• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.71-72
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• 2008

In this paper, the effect of thermal annealing on surface acoustic wave (SAW) properties of aluminum nitride (AlN) films were described. The films were fabricated on Si substrates by using Pulsed Reactive Magnetron Sputtering System. The SAW properties of $600^{\circ}C$-annealed AlN films were better than those of both $900^{\circ}C$-annealed AlN films and as-deposited ones. Their SAW velocities (Raleigh mode) and insertion losses were about 5212 m/s and 16.19 dB at $600^{\circ}C$ with the wavelength of $40{\mu}m$. The dependence of characteristics of AlN films on annealing conditions were also evaluated by using Fourier Transform-Infrared Spectroscopy (FT-IR) Spectrums and Atomic Force Microscopy (AFM).

• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.3
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• pp.380-385
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• 1996

Thin films of polyamic acid(PAA) were fabricated by vapor deposition polymerization(VDP) from pyromellitic dianhydride(PMDA) and 4,4'-diamino diphenyl ether(DDE). Thin films of polyimide(PI) were obtained by curing PAA, and their dielectric properties have been measured. The uniform thin films of PI formed by curing PAA at 300 .deg. C for 1 hr. which was confirmed by Fourier transform Infrared spectroscopy(FT-IR) absorption at 720, 1380, 1780c $m_{-1}$. Relative permittivity and tan .delta. were 3.9 and 0.008 at 10kHz, respectively. (author). 8 refs., 11 figs., 1 tab.1 tab.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.3
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• pp.438-443
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• 1996

The effect of plasma polymerization conditions on the structure of the plasma polymerized styrene were investigated by using Fourier Transform Infrared Ray(FT-IR), Differential Scanning Calorimetry (DSC), Gel Permeation Chromatography(GPC). Plasma polymerized thin film was prepared using an interelectrode inductively coupled gas-flow-type reactor. We show that polymerization parameters of thin film affect sensitivity and etching resistance of plasma polymerized styrene is 1.41~3.93, and deposition rate of that are 32~383[.angs./min] with discharge power. Swelling and etching resistance becomes more improved with increasing discharge power during plasma polymerization. (author). 11 refs., 10 figs., 1 tab.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.575-577
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• 1999

In this study, the PPPI(Plasma Polymerized Phenyl Isothiocyanate) resist thin film was manufactured in accordance with the plasma polymerization method and after exposing it to an electron beam, a pattern was formed by plasma etching. With the FT-IR(Fourier transform-infrared spectrometry) analysis, it was confirmed that the PI(Phenl Isothiocyanate) monomer was successsfully produced into a thin film by the plasma. The polymerization rate of the thin film was 450~ 1012($\AA$/min) to 100-200(W) discharge power and 120-12($\AA$/min) to 0.1 ~0.4[torr] system pressure.

• Bulletin of the Korean Chemical Society
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• v.33 no.6
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• pp.1856-1860
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• 2012

$SnO_2/SiO_2$ nanocomposite has been synthesized by using sol-gel method. Prepared catalytic materials has been well characterized by using X-ray diffraction (XRD), transmission electron microscopy (TEM), scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), Fourier transform infrared spectroscopy (FT-IR), Brunauer-Emmer-Teller (BET) surface area, and temperature-programmed desorption of ammonia ($NH_3$-TPD). $SnO_2/SiO_2$ nanocomposite catalyzed synthesis of 2-arylbenzothiazoles by the cyclocondensation of 2-aminothiophenol and aromatic aldehydes under reflux condition in 1:1 EtOH:$H_2O$. After completion of the reaction, catalyst can be recovered efficiently and reused with consistent activity.

• Bulletin of the Korean Chemical Society
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• v.28 no.11
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• pp.2029-2033
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• 2007

Hydrotalcite, layered double hydroxides (LDH), with hexagonal morphology has been rapidly synthesized by microwave reaction within 1 hour by urea hydrolysis from homogeneous solution. Different synthesis parameters, Mg/Al molar ratio, microwave reaction temperature and microwave power were systematically investigated. Pure hydrotalcite phase was obtained for Mg/Al ratios of 2:1 and 3:1, and higher reaction temperature gave higher crystallinity. The hydrotalcite synthesized at 600W power shows the highest crystallinity and more homogeneous crystal size distribution. The hydrotalcite samples were characterized by powder X-ray diffraction (XRD), simultaneous thermogravimetric/differential thermal analysis (TG/DTA), Fourier Transform Infrared (FT-IR) and Scanning electron micrograph (SEM).

• Bulletin of the Korean Chemical Society
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• v.25 no.11
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• pp.1681-1686
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• 2004

Self-assembled systems with polyamidoamine (PAMAM) dendrimers combined with gold nanoparticles have been widely studied because of their potential applications in molecular electronics, catalyst carriers, chemical sensors, and biomedical devices. In our work, gold nanoparticle monolayers and multilayers with pure and ferrocene-tethered PAMAM dendrimers as cross-linking molecules were deposited on a mixed self-assembled monolayer of gold substrates. The various generations of PAMAM dendrimers can be covalently attached to mercaptoundecanoic acid mixed with a mercaptoundecanol self-assembled monolayer. Cyclic voltammograms show that redox peak currents on the alternate multilayers of gold nanoparticles and ferrocene-tethered PAMAM dendrimers increase as the number of layers increases. Fourier transform IR external reflection spectroscopy and scanning electron microscopy support the results from electrochemical measurements.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.57 no.4
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• pp.395-399
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• 2008

The purpose of this paper is to investigate the fabrication of P(VDF-TrFE) organic thin films through the vapor deposition method and the piezoelectric properties of the organic thin films thus produced. Vapor deposition was performed under the following conditions: the working temperature, and the pressure of reaction chamber were $300^{\circ}C$, and $2.0{\times}10^{-5}$ Torr, respectively. The molecular structure and crystallinity of the evaporated organic thin films were evaluated by using a FT-IR (Fourier-Transform Infrared spectroscopy) and XRD (X-ray diffractometry), The results showed that crystallinity increased with an increase in the substrate temperature. When the P(VDF-TrFE) organic thin films were fabricated by increasing the substrate temperature, its piezoelectric coefficient($d_{33}$) increased.

• Journal of the Korean Vacuum Society
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• v.8 no.3A
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• pp.187-193
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• 1999

In this study, PVDF thin films which show the excellent piezoelectricity and pyroelectricity, are prepared by PVD (physical vapor deposition) method, and thir electrical conduction phenomena for analyses of the electrical conduction mechanism and TSC (Thermally Stimulated Current) for identification of the behavior of conductive carriers are investigated. As a result of FT-IR(Fourier Transform Infrared Spectroscopy) spectra, the crystalline phase transforms $\alpha$ type into $\beta$ type with increasing electric field. From XRD (X-Ray diffraction) analyses patterns, the degree of crystallinity increases from 49.8% to 67%, as the substrate temperature increases from $30^{\circ}C$ to $80^{\circ}C$. As a result of electrical conduction phenomena, the electrical conduction mechanism of PVDF thin films is identified as ionic conduction mechanism. From TSC analyses, there are three peaks as P1, P2, P3 with increasing temperature, and with increasing substrate temperature, the peak temperature of TSC increases and the peak intensity of TSC decreases.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.239-239
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• 2010

Cobalt (Co) 박막은 낮은 저항과 우수한 열적 안정성에 의해 금속 배선공정에서 copper의 확산 및 산화를 방지하기 위해 사용된다. Co 박막을 증착하기 위해서는 유기화학 증착법이 많이 사용되고, 이를 위해 많은 Co 전구체들이 연구되어지고 있다. 본 연구에서는 $Co(hfac)_2$ 전구체의 플라즈마 및 반응가스에 따른 기상상태의 변화와 증착공정에서 발생되는 입자의 크기와의 상관관계를 연구하였다. 실험의 변수로 반응가스 ($H_2$, $H_2O$)와 플라즈마 파워 (0~50W)를 사용하였다. 또한 Co 전구체의 기상분해 및 반응을 분석을 위해 fourier transform infrared (FT-IR) spectroscopy를 사용하였다. 그리고 기상상태의 변화가 입자 형성에 끼치는 영향을 관찰하기 위해 저압에서 실시간으로 나노입자를 측정할 수 있는 장비인 particle beam mass spectrometer (PBMS)를 활용하였다.