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A Study on the Fabrication of P(VDF- TrFE) Organic Thin Films and Piezoelectric Characteristics  

Park, Su-Hong (유닉스 전자(주) 상품개발실)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers P / v.57, no.4, 2008 , pp. 395-399 More about this Journal
Abstract
The purpose of this paper is to investigate the fabrication of P(VDF-TrFE) organic thin films through the vapor deposition method and the piezoelectric properties of the organic thin films thus produced. Vapor deposition was performed under the following conditions: the working temperature, and the pressure of reaction chamber were $300^{\circ}C$, and $2.0{\times}10^{-5}$ Torr, respectively. The molecular structure and crystallinity of the evaporated organic thin films were evaluated by using a FT-IR (Fourier-Transform Infrared spectroscopy) and XRD (X-ray diffractometry), The results showed that crystallinity increased with an increase in the substrate temperature. When the P(VDF-TrFE) organic thin films were fabricated by increasing the substrate temperature, its piezoelectric coefficient($d_{33}$) increased.
Keywords
P(VDF-TrFE); Organic Thin Films; Molecular Structure; Substrate Temperature; Piezoelectric Coefficient;
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