1 |
Kim, H., Manivannan, R., Moon, D., Xiong, H., Park, J., “Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates”, Wear, Vol. 302, pp. 1340-1344, 2013.
DOI
|
2 |
Yang, W. Y., Sung, I. H., “Study on Within-Wafer Non-uniformity Using Finite Element Method”, J. Korean Soc. Tribol. Lubr. Eng., Vol. 28, No. 1, pp. 7-11, 2012.
DOI
|
3 |
Lee, T. K., Kim, H. J., Jo, H. H., Ryu, H. Y., Jeong, H. D., “Study on the Effect of a Platen Flatness on the Shape of a Wafer in Mechanical Lapping of Sapphire”, Proc. Autumn Conference of KSPE, pp. 113-114, 2010.
|
4 |
Deshpande, L. S., Raman, S., Sunanta, O., Agbaraji, C., “Observations in the flat lapping of stainless steel and bronze,” Wear, No. 265, pp. 105-116, 2008.
|
5 |
Molenda, J., Barylski, A., “The influence of abrasive machine on temperature during one side lapping,” J. KONES Power and Trans., Vol. 17, No. 2, pp. 357-362, 2001.
|
6 |
Kim, D. K., Kim, J. Y., Lee, H. S., Lee. S. J., “Characteristics of heat transfer by coolant channel in DLG process,” Proc. 61th Autumn Conference of the KSTLE, pp. 91-92, 2015.
|
7 |
ANSYS Fluent User’s Guide, ANSYS, Inc., November, 2013.
|
8 |
Sobieski, W., “Examples of Using the Finite Volume Method for Modeling Fluid-Solid Systems,” Techn. Sc., No. 13, pp. 256-265, 2010.
|