• Journal of Mechanical Science and Technology
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• v.19 no.8
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• pp.1544-1553
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• 2005

In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating behavior predicted. The calculated value of the tip deflection was 15 ${\mu}m$ at 5 V. The fabrication process from SIMOX (Separation by oxygen ion implantation) wafer is presented in detail with the PZT film deposition process. The PZT films are characterized by investigating the ferroelectric properties, dielectric constant, and dielectric loss. Tip deflections of 12 ${\mu}m$ at 5 V are measured, which agreed well with the predicted value. The 18 ${\mu}l/s$ leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed.

• Biomaterials and Biomechanics in Bioengineering
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• v.2 no.2
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• pp.71-84
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• 2015

A low-profile flow sensor has been designed, fabricated, and characterized to demonstrate the feasibility for monitoring hemodynamics in cerebral aneurysm. The prototype device is composed of three micro-membranes ($500-{\mu}m$-thick polyurethane film with $6-{\mu}m$-thick layers of nitinol above and below). A novel super-hydrophilic surface treatment offers excellent hemocompatibility for the thin nitinol electrode. A computational study of the deformable mechanics optimizes the design of the flow sensor and the analysis of computational fluid dynamics estimates the flow and pressure profiles within the simulated aneurysm sac. Experimental studies demonstrate the feasibility of the device to monitor intra-aneurysmal hemodynamics in a blood vessel. The mechanical compression test shows the linear relationship between the applied force and the measured capacitance change. Analytical calculation of the resonant frequency shift due to the compression force agrees well with the experimental results. The results have the potential to address important unmet needs in wireless monitoring of intra-aneurysm hemodynamic quiescence.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.1051-1054
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• 2000

We developed the micro CSF (celebrospinal fluid) shunt valve with surface and bulk micromachining technology in polymer MEMS. This micro CSF shunt valve was formed with four micro check valves to have a membrane connected to the anchor with the four bridges. The up-down movement of the membrane made the CSF on & off and the valve characteristic such as open pressure was controlled by the thickness and shape of the bridge and the membrane. The membrane, anchor and bridge layer were made of the $O_2$ RIE (reactive ion etching) patterned Parylene thin film to be about 5~10 microns in thickness on the silicon wafer. The dimension of the rectangular nozzle is 0.2＊0.2 $\textrm{mm}^2$ and the membrane 0.45 mm in diameter. The bridge width is designed variously from 0.04 mm to 0.12 mm to control the valve characteristics. To protect the membrane and bridge in the CSF flow, we developed the packaging system for the CSF micro shunt valve with the deep RIE of the silicon wafer. Using this package, we can control the gap size between the membrane and the nozzle, and protect the bridge not to be broken in the flow. The total dimension of the assembled system is 2.5＊2.5 $\textrm{mm}^2$ in square, 0.8 mm in height. We could precisely control the burst pressure and low rate of the valve varing the design parameters, and develop the whole CSF shunt system using this polymer MEMS fabricated CSF shunt valve.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.840-846
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• 2007

This paper investigates the dynamic behavior of a HDD spindle system due to the imperfect roundness of a rotating shaft. The shaft of a spindle motor rotates with eccentricity by the unbalanced mass of the rotating part. The eccentricity generates the run-out of a spindle motor which results in the eccentric motion of a rotating part. Roundness of a shaft affects this motion which limits the memory capacity of a HDD. This research proposes a modified Reynolds equation for the coupled journal and thrust FDBs to include the variable film thickness due to the roundness. Finite element method is used to solve the Reynolds equation for the pressure distribution. Reaction forces and friction torque are obtained by integrating the pressure and shear stress, respectively. The dynamic behavior is determined by solving the equations of a motion of a HDD spindle system in six degrees of freedom with the Runge-Kutta method to characterize the motion of a rotating part. This research shows that the roundness of a rotating shaft causes the excitation frequency with integer multiple of a rotating frequency.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.05a
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• pp.137-142
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• 2002

The fluid mechanics and operating conditions of gas-lubricated proceeding bearings in micro rotating machinery such as micro polarization modulator and micro gas turbine are different from their larger size ones. Due to non-continuum effects, there is a slip of gas at the walls. Thus in this paper, the slip flow effect is considered to estimate the pressure distribution and load-carrying capacity of micro gas-lubricated proceeding bearings as the local Knudsen number at the minimum film thickness is greater than 0.01. Based on the compressible Reynolds equation with slip flow, the static characteristics of micro gas-lubricated proceeding bearings are obtained. Numerical predictions compare the pressure distribution and load capacity considering slip flow with the performance of micro proceeding bearings without slip f]ow for a range of bearing numbers and eccentricities. The results clearly show that the slip flow effect on the static characteristics is considerable and becomes more significant as temperature increases.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.99-107
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• 2004

Lubrication characteristics between a cylinder block and a valve plate for high speed bent-axis type hydraulic pump play an important role in volumetric efficiency and durability of pump. In this paper, a finite element method is presented for the computation of the pressure distribution between a cylinder block and a valve plate for high speed bent-axis type hydraulic pump. Also, a Runge-Kutta method is applied to simulate the cylinder block dynamics of three-degrees of freedom motion. From the results of computation, we can draw two major conclusions. One is related to the fluid film characteristics between a cylinder block and a valve plate and the other is related to the average leakage that is determined by the pressure gradient and the clearance near the discharge port. The numerical results of cylinder block dynamics were compared with the experimental results using eddy-current type gap sensors those are fixed at a pump housing.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.1
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• pp.96-100
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• 2011

The hydrostatic bearings have a relatively small run-out comparing to its shape error by fluid film effect in hydrostatic state as like pneumatic bearing and have a high stiffness, load capacity and damping characteristics. As there is no maintenance and semipermanent in these bearing type, it has been usually adopted as main spindle bearing for grinding machine. In this thesis, to develop hydrostatic bearing for high speed spindle, the cooler setting temperature, bearing clearance and nozzle pressure of belt-driven hydrostatic bearing are investigated. The bearing temperature is decreased, as the cooler setting temperature is lower, nozzle pressure is higher and bearing clearance is wider. The front temperature of bearing is nearly $8^{\circ}C$ higher than the rear one up to 13,000 rpm of spindle revolution. The thermal deflection of X-axis is ${\pm}16\;{\mu}m$ in range of 12,000 rpm-13,000 rpm. Therefore, it is conformed that the built-in motor hydrostatic bearing can be used to high speed spindle.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.67 no.4
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• pp.214-220
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• 2018

Light sources induced by gas discharge using rare gases have been widely used in the thin film deposition, the surface modification and the polymer etching. A dielectric barrier discharge (DBD) has been developed in order to consistently emit light and control the wavelength of the emission light. However, much research on the characteristics of the movement of discharge particles is required to improve the efficiency of the light lamp and the life-time of the light apparatus in detail. In this paper, we developed a He DBD discharge simulation tool and investigated the characteristics of discharge particles which were electrons, two positive ions ($He^+$, $He_2^+$) and 5 excited particles ($He^*(1S)$, $He^*(3S)$, $He^*$, $He^{**}$, $He^{***}$). The discharge currents showed the transition from pulse mode to continuous mode with the increase of power. With the accumulated charges on the barrier walls, the discharge current was rapidly increased and caused oscillation of the discharge voltage. As the gas pressure increased, $He_2^+$ and $He^*(3S)$ became the dominant activated particles. The input power was mostly consumed by electrons and $He_2^+$ ion. And the change curve showed that power consumption by electrons increased more with gas pressure than with source voltage or frequency.

• Journal of the Korean Society of Visualization
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• v.8 no.3
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• pp.22-28
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• 2010

In the present study, we performed the velocity field measurement in a microchannel using a focal length variable micro liquid lens. The liquid lens is used as a beam expander in a micro-PIV system to acquire the scatter image of the seeded particle. A thin film-type micro liquid lens was made of PDMS material and it was attached on top of the 700-micron-wide working fluid supply channel trench. As a result, the focal length and contact angle of the liquid lens changed with variations in applied pressure.

• Tribology and Lubricants
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• v.16 no.2
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• pp.106-113
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• 2000

Effects of surface roughness on bearing performances are investigated numerically in this study, especially for the parallel thrust bearing. Although mating surfaces are parallel and separated by thin fluid film, the pressure distribution is formed due to asperities. Model surface is generated numerically with given autocorrelation function and some surface profile parameters. Then the average Reynolds equation is applied to predict the effects of surface roughness between hydrodynamic and mixed lubrication regimes. In this equation, flow factors are defined as correction terms to smooth out high frequency surface roughness. The correlation length is proposed to get the minimum load for the parallel thrust bearing for various sliding conditions.