• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.68-68
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• 2011

As feature size is smaller, new technology are needed in semiconductor factory such as gap-fill technology for sub 100nm, development of ALD equipment for Cu barrier/seed, oxide trench etcher technology for 25 nm and beyond, development of high throughput Cu CMP equipment for 30nm and development of poly etcher for 25 nm and so on. We are focus on gap-fill technology for sub-30nm. There are many problems, which are leaning, over-hang, void, micro-pore, delaminate, thickness limitation, squeeze-in, squeeze-out and thinning phenomenon in sub-30 nm gap fill. New gap-fill processes, which are viscous oxide-SOD (spin on dielectric), O3-TEOS, NF3 Based HDP and Flowable oxide have been attempting to overcome these problems. Some groups investigated SOD process. Because gap-fill performance of SOD is best and process parameter is simple. Nevertheless these advantages, SOD processes have some problems. First, material cost is high. Second, density of SOD is too low. Therefore annealing and curing process certainly necessary to get hard density film. On the other hand, film density by Flowable oxide process is higher than film density by SOD process. Therefore, we are focus on Flowable oxide. In this work, dielectric film were deposited by PECVD with TSA(Trisilylamine - N(SiH3)3) and NH3. To get flow-ability, the effect of plasma treatment was investigated as function of O2 plasma power. QMS (quadruple mass spectrometry) and FTIR was used to analysis mechanism. Gap-filling performance and flow ability was confirmed by various patterns.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.249-249
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• 2012

최근 주목받고 있는 Flexible Organic Light Emitting Diode (OLED) display에서는 Flexible 특성이 요구된다. 이는 현재 쓰이는 유리기판 대신 플라스틱기판으로 만들어야 가능하다. 하지만 플라스틱기판은 구성물질로 유기물을 사용하므로 수분과 산소의 투과에 매우 취약하다. 이는 장시간 사용 시 기판 위에 제작된 소자성능저하를 야기하는 등의 소자 신뢰도에 치명적 결함을 갖게 하는 원인이 된다. 따라서 기판 위의 소자를 보호할 수 있는 봉지기술 개발이 필요한데 가장 잘 알려진 플라스틱 기판에 적합한 Barrier기술로 유기물과 무기물을 교대로 적층하는 기술[1] 등이 있다. 본 연구에서는 PE-CVD 공정기술을 이용한 Flowable Oxide 박막과 ALD 공정기술을 이용한 Al2O3 무기물 박막을 적층하여 봉지박막을 구성하려 한다. Flowable Oxide는 저온공정이 가능하며 높은 증착속도와 뛰어난 Gap fill 특성을 가지고 있는데 이는 플라스틱기판의 엉성한 분자구조를 치밀하게 만들 것으로 예상되며 표면의 Pin-hole 또한 쉽게 채우는 특성이 있다. 실험은 Polyethylene Naphthalate (PEN) film 위에 PE-CVD 공정을 이용하여 Flowable Oxide를 증착하고, 그 후에 ALD 공정을 이용하여 Al2O3을 적층한 것을 하나의 샘플로 하였다. 샘플의 분석은 Ca test를 이용한 Water Vapor Transmission rate(WVTR)과 FT-IR, FE-SEM을 이용하여 분석하였다. FT-IR로 박막의 구성요소를 확인 하고 FE-SEM으로 박막의 Cross section image를 얻을 수 있었으며 또한 $4.85{\times}10^{-5}g/m^2$ day의 초기 WVTR 값을 얻을 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.431-431
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• 2013

Flexible Organic Light Emitting Diode (OLED) displays are required for future devices. It is possible that plastic substrates are instead of glass substrates. But the plastic substrates are permeable to moisture and oxygen. This weak point can cause the degradation of fabricated flexible devices; therefore, encapsulation process for flexible substrate is needed to protect organic devices from moisture and oxygen. Y.G. Lee et al.(2009) [1] reported organic and inorganic multilayer structure as an encapsulation barrier for enhanced reliability and life-time.Flowable Oxide process is a low-temperature process which shows the excellent gap-fill characteristics and high deposition rate. Besides, planarization is expected by covering dust smoothly on the substrate surface. So, in this research, Bi-layer structured is used for encapsulation: Flowable Oxide Thin film by PECVD process and Al2O3 thin film by ALD process. The samples were analyzed by water vapor transmission rate (WVTR) using the Calcium test and film cross section images were obtained by FE-SEM.

• JSTS:Journal of Semiconductor Technology and Science
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• v.4 no.1
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• pp.45-51
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• 2004

We have proposed a new shallow trench isolation (STI) process using flowable oxide (F-oxide) chemical vapor deposition (CVD) for DRAM application and it was successfully developed. The combination of F-oxide CVD and HDP CVD is thought to be the superior STI gap-filling process for next generation DRAM fabrication because F-oxide not only improves STI gap-filling capability, but also the reduced local stress by F-oxide in narrow trenches leads to decrease in junction leakage and gate induced drain leakage (GIDL) current. Finally, this process increased data retention time of DRAM compared to HDP STI. However, a serious failure occurred by symphonizing its structural dependency of deposited thickness with poor resistance against HF chemicals. It could be suppressed by reducing the flow time during F-oxide deposition. It was investigated collectively in terms of device yield. In conclusion, the combination of F-oxide and HDP oxide is the very promising technology for STI gap filling process of sub-100nm DRAM technology.

• The Journal of Advanced Prosthodontics
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• v.6 no.6
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• pp.434-443
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• 2014

PURPOSE. The purpose of this study was to evaluate and compare the effects of different surface pretreatment techniques on the surface roughness and shear bond strength of a new self-adhering flowable composite resin for use with lithium disilicate-reinforced CAD/CAM ceramic material. MATERIALS AND METHODS. A total of one hundred thirty lithium disilicate CAD/CAM ceramic plates with dimensions of $6mm{\times}4mm$ and 3 mm thick were prepared. Specimens were then assigned into five groups (n=26) as follows: untreated control, coating with $30{\mu}m$ silica oxide particles ($Cojet^{TM}$ Sand), 9.6% hydrofluoric acid etching, Er:YAG laser irradiation, and grinding with a high-speed fine diamond bur. A self-adhering flowable composite resin (Vertise Flow) was applied onto the pre-treated ceramic plates using the Ultradent shear bond Teflon mold system. Surface roughness was measured by atomic force microscopy. Shear bond strength test were performed using a universal testing machine at a crosshead speed of 1 mm/min. Surface roughness data were analyzed by one-way ANOVA and the Tukey HSD tests. Shear bond strength test values were analyzed by Kruskal-Wallis and Mann-Whitney U tests at ${\alpha}=.05$. RESULTS. Hydrofluoric acid etching and grinding with high-speed fine diamond bur produced significantly higher surface roughness than the other pretreatment groups (P<.05). Hydrofluoric acid etching and silica coating yielded the highest shear bond strength values (P<.001). CONCLUSION. Self-adhering flowable composite resin used as repair composite resin exhibited very low bond strength irrespective of the surface pretreatments used.

• Restorative Dentistry and Endodontics
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• v.39 no.2
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• pp.109-114
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• 2014

Objectives: Recurrent caries was partly ascribed to lack of antibacterial properties in composite resin. Silver and zinc nanoparticles are considered to be broad-spectrum antibacterial agents. The aim of the present study was to evaluate the antibacterial properties of composite resins containing 1% silver and zinc-oxide nanoparticles on Streptococcus mutans and Lactobacillus. Materials and Methods: Ninety discoid tablets containing 0%, 1% nano-silver and 1% nano zinc-oxide particles were prepared from flowable composite resin (n = 30). The antibacterial properties of composite resin discs were evaluated by direct contact test. Diluted solutions of Streptococcus mutans (PTCC 1683) and Lactobacillus (PTCC 1643) were prepared. 0.01 mL of each bacterial species was separately placed on the discs. The discs were transferred to liquid culture media and were incubated at $37^{\circ}C$ for 8 hr. 0.01 mL of each solution was cultured on blood agar and the colonies were counted. Data was analyzed with Kruskall-Wallis and Mann-Whitney U tests. Results: Composites containing nano zinc-oxide particles or silver nanoparticles exhibited higher antibacterial activity against Streptococcus mutans and Lactobacillus compared to the control group (p < 0.05). The effect of zinc-oxide on Streptococcus mutans was significantly higher than that of silver (p < 0.05). There were no significant differences in the antibacterial activity against Lactobacillus between composites containing silver nanoparticles and those containing zinc-oxide nanoparticles. Conclusions: Composite resins containing silver or zinc-oxide nanoparticles exhibited antibacterial activity against Streptococcus mutans and Lactobacillus.

• Clean Technology
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• v.24 no.4
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• pp.315-322
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• 2018

Industrial use of waste oyster shells is limited because of requiring excessive energy for converting natural oyster shells in the form of calcium carbonate ($CaCO_3$) into calcium oxide (CaO) for this purpose. This study aimed to develop energy-saving process for producing solidifying agent using waste oyster shells for backfill materials. It was suggested that oyster shells were converted to calcium sulfates which were mixed with sodium hydroxide solution and red clay, forming solid specimen. The optimal concentrations of sulfuric acid for sulfation of oyster shell and sodium hydroxide to generate calcium hydroxide ($Ca(OH)_2$), were determined. Unconfined compressive strength of solid specimen increased with increasing the content of solidifying agent while it increased also with increasing ratio of natural oyster shells to coal ash. The result clearly demonstrates that solidifying agent consisting of sulfuric acid-treated oyster shell, coal ash, and sodium hydroxide solution, can be effectively utilized for preparing backfill materials using natural oyster shell and coal ash. Sulfuric acid-treated oyster shell-based solidifying agent has not been previously developed and will contribute to broaden industrial application of waste oyster shells.

• Restorative Dentistry and Endodontics
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• v.32 no.6
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• pp.542-549
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• 2007

The purpose of this study was to evaluate the difference in the surface roughness after polishing and to evaluate the difference in color stability after immersion in a dye solution among four types of composite resin materials. Four light-polymerized composite resins(Shade A2) with different sized filler content(a nanofilled, a hybrid, a microfilled, a flowble) were used. Average surface roughness (Ra) was measured with a surface roughness tester (Surftest Formtracer) before and after polishing with aluminum oxide abrasive discs(Super-Snap). Color of specimens before and after staining with 2% methylene blue solution were measured using spectrophotometer(CM-3700d) with SCI geometries. The results of Ra and ${\Delta}E$ were analyzed by one-way analysis of variance(ANOVA), a Scheffe multiple comparison test and Student t-test(p=0.05). After polishing, Ra values were decreased regardless of type of composite resins. In surface roughness after polishing and color stability after staining, nanofilled composite resin was not different with other composite resins except flowable resins.

• The Journal of Korean Academy of Prosthodontics
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• v.60 no.3
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• pp.231-238
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• 2022

Purpose. This study aimed to investigate the effect of different veneering methods on the tensile bond strength between polyetherketoneketone (PEKK) and denture base resins. Materials and methods. A total of 80 PEKK T-shaped specimens were fabricated and the primer (Visio.link) was applied after airborne-particle abrasion with 110 ㎛ alumina oxide powder. According to the veneering method, the specimens were divided into four groups (n = 20) to be veneered with the gingival colored packable photopolymerized composite resin (SR Adoro); flowable photopolymerized composite resin, (Crea.lign); heat-polymerized resin (Vertex); and self-polymerized resin (ProBase Cold). Each group was divided into two subgroups (n = 10) according to the artificial thermal aging. After the tensile bond strength measurement via universal testing machine, the fracture sections of all specimens were observed. Two-way ANOVA and Tukey's HSD post hoc test were used for the statistical analysis (α = .05). Results. The results of the two-way ANOVA showed statistically significant differences in the tensile bond strength according to the veneering method and artificial thermal aging of denture base resins (P<.001). The highest tensile bond strength showed in the packable photopolymerized resin group before and after the artificial thermal aging. The lowest tensile bond strength showed in the heat-polymerized resin group. The mixed and adhesive fracture showed in all groups. Conclusion. The veneering method and artificial thermal aging can influence in the tensile bond strength between the resin and PEKK. The artificial thermal aging can reduce the tensile bond strength.