• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.6
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• pp.512-518
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• 2006

In this paper, we investigated the deposition of pentacene thin film on a large area substrate by Organic Vapor Phase Deposition(OVPD) and applied it to fabrication of Organic Thin Film Transistor(OTFT). We extracted the optimum deposition conditions such as evaporation temperature of $260^{\circ}C$, carrier gas flow rate of 10 sccm and chamber vacuum pressure of 0.1 torr. We fabricated 72 OTFTs on the 4 inch size Si Wafer, Which produced the average mobility of $0.1{\pm}0.021cm^2/V{\cdot}s$, average subthreshold slope of 1.04 dec/V, average threshold voltage of -6.55 V, and off-state current is $0.973pA/{\mu}m$. The overall performance of pentacene TFTs over 4 ' wafer exhibited the uniformity with the variation less than 20 %. This proves that OVPD is a suitable methode for the deposition of organic thin film over a large area substrate.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2011.05a
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• pp.155-155
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• 2011

Dual coil을 사용하는 상용 AMAT DPS II 300 mm Centura 장비의 antenna의 전류비를 조절하여 $SiO_2$의 식각 균일도를 평가하였다. Inner turn과 outer turn의 흐르는 전류비를 분배 capacitor로 조절하여 16.9 %의 이온 전류 밀도 분포를 확인하였고, 투입 전력에 따라 200 W에서 12 %, 800 W에서 9 %로 점차 감소하는 경향을 확인하였다. 이때 300 mm wafer의 반지름 방향으로의 식각 균일도는 3 %로 측정되었고, FRC (flow ratio control)는 0.5에서 가장 균일한 결과를 얻었다.

• Journal of Pharmaceutical Investigation
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• v.13 no.2
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• pp.59-65
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• 1983

A convenient high performance liquid chromatographic method for the quantitative determination and content uniformity of prednisolone in tablets is described. The prednisolone was chromatographed using a ${\mu}-Bondapak\;C_{18}$ column and the eluent 70% MeOH at a flow rate 1. 0ml/min. Diethylstilbestrol was used as an internal standard. The UV detector response at 254nm was linear over a range of $10{\sim}60{\mu}g/ml$ under conditions of the analysis. Reproducibility studies gave relative standard deviations of $0.3{\sim}0.5%$.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.5
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• pp.32-37
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• 2004

Polishing processes are widely used in the glass, optical, die and semiconductor industries. Chemical Mechanical Polishing (CMP) especially is becoming one of the most important ULSI processes for the 0.25m generation and beyond. CMP is conventionally carried out using abrasive slurry and a polishing pad. But the surface of the pad has irregular pores, so there is non-uniformity of slurry flow and of contact area between wafer and the pad, and glazing occurs on the surface of the pad. This paper introduces the basic concept and fabrication technique of the next generation CMP pad using micro-molding method to obtain uniform protrusions and pores on the pad surface.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.4
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• pp.1202-1215
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• 1996

In this study, in order to achieve the uniformity of mechanical properties and microstructures of a hot-rolled coil in the transversal direction, the edge mask device is newly device is newly developed and installed at the upper laminar-flow cooling head in the run out table, which controls the transversal temperature of strip with enco panel and bar edge heater. The device that is transversally movable prevents the temperature drop of strip edge by blocking the cooling water into the strip edge. So, the pattern of edge mask set-up condition of the device was derived by analyzing the characteristics of strip temperature and mechanical properties according to the on-line application of edge mask.

• 한국신재생에너지학회:학술대회논문집
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• 2006.06a
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• pp.103-106
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• 2006

The Plate reformer consisting of combustion chamber and reforming chamber for 25 kW MCFC stack has been operated and computational fluid dynamics was applied to estimate reactions and thermal fluid behavior in the reformer. The methane air 2-stage reaction was assumed in the combustion chamber, and three step steam reforming reactions were included in the calculation. Flow uniformity, reaction rate and species distribution, and temperature distribution were analyzed. In particular, temperature distribution was compared with the measurements to show good agreement in the combustion chamber, however, inappropriate agreement in the reformer chamber

• Geomechanics and Engineering
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• v.17 no.4
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• pp.405-411
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• 2019

A significant influence of the particle size distribution on the resilient behaviour of granular aggregates was usually observed in laboratory tests. However, the mechanisms underlying this phenomenon were rarely reached. In this study, a mechanistic model considering particle breakage is proposed. It is found to be the combined effects of the coefficient of uniformity and the size range between maximum and minimum particle sizes that influences the resilient modulus of granular aggregates. The resilient modulus is found to undergo reduction with evolution of particle breakage by shifting the initial particle size distribution to a broader one.

• Applied Chemistry for Engineering
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• v.32 no.6
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• pp.613-620
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• 2021

A flow channel shape of PEMFC has an influence on the internal flow uniformity. If the reactant distribution in a flow path is not uniform during operation, both catalyst deactivation and mechanical damage of membrane could occur resulting in decreasing the membrane electrode assembly (MEA) durability. Numerous studies concerning flow design have been conducted to make smooth supply and uniform distribution of reactants in fuel cells. The baffle of flow path could improve fuel cell performance through the forced convection effect. A sub-channel, as an additional air flow path, could increase the reactant concentration and reduce the mass transfer loss via a smooth water discharge. In this study, computational fluid dynamics (CFD) was used to analyze the effect of blocks and sub-channels on the current density and oxygen concentration of the fuel cell. As a result, the limit current density and oxygen concentration at a rear block increased when using blocks and sub-channels in a flow channel. In particular, the current density increased significantly when the sub-channel was placed between two blocks. Also, the sub-channel position was optimized by analyzing the oxygen concentration, and the oxygen concentration was recovered at a rear block in the fuel cell.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.12
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• pp.8116-8127
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• 2015

This study provides results from the experiment on the rainfall distribution using a large Experimental rainfall simulator with fixed nozzle arrangement. Results from the experiment on the nozzles which are crucial for rainfall simulation show standard errors expressed as percentage are 0.15~0.38% at the indoor flow testing apparatus and 0.37~0.59% at the KICT-ERS. To examine spraying range of the nozzles, radial and triangular rainfall measurement test are done. In the radial test, coefficient of uniformity (CU) lies in 0.348~0.657 in the single nozzle spraying case, while it increases up to 0.854~0.895 in the seven nozzle spraying case. This means increase of both rain rate and uniformity by means of superimposition of spraying. The CU of the triangular test falls to 0.845~0.896. The results from the experiment on the whole-scale of the KICT-ERS show that CU exceeds 0.7 for every case except the one experimental condition where a $1.5{\phi}$ nozzle is used. The CU tends to increase with increasing rainfall intensity. Comparison with the previous studies shows that KICT-ERS provides rainfall distribution above average CU.

• Elastomers and Composites
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• v.48 no.4
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• pp.282-287
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• 2013

Slot coating has been widely spread in photo resist coating on glass for flat display monitor. High quality of coating is required as high quality of image in display is needed. Coating quality in the slot coating is divided into nozzle direction quality and machine direction quality. Nozzle direction quality is related to flow uniformity inside the die whereas machine direction quality is related to die lip design and operational conditions. In this study coating uniformity in the machine direction of slot coating has been investigated through computer simulation. Die lip angle and die lip length were considered as outside die geometry and coating speed was considered as operational condition. Coating behavior has been analyzed and coating quality has been evaluated through computer simulation. Coating thickness decreased and coating uniformity increased as coating speed increased. However, the stability of meniscus formation was reduced and subsequently coating stability was reduced as coating speed increased. Coating thickness deviation decreased as die lip angle increased in down stream die. Coating thickness decreased and time to reaching steady state increased as increased die lip length in down stream die.