• Tribology and Lubricants
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• v.32 no.2
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• pp.50-55
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• 2016

Recently, a double-side machining process has been adopted in fabricating a sapphire glass to enhance the manufacturability. Double-side lap grinding (DLG) is one of the emerging processes that can reduce process steps in the fabrication of sapphire glasses. The DLG process uses two-body abrasion with fixed abrasives including pallet. This process is designed to have a low pressure and high rotational speed in order to obtain the required material removal rate. Thus, the temperature is distributed on the DLG platen during the process. This distribution affects the shape of the substrate after the DLG process. The coolant that is supplied into the cooling channel carved in the base platen can help to control the temperature distribution of the DLG platen. This paper presents the results of computational fluid dynamics with regard to the heat transfer in a DLG platen, which can be used for fabricating a sapphire glass. The simulation conditions were 200 rpm of rotational speed, 50℃ of frictional temperature on the pallet, and 20℃ of coolant temperature. The five cases of the coolant flow rate (20~36 l/min) were simulated with a tetrahedral mesh and prism mesh. The simulation results show that the capacity of the generated cooling system can be used for newly developed DLG machines. Moreover, the simulation results may provide a process parameter influencing the uniformity of the sapphire glass in the DLG process.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.225-225
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• 2013

Nanostructured noble metals have been attractive for their unusual optical properties and are widely utilized for various purposes. The optical properties mainly originating from collective electron oscillation can assist direct energy conversion via surface plasmon resonances. Here, we investigated the effect of surface plasmons of silver nanowires on the generation of hot electrons. It is reported that the surface plasmons of silver nanowires exhibit longitudinal and transverse modes, depending on the aspect ratio of the nanowires. In order to measure the hot electron flow through the metallic nanowires, chemically modified Au/TiO2 Schottky diodes were employed as the electric contact. The silver nanowires were deposited on a Au metal layer via the spray method to control uniformity and the amount of silver nanowire deposited. We measured the hot electron flow generated by photon absorption on the silver nanowires deposited on the Au/TiO2 Schottky diodes. The incident photon-to-current efficiency was measured a function of the photon energy, revealing two polarization modes of siliver nanowires: transverse and longitudinal modes. UV-Vis spectra exhibited two polarization modes, which are also consistent with the photocurrent measurements. Good correlation between the IPCE and UV-vis measurements suggests that hot electron measurement on nanowires on nanodiodes is a useful way to reveal the intrinsic properties of surface plasmons of nanowires.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.1
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• pp.150-158
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• 2002

Local heat/mass transfer and friction loss in a square duct roughened with various types of continuous and discrete rib turbulators are investigated. The combined effects of the gap flows of the discrete ribs and the secondary flows are examined for the purpose of the reduction of thermally weak regions and the promotion of the uniformity of heat/mass transfer distributions as well as the ;augmentation of average heat/mass transfer. The rib-to-rib pitch to the rib height ratio (p/e) of 8 and the rib angles of 90° and 60° are selected with e/D$\_$h/=0.08. The vortical structure of the secondary flows induced by the parallel angled arrays are quite distinct from that induced by the cross angled arrays. This distinction influences on heat/mass transfer and friction loss in all the tested cases. The gap flows of the discrete ribs reduce the strength of the secondary flows but promote local turbulence and flow mixing. Consequently, the angled discrete ribs with the small gaps provide a more uniform heat/mass transfer distribution sustaining high average heat/mass transfer.

• Journal of Korean Society on Water Environment
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• v.31 no.3
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• pp.295-303
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• 2015

In Korea, Total Maximum Daily Loads(TMDLs) has been enforced to restore and manage water quality in the watersheds. However, some assesment of implementation plan of TMDLs showed that the achievement of the target water quality is not related to the proper allocation loads because difference of flow duration interval. In the United States, the discharge loads are determined by water quality modeling considering standard flow conditions according to purpose. Therefore, this study tried to develop the allocation method considering economical efficiency using water quality model. For this purpose, several allocation methods being used in the management of TMDLs is investigated and develope an allocation criteria considering regional equality and uniformity. Since WARMF(Watershed Analysis Risk Management Framework) model can simulate the time varying behavior of a system and the various water quality variables, it was selected for a decision support system in this study. This model showed fairly good performance by adequately simulating observed discharge and water quality in Miho watershed. Furthermore, the scenario simulation results showed that the effect of annual average water quality improvement to remove 1kg BOD is more than 25 times, even if point pollutants treatment facility is six times more expensive to operate than non-point pollutants treatment facility.

• Journal of the Korean Ceramic Society
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• v.48 no.3
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• pp.236-240
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• 2011

In order to deposit a homogeneous and uniform ${\beta}$-SiC films by chemical vapor deposition, we demonstrated the phase stability of ${\beta}$-SiC over graphite and silicon via computational thermodynamic calculation considering pressure, temperature and gas composition as variables. The ${\beta}$-SiC predominant region over other solid phases like carbon and silicon was changed gradually and consistently with temperature and pressure. Practically these maps provide necessary conditions for homogeneous ${\beta}$-SiC deposition of single phase. With the thermodynamic analyses, the CVD apparatus for uniform coating was modeled and simulated with computational fluid dynamics to obtain temperature and flow distribution in the CVD chamber. It gave an inspiration for the uniform temperature distribution and low local flow velocity over the deposition chamber. These calculation and model simulation could provide milestones for improving the thickness uniformity and phase homogeneity.

• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.79-84
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• 2013

Nanoimprint lithography (NIL) is the next generation photolithography process in which the photoresist is dispensed onto the substrate in its liquid form and then imprinted and cured into a desired pattern instead of using traditional optical system. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper, with the rolling type imprinting process, a mold, placed upon the $2^{nd}$ generation TFT-LCD glass sized substrate($370{\times}470mm^2$), is rolled by a rubber roller to achieve a uniform residual layer. The prediction of residual layer thickness of the photoresist by rolling of the rubber roller is crucial to design the rolling type imprinting process, determine the rubber roller operation conditions-mpressing force & feeding speed, operate smoothly the following etching process, and so forth. First, using the elasticity theory of contact problem and the empirical equation of rubber hardness, the contact length between rubber roller and mold is calculated with consideration of the shape and hardness of rubber roller and the pressing force to rubber roller. Next, using the squeeze flow theory to photoresist flow, the residual layer thickness of the photoresist is calculated with information of the viscosity and initial layer thickness of photoresist, the shape of mold pattern, feeding speed of rubber roller, and the contact length between rubber roller and mold previously calculated. Last, the effects of rubber roller operation conditions, impressing force & feeding speed, on the residual layer thickness are analyzed with consideration of the shape and hardness of rubber roller.

• Journal of Korea Foundry Society
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• v.11 no.4
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• pp.303-313
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• 1991

The Purification mechanism of high purity aluminum was studied through the variation of stirring speed and coolant flow rate in the stirring method. In the stirring method the degree of purification was changed as the following factors;the variation of diffusion boundary layer thickness the variation of growth rate and the solute concentration of the residual melt. The concentration of Fe and Si was decreased as the stirring speed and the radial distance increased. In a high stirring speed of 2000rpm with unidirectional stirring mode, the uniformity of solutes was obtained. On the other hand, the purification of Si was done by the combinations of stirring method, fractional melting and acid leaching. In the case of Si purification, the centrifugal force developed in the melt acted as the significant purification factor. It was possible to obtain the purified 3N grade Si crystal after the complete elimination of residual aluminum by fractional melting and acid leaching.

• Korean Chemical Engineering Research
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• v.49 no.3
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• pp.314-319
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• 2011

In this study, the flow behavior of Newtonian and non-Newtonian coating liquids inside slot die has been scrutinized for the purpose of optimal internal die design in slot coating system from three-dimensional computations by CFD Fluent solver. A hybrid slot die could be optimally designed by changing the chamber or manifold structure to guarantee the uniform velocity distribution of coating liquids at die exit. Especially, for the non-Newtonian coating liquids, the length of coat-hanger for the uniform coating has been properly chosen, according to the degree of their shearthinning properties.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.3
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• pp.388-397
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• 1999

Numerical simulations are carried out for the magnetic Czochralski single crystal growth system. It Is shown that a magnetic field significantly suppresses the convective flow and as the strength of magnetic field becomes to be stronger, the heat transfer in the melt is dominated by conduction rather than convection. By imposing a cusp magnetic field, the growth interface shape becomes convex toward the melt. When the axial magnetic field is imposed, there occurs an inversion of the interface shape with increase of the magnetic field strength. The oxygen concentration near the interface decreases with increasing cusp magnetic field strength while axial field causes an increase of an oxygen concentration at the central region and decrease of that at the edge of the crystal. The results show that the cusp magnetic field has advantages over an axial magnetic field In the radial uniformity of oxygen as well as in the additional degree of control.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.4
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• pp.555-562
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• 1998

Under the influence of non-uniform magnetic field, melt flow in steady state and oxygen concentration in unsteady state are numerically investigated. The strength of the applied characteristic magnetic fields are B=0.1T, 0.2T, and 0.3T, respectively. The buoyancy effects due to the crucible wall heating and the thermocapillary effects due to the surface tention at the free surface are suppressed differentially by the non-uniform magnetic fields. As the intensity of characteristic magnetic fields is increasing, the recirculation region in the meridional plane is moving toward the growing crystal, and is diminishing. The oxygen concentration on the growing surface of crystals is decreasing and the uniformity of the oxygen concentration is increasing as the intensity of the magnetic fields is increasing.