• Journal of the Korean Institute of Gas
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• v.26 no.5
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• pp.28-34
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• 2022

Since semiconductor factories are located in densely populated areas, safe handling of hazardous materials handled in the manufacturing process is of utmost importance. In particular, the types of hazardous substances discharged after handling in the semiconductor manufacturing process are very diverse, and the treatment methods such as combustion, absorption and adsorption methods for each material are very complicated. Therefore, in recent semiconductor exhaust treatment processes, two or more treatment methods are applied to one treatment facility, and unexpected accidents occur due to the application of such a complex treatment method. In this study, the cause of accidents in treatment facilities that applied both the scrubber method and the electrostatic precipitation method, which are recent accident cases, are identified, and preventive measures are suggested to find out the points to be noted when applying the complex treatment method.

• Journal of environmental and Sanitary engineering
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• v.11 no.1
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• pp.57-61
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• 1996

This study was to decompose carbon tetrachloride and CFC with pyrolytic incineration unit because of prohibition of their usage sooner or later. We have investigated heating value and temperature versus decomposing rate, removal of $Cl_2$ and dust in the flue gas, The results obtained were as follows; 1. In combustion condition to decompose $CCl_4$ heating value was 3,300Kcal/Kg, retention time was 2,0 sec. incinerator exit temperature was $950^{\circ}C$. 2.The removal of HCI and $Cl_2$ in flue gas used NaOH as reagent, then molar ratio o of $Na^+/Cl^-$ was 1.07. 3. NaCI of dust component was more than 90 %, 2 stage venturi scrubber was used to remove dust, then removal rate of dust was 99% over at L/G of $1.7Vm^3$

• 연구논문집
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• s.24
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• pp.5-11
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• 1994

EGR is an efficient method for reduction of NOx from diesel exhaust emission since it is simple to install with low cost and effective in its performance however it has demerits such as incresing wear on the moving parts of engines. stainning intake system and deteriorate lubricating oil. In order to reduce the soot contents in the recirculating gas to intake system of the engine, a proper filtering device was desined and manufactered for experiment system. It is aimed to grasp the characteristics of pollutant emissions including SFC on EGR system equipped with soot removal device.

• Journal of Navigation and Port Research
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• v.40 no.1
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• pp.1-6
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• 2016

This study was conducted on a circulation system which can recycle waste water from EGCS(Exhaust Gas Cleaning System) using a wet scrubber that is used to treat air pollutants from ships. Though we developed a water treatment system that could remove effectively particulate matters and dispersed oil included in cleaning water for Ship Exhaust Gas Recycle System(DePM & DeSOx), we found that it is difficult to treat minutely dispersed oil only by means of centrifugal-typed purifier. Therefore, to this system, we applied a coalescer that coalesces emulsified minute oil particles in the 2nd phase of dispersion state after being filtered through the centrifugal-typed purifier. After we treated cleaning water drained out of Ship Exhaust Gas Recycle System(DePM & DeSOx) by using both purifier and coalescer, we found that particulate matters and dispersed oil were removed more than 55% and 99%, respectively, in comparison with those contained in cleaning water influent. Putting the results together, we conclude that the treated cleaning water can be recycled as normal cleaning water if this cleaning water treatment system is employed by the wet cleaning tower system for the reduction of air pollutants from ships.

• Journal of Mechanical Science and Technology
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• v.15 no.11
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• pp.1524-1532
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• 2001

The effects of recirculated exhaust gas on the wear of cylinder liner and piston were experimentally investigated by a two-cylinder, four cycle, indirect injection diesel engine operating at 75% lo ad and 1600 rpm. For the purpose of comparison between the wear rates of the two cylinders with and without EGR, the recirculated exhaust gas was sucked into one of two cylinders after the soot in exhaust emissions was removed by an intentionally designed cylinder-type scrubber equipped with 6 water injectors(A water injector has 144 nozzles of 1.0 mm diameter), while only the fresh air was inhaled into the other cylinder. These experiments were carried out with the fuel injection timing fixed at 15.3$^{\circ}$ BTDC. It was found that the mean wear rate of cylinder liner with EGR was greater in the measurement positions of the second half than those of the first half, that the mean wear rate without EGR was almost uniform regardless of measurement positions, and that the wear rate of piston skirt with EGR increased a little bit, but the piston head diameter increased, rather than decreased, owing to soot adhesion and erosion wear, and especially larger with EGR.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.131.1-131.1
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• 2010

This study was conducted for engineering optimization for the gasification process which is the key factor for success of Taean IGCC gasification plant which has been driven forward under the government support in order to expand to supply new and renewable energy and diminish the burden of the responsibility for the reduction of the green house gas emission. The gasification process consists of coal milling and drying, pressurization and feeding, gasification, quenching and HP syngas cooling, slag removal system, dry flyash removal system, wet scrubbing system, and primary water treatment system. The configuration optimization is essential for the high efficiency and the cost saving. For this purpose, it was designed to have syngas cooler to recover the sensible heat as much as possible from the hot syngas produced from the gasifier which is the dry-feeding and entrained bed slagging type and also applied with the oxygen combustion and the first stage cylindrical upward gas flow. The pressure condition inside of the gasifier is around 40~45Mpg and the temperature condition is up to $1500{\sim}1700^{\circ}C$. It was designed for about 70% out of fly ash to be drained out throughout the quenching water in the bottom part of the gasifier as a type of molten slag flowing down on the membrane wall and finally become a byproduct over the slag removal system. The flyash removal system to capture solid particulates is applied with HPHT ceramic candle filter to stand up against the high pressure and temperature. When it comes to the residual tiny particles after the flyash removal system, wet scurbbing system is applied to finally clean up the solids. The washed-up syngas through the wet scrubber will keep around $130{\sim}135^{\circ}C$, 40~42Mpg and 250 ppmv of hydrochloric acid(HCl) and hydrofluoric acid(HF) at maximum and it is turned over to the gas treatment system for removing toxic gases out of the syngas to comply with the conditions requested from the gas turbine. The result of this study will be utilized to the detailed engineering, procurement and manufacturing of equipments, and construction for the Taean IGCC plant and furthermore it is the baseline technology applicable for the poly-generation such as coal gasification(SNG) and liquefaction(CTL) to reinforce national energy security and create new business models.

• Journal of the Korean Applied Science and Technology
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• v.32 no.3
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• pp.372-376
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• 2015

The experiment was performed using the cleaning precipitator To investigate the absorption efficiency of the $SO_X/NO_X$ of the aqueous ammonia solution. Concentration of the cleaning liquid is 0.1, 0.5, and 1.0% with increasing absorption efficiency has improved. However, the reaction shown only a difference in time. Absorption efficiency has improved in accordance with the gas residence time. When the direction of the same gas and the cleaning liquid is determined that there is the effect of increasing the residence time. The relative impact of $SO_X$ and $NO_X$ is this likely to react slower than $SO_X/NO_X$. The yield is determined to require adjustment of the cleaning dust collector according to the concentration of the next gas.

• Applied Chemistry for Engineering
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• v.22 no.1
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• pp.31-36
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• 2011

Tetrafluoromethane ($CF_4$) has been used as the plasma etching and chemical vapor deposition (CVD) gas for semiconductor manufacturing processes. However, the gas need to be removed efficiently because of their strong absorption of infrared radiation and the long atmospheric lifetime which cause global warming effects. A waterjet gliding arc plasma system in which plasma is combined with the waterjet was developed to effectively produce OH radicals, resulting in efficient destruction of $CF_4$ gas. Design factors such as electrode shape, electrode angle, gas nozzle diameter, electrode gap, and electrode length were investigated. The highest $CF_4$ destruction of 93.4% was achieved at Arc 1 electrode shape, $20^{\circ}$ electrode angle, 3 mm gas nozzle diameter, 3 mm electrode gap and 120 mm electrode length.

• Korean Chemical Engineering Research
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• v.50 no.5
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• pp.837-842
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• 2012

A pilot scale circulating fluidized boiler (CFB) for refuse derived fuel (RDF) is designed and constructed to demonstrate a performance of CFB technology for waste fuel utilization. The boiler has a design capacity of 6 MWth with $400^{\circ}C$ 38 ata steam generation performance. The maximum steam rate of the boiler was about 8 ton/h. The main component of the fuel was RDF (Refuse Derived Fuel) with high volatile contents and showed fast ignition and easy combustion. The pilot plant showed over 99.5% of combustion efficiency. Stable operation of RDF CFBC depended on the content of non combustion materials other than ash and fast removal of them. Emission level was under legal limit except that of HCl without external flue gas treatment facilities. Also about 60% of fuel chlorine was absorbed to fly ash particles. For HCl emission control flue gas treatment technology is required such as wet and dry scrubber in order to comply with Korean regulation.

• Nuclear Engineering and Technology
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• v.33 no.4
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• pp.355-364
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• 2001

In order to evaluate and finally optimize the vitrification condition for combustible dry active waste (DAW), dust and gas generation characteristics were investigated for PE, cellulose, and mixed waste Tests were conducted by varying the operation variables such as melter configuration, excess oxygen amount, and waste feeding rate. Results showed that dust generation characteristics were affected by the operation parameters and the melter＇s configuration is the dominant one. For all tested DAWs, dust generation was reduced by increasing the waste feeding rate and the excessive oxygen amount in the melter. Among waste types, dust amount was decreased by the order of mixed wastes, PE, and cellulose. Other parameters such as temperature variation and operation time have also affected the dust generation. The optimum condition for the DAW vitrification was determined as the melter＇s configuration equipped for minimizing the waste dispersion with 20 kg/h of waste feeding rate and 100% of excessive oxygen supply. CO gas concentration in the off-gas was immediately influenced by the combustion state in the melter, but showed similar trend as the dust generation. For the NOx production during the vitrification process, thermal NOx, which is generated from the Post Combustion Chamber (PCC), rather than fuel NOx was assumed to be dominant. The gas cleaning of efficiencies of the PCC, wet scrubber, and Selective Catalytic Reduction system (SCR) were found to be high enough to keep the concentration of pollutants (CO, NOx, SOx, HCI) in the stack below their relevant emission limits.