• Journal of environmental and Sanitary engineering
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• v.15 no.2
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• pp.41-48
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• 2000

In this study, we have investigated the effect of the various operating conditions on the removal fluorine in the rinsed water for the semiconductor industry by using electrolysis process. The removal efficiency of fluorine was irrelevant to initial pH, and carbon anode was high-level treatment in the effect of various electrodes. Fluorine included in the wastewater is treated by the addition of a Ca(OH)2, removal efficiency of electrolysis was increased about 40%. Besides the removal efficiency of fluorine was increased as the current density was increased and this treatment system could reduce both the total sludge and running costs. The feasibility of the electrochemical treatment to the fluorine containing wastewater was verified from this study.

• Resources Recycling
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• v.16 no.4
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• pp.27-32
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• 2007

The characteristics of fluorine removal from wastewater have been investigated by precipitation method using calcium as a precipitant for the purpose of the reuse of treated wastewater. In the conditions of 10 mM of the initial concentration of fluorine and pH 4, the precipitation of fluorine was rapidly progressed within a few minutes after the precipitant was added and the precipitation of fluorine was observed to follow a second order reaction. Also, as the addition of precipitant was increased, the reaction rate constant of fluorine precipitation was found to rise. Postulating that the maximum fluorine removal was attained at pH 4, about 70% of fluorine was precipitated compared with the maximum removal when 10 times of equivalent amount of calcium was employed at pH 2 and the fluorine removal was about 96% compared with its maximum value at pH 3 under the same addition of precipitant. The fluorine precipitation reaction was found to be endothermic and the coexistence of $SiF_6{^{2-}}$ with fluorine resulted in its less removal. Finally, the isoelectric point of the precipitate was examined to be ca. pH 5.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.6
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• pp.1127-1137
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• 2000

Applications of lanthanum ion and crude rare earth chloride to the phosphate wastewater and fluorine wastewater, respectively, as treatment agents were studied. For the investigation of phosphate removal characteristics according to the amount of lanthanum ion, initial phosphate content was decreased by about 50% when molar ratio of [$La^{3+}$]:[$PO_4{^{3-}}-P$] was 0.25 and nearly all of phosphate was removed when the molar ratio of [$La^{3+}$]:[$PO_4{^{3-}}-P$] to be doubled. The removal of phosphate by $La^{3+}$ appeared to reach equilibrium state rapidly, and it was exothermic reaction since the removed amount of phosphate was diminished somewhat when the reaction temperature was increased. The zeta potential of combined particulate compound of lanthanum ion and phosphate was located for its isoelectric point at pH 5.5 and the turbidity of treated wastewater was found to vary according to the pH in a similar manner as the absolute value of zeta potential of the combined particulate compound did. For the treatment of fluorine wastewater by crude rare earth chloride, the remaining fluorine content after treatment decreased as the dosage of crude rare earth chloride increased. Whereas, the turbidity of treated wastewater and the amount of sludge generated were shown to increase as more crude rare earth chloride was added. The remaining fluorine content and the turbidity of treated wastewater were decreased and the amount of sludge generated was observed to increase according the increase of coagulant dosage under the condition of constant input of crude rare earth chloride.

• Journal of Korean Society on Water Environment
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• v.23 no.3
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• pp.371-376
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• 2007

The features of precipitating reaction of fluorine have been examined under several aquatic conditions by employing calcium ion as a precipitant. Based on MINTEQ program, fluorine was found to exist in the forms of $H_2F_2$ and HF in strong acidic environment and change into $F^-$ with increasing pH. In the experimental condition, the precipitating reaction of fluorine progressed rapidly within a few minutes after the reaction started and reached its equilibrium in 10 minutes. As the addition of precipitant was increased, removal of fluorine by the formation of precipitate was promoted and its was also enhanced by the rise of pH. The precipitating reaction of fluorine was impeded when its initial concentration was low and X-ray analysis showed that the crystalline structure of precipitate was mainly $CaF_2$ with partly NaF. Coexisting phosphate in solution influenced the fluorine removal by impeding the precipitate formation and similar effect was found when metallic ion such as $Zn^{2+}$ was present with fluorine.

• Journal of Korean Society of Environmental Engineers
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• v.34 no.10
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• pp.702-708
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• 2012

Tetrafluoromethane ($CF_4$) has been used as etching and Chemical Vapor Deposition (CVD) gases for semiconductor manufacturing processes. These gases need to be removed efficiently because of their strong absorption of infrared radiation and long atmospheric lifetimes which cause the global warming effect. Also, the wastewater including the fluorine is caused by of the ground water pollution. Long-term consumption of water containing excessive fluoride can lead to fluorosis of the teeth and bones. The wastewater including the fluorine among the by-product which is generated by using the waterjet plasma after destroying $CF_4$ by HF is generated. The system which can remove the hydrogen fluoride among the wastewater by using the electrocoagulation using this wastewater the aluminum electrode was developed. The operating condition such as initial pH, electrocoagulation time, wastewater flow rate, current density were investigated experimentally using a electrocoagulation. Through the parametric studies, the highest hydrogen fluoride destruction of 85% was achieved at 3.5 initial pH, 10 min electrocoagulation time, 10 mL/min wastewater flow rate and $159A/m^2$ current density.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.7
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• pp.730-737
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• 2010

It is very important to remove fluoride ion before treating semiconductor wastewater containing high concentration of ammonia, phosphates, and fluoride ions by struvite formation. Calcium ion was generally added for the removal of fluoride ion. However, calcium ions remained after removal of fluoride ion can deteriorate the performance of struvite crystalization. It should be removed completely before struvite formation. In this study, the effect of fluoride and calcium ion concentration on the struvite crystalization was investigated. Removal efficiencies of ortho-phosphate with struvite formation were more abruptly decreased than those of ammonium nitrogen, as increase of fluoride ion concentration in synthetic wastewater. The structures of struvite formed in synthetic wastewater containing calcium ion of up to 500 mg/L were identical. Purity of struvite was deteriorated as increase of calcium ion over 500 mg/L. Removal efficiencies of ammonium nitrogen were more decreased than those of phosphate ions as increase of cacium ion in synthetic wastewater.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.8
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• pp.909-914
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• 2007

Fluorine compounds are the essential chemicals for wet processes of semiconductor and LCD production line. Problems of conventional treatments for fluoride wastewater are their high operation costs and low fluoride removal capacity. In this study, cement paste containing various Ca-bearing hydrates such as portlandite, calcium silicate hydrate(CSH), and ettringite was investigated for fluoride removal. The objectives of this study are to assess the feasibility of using cement paste cured mixture of cement and water as an alternative agent for treatment of fluoride wastewater and to investigate fluoride removal capacity of the cement paste. The performance of cement paste was comparable to that of lime in the kinetic test. In column experiment where the effluent fluoride concentrations were below 0.5 mg/L. Then the leached calcium reached the maximum level of 800 mg/L. The nitrate reduced to the level of less than 10 mg/L. Nitrate in the wastewater was exchanged with interlayer sulfate of these cement hydrate LDHs. Phosphate concentration could be reduced to 10 mg/L by forming calcium phosphate. These results indicate that the cement paste generally has advantageous characteristics as an economical and viable substitute for lime to remove fluoride.

• Journal of Korean Society of Environmental Engineers
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• v.35 no.4
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• pp.257-262
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• 2013

The fluorine-containing waste water tends to show a higher removal efficiency through the coagulative precipitation process with calcium. However the tetrafluoroborate produced from the etching process is difficult to remaval due to it's low reactivity with calcium. The objective of this study is improving the efficiency of fluoride ion removal in tetrafluoroborate through decomposing. Research on tetrafluoroborate decomposition depending on reaction pH, temperature, and aluminum dosage were conducted, using a laboratory-scale reactor. The result shows that the reaction of tetrafluoroborate with aluminum is faster with lower pH, higher water temperature, and higher Al/T-F (Aluminum/Total Fluoride) mole ratio. It is found that there was no big change in concentration after over 120 minutes of reaction. This study is to be able to improve the efficiency of tetrafluoroborate and fluoride wastewater treatment by using aluminum.