanced Engineering)
Publication Information
Applied Chemistry for Engineering / v.29, no.5, 2018 , pp. 510-518 More about this Journal
Abstract
Recently, lots of interests have been concentrated on the scrubber system that abates waste gases produced from semiconductor manufacturing processes. An effective design of the thermal decomposition reactor inside a scrubber system is significantly important since it is directly related to the removal performance of pollutants and overall stabilities. In the present study, a computational fluid dynamics (CFD) analysis was conducted to figure out the thermal and flow characteristics inside the reactor of wet scrubber. In order to verify the numerical method, the temperature at several monitoring points was compared to that of experimental results. Average error rates of 1.27~2.27% between both the results were achieved, and numerical results of the temperature distribution were in good agreement with the experimental data. By using the validated numerical method, the effect of the reactor geometry on the heat transfer rate was also taken into consideration. From the result, it was observed that the flow and temperature uniformity were significantly improved. Overall, our current study could provide useful information to identify the fluid behavior and thermal performance for various scrubber systems.
Keywords
Scrubber; Thermal decomposition reactor; Semiconductor; Waste gas; Thermal flow characteristics; CFD;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Y. Kim, H. Lee, M. Sung, Y. Kim, and J. Cho, Flow analysis and temperature distribution of the inside of scrubber using micro wave, Proceedings of the KASI Fall Conference, Jeju Grand Hotel, Jeju Island, Korea (2014).
2 T. L. Bergman, A. S. Lavine, F. P. Incropera, and D. P. DeWitt, Introduction to Heat Transfer, 5th ed., John Wiley & Sons Inc., 943 (2007).
3 R. Span, E. W. Lemmon, R. T. Jacobsen, W. Wagner, and A. Yokozeki, A reference equation of state for the thermodynamic properties of nitrogen for temperatures from 63.151 to 1000 K and pressures to 2200 MPa, J. Phys. Chem. Ref. Data, 29(6), 1361-1433 (2000).   DOI
4 J. J. Hurly, Thermodynamic properties of gaseous nitrous oxide and nitric oxide from speed-of-sound measurements, Int. J. Thermophys., 24(6), 1611-1635 (2003).   DOI
5 ANSYS Incorporation, The Manual of ANSYS CFX, Version 18.0, USA (2017).
6 H. Park, W. Cha, and S. Uhm, Highly efficient thermal plasma scrubber technology for the treatment of perfluorocompounds (PFCs), Appl. Chem. Eng., 29(1), 10-17 (2018).   DOI
7 M. B. Chang and J. S. Chang, Abatement of PFCs from semiconductor manufacturing processes by nonthermal plasma technologies: a critical review, Ind. Eng. Chem. Res., 45, 4101-4109 (2006).   DOI
8 D. Choi, Gas Scrubber, Korean Patent, KR100325197B1 (2002).
9 S. Oh, J. Park, J. Jeong, B. Lee, and J. Kim, Continuous remove method and equipment of LED manufacturing process exhaust gas using wet-scrubber and catalyst reaction scrubber, Korean Patent, KR101211625B1 (2012).
10 Clean System Korea, Inc., Development of advanced eco-friendly treatment system for reducing the NOx, CO, and greenhouse gases emission in semiconductor processing, Research Report 012-091-061, The Ministry of Environment, Korea (2011).
11 S. Kim and Y. Chun, Numerical analysis of a gliding arc plasma scrubber for $CO_2$ conversion, J. Korean Soc. Atmos. Environ., 30(4), 339-349 (2014).   DOI
12 L. S. Lebel, M. H. Piro, R. MacCoy, A. Clouthier, and Y. Chin, Concept for a cyclonic spray scrubber as a fission product removal system for filtered containment venting, Nucl. Eng. Des., 297, 60-71 (2016).   DOI
13 J. Lee, C. Jang, Y. Oh, H. Jung, and H. Jo, Internal flow analysis of semiconductor gas scrubber using CFD, Proceedings of the Korean Society for Computational Fluids Engineering Spring Conference, May 23, Pusan National University, Busan, Korea (2012).
14 A. Huang, N. Maeda, S. Sunada, T. Fukasawa, H. Yoshida, H. Kuo, and K. Fukui, Effect of cold air stream injection on cyclone performance at high temperature, Sep. Purif. Technol., 183, 293-303 (2017).   DOI
15 J. Park and K. Park, Effect of guide angle of swirl-type scrubber on flow characteristics of exhaust gas, J. Korean Soc. Mar. Eng., 41(9), 767-772 (2017).   DOI