• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2010년 춘계학술대회논문집
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• pp.567-570
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• 2010

With continuously increasing flat panel display size, uniformity of thin film deposition has been drawing more attentions and associated fabrication methodologies are being actively investigated. Since the convective flow field of mixture gas plays a significant role for deposition characteristics of thin film in an APCVD system, it is greatly important to maintain uniform distribution and consistent concentration of mixture gas species. In this paper, computational study has been performed for the improvement of flow uniformity of mixture gas in an APCVD reactor during thin film deposition process. A diffuser slit has bee designed to spread the locally concentrated gas flow exiting from the flow distributor. A uniform flow distributor has been developed which has less dependency on operating conditions for global flow uniformity

• 대한기계학회논문집
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• 제18권10호
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• pp.2675-2685
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• 1994

A study has been conducted to provide the experimental information for the velocity and temperature profiles of steam-air mixutre and to investigate their roles on the film condensation with wavy interface. Saturated gas mixture of steam-air was made to flow through the nearly horizontal$(4.1^{\circ})$ square duct of 0.1m width and 1.56m length at atmospheric pressure, and was condensated on the bottom cold plate. The air mass fraction in the gas mixture was changed from zero(W =0, pure steam) to one(W =1, pure air), and the bulk velocity was varied from 2 to 4 m/s. Water film was injected concurrently to investigate the effect of wavy interface on the condensation. The velocity and temperature profiles were measured by LDA system and thermocouples along the three parameters ; air mass fraction, mixture velocity and film flow rate. The profiles moved toward the interface with increasing steam mass fraction, mixture velocity and film flow rate. The Prandtl and Schmidt numbers were near one in the present experimental range, however there was no complete similarity between the velocity and temperature profiles of gas mixture. And the heat transfer characteristics and interfacial structure were coupled with each other.

• 한국공작기계학회논문집
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• 제12권5호
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• pp.80-87
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• 2003

Air partial pressure ratio and inlet air mass flow are influenced by water vapor and gaseous fuel in mixture on Compressed Natural Gas (CNG) engines. In this paper, the effects of the water vapor and the gaseous fuel that change the air mass flow and the air-fuel ratio are studied. Effective air mass ratio is defined as the air mass flow divided by mixture mass flow, and also it is applied to the estimation of the inlet air mass flow and the air-fuel ratio. The presence of the gaseous fuel and the water vapor in the mixture reduces the air partial pressure and the effective air mass ratio of the CNG engines. The experimental results for the CNG engine show that estimation of the air-fuel ratio based upon the effective air mass ratio is more accurate than that of a normal mode.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2015년도 제51회 KOSCO SYMPOSIUM 초록집
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• pp.193-196
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• 2015

Combustion of low concentration VOC in inert gas around the flammability limit has been experimentally studied. Streams of nitrogen and propane mixture with various compositions and flow conditions were treated by a turbulent partially-premixed pilot flame. HC and CO contents in exhaust gas measured and the flow patterns were visualized. The results suggested that there exists an optimal mixture velocity range for efficient combustion treatment for each flow condition and composition of the mixture.

• 설비공학논문집
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• 제5권4호
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• pp.249-256
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• 1993

Numerical method is applied to predict the time variation behavior of flammable mixture formation in a two dimensional enclosure from the beginning of gas leak. Additionally experimental method is used to consider qualitative aspects. Characteristics of flammable mixture formation such as distribution of flow and fuel mass fraction at various locations in the enclosure are determined for the following parameters: the various locations of leak at the bottom and aspect ratio of the enclosure. In the case of gas leak with small leak velocity from the bottom of enclosure gravitational force affects the formation of flammable mixture. Aspect ratio of the enclosure also affects the formation of flammable mixture. The volume of the region of recirculating flow is dominant factor affecting the formation mixture.

• 한국기계가공학회지
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• 제8권3호
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• pp.13-20
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• 2009

Development of a dynamic engine model is essential to predict and analyze of dynamic characteristics from a natural gas engine. Reducing the harmful exhaust emissions can be accomplished by a precise air-fuel ratio control. In this paper, the dynamic engine model was proposed and included mixture formation and intake process because the dynamic characteristics can be affected by the mixture components such as an air and a gaseous fuel. The air mass flow, the partial pressure ratio, and the gas constant are changed by variations of the components in the mixture formation and intake process. The dynamic engine model is applied to the natural gas engine for validation test. Experimental results show that the dynamic engine model is effective to predict the dynamic characteristics of the natural gas engine.

• 한국자동차공학회논문집
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• 제9권5호
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• pp.131-139
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• 2001

Highly accurate control of the air-fuel ratio is important to reduce exhaust gas emissions of the gaseous-fuel engines. In order to achieve this purpose, inlet air mass flow must be measured exactly, and precise engine models are necessary to design engine control systems. In this paper, the effects of water vapor and gaseous fuel that change the air mass flow are studied. The effective air mass ratio is defined as the air mass flow divided by the mixture mass flow, and also it is applied to the estimation of the inlet air mass flow. The presence of the gaseous fuel and the water vapor in the mixture reduces the air partial pressure and the effective air mass ratio of the gaseous-fuel engines. The Experimental results for an LPG engine show that the estimation of the inlet ai mass flow based upon the effective air mass ratio is more accurate than that of the normal air mass flow.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3518-3523
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• 2007

An analysis program of specific impulse has been developed for a gas generator cycle rocket engine. The program has been verified by comparing the published performance data of the same cycle engine with RP-1 as fuel. A model for pressure drop of regenerative cooling and film cooling mass flow rate has been suggested to satisfy the necessary cooling condition with Jet-A1 as fuel. The engine mixture ratio is defined by the film cooling mass flow rate and the core mixture ratio. The optimal condition of the combustor pressure and engine mixture ratio has been found for maximum specific impulse.

• 한국전기전자재료학회논문지
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• 제13권2호
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• pp.114-119
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• 2000

Etch characteristics of SF6/CI2 electron cyclotron resonance (ECR) plasmas have been investigated. Surface reaction of gas plasma with polysilicon was also analysed using X-ray photoelectron spectroscopy (XPS). At the same time, the relationship between surface reaction and the etched profile of polysilicon was examined using XPS. The etch rate of polysilicon and oxide increases with increasing flow rate of SF6 in the SF6/CI2 gas mixture, and tis selectivity also increase also increase. It was also found that as increasing flow rate of SF6 in the SF6/CI2 gas mixture, the atomic% of chlorine detected at surface region decrease, but F and S contents increase. At the same time, when the mixing ratio of SF6 gas increases, the anisotropy of etched polysilicon is sharply decreased in the 0%~10% range of the SF6 mixing ratio, but is rarely varied in the range over 10%, in spite of the large variations in flow rates. It can be explained that the bonding of S-Si due to SiSx(x$\leq$2) compound formed on the etched surface suppress the formation of Si-Cl and 'or Si-F bonding in the silicon etching.

• 항공우주시스템공학회지
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• 제9권4호
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• pp.67-72
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• 2015

The analysis has been performed on the blockage effect at the propellant flow passage in a liquid rocket engine. This simulates an example of emergency situation where flow passage is partially blocked. The analysis method has been validated by predicting the pump head and flow rate within 1% precision against the measured data of turbopump-gas generator coupled test. When the oxidizer passage is reduced it is predicted that the mixture ratio decreases, the oxidizer pump head increases and the gas generator pressure increases. When the fuel passage is reduced it is predicted that the mixture ratio increases, fuel flow rate decreases and the fuel pump head increases.