• 반도체디스플레이기술학회지
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• 제7권2호
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• pp.55-58
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• 2008

The objective of the research is to design, manufacture and test a Mass Flow Controller(MFC) capable of measuring compressible fluid flows based on a "bucket and stop-watch"method. The basic principle is the measurement of time, where the time taken to fill and empty a bucket of known volume is measured. This method of flow measurement is a new concept when compared to a commercilized current mass flow controller. For the flow meter to be able to compete with established designs it not only must be comparable in cost and robustness, it must be very accurate and reliable as well. This device should be able to handle fluid flows in the range of 0.1ml/min to 10ml/min within an accuracy of ${\pm}$1%. A possible application for a device such as this is in electronics industry where arsenic gas is used in the production of silicon chips.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1371-1376
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• 2003

In the thermal power plant, the main steam temperature is typically regulated by the fuel flow rate and the spray flow rate, and the reheater steam temperature is regulated by the gas recirculation flow rate. However, Strictly maintaining the steam temperature can be difficult due to heating value variation to the fuel source, time delay changes in the main steam temperature, the change of the dynamic characteristics in the reheater. Up to the present time, PID Controller has been used to operate this system. However, it is very difficult to achieve an optimal PID gain with no experience, since the gain of the PID controller has to be manually tuned by trial and error. This paper focuses on tuning of the 2-DOF PID Controller on the DCS for steam temperature control using immune based multiobjective approach. The stable range of a 2-DOF parameter for only this system could be found for the start-up procedure and this parameter could be used for the tuning problem. Therefore tuning technique of multiobjective based on immune network algorithms in this paper can be used effectively in tuning 2-DOF PID controllers.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 2003년도 ISIS 2003
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• pp.525-530
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• 2003

This paper focuses on design of nonlinear power plant controller using immune based multiobjective fuzzy approach. The thermal power plant is typically regulated by the fuel flow rate, the spray flow rate, and the gas recirculation flow rate. However, Strictly maintaining the steam temperature can be difficult due to heating value variation to the fuel source, time delay changes in the main steam temperature. the change of the dynamic characteristics in the steam-turbine system. Up to the present time, PID Controller has been used to operate this system. However, it is very difficult to achieve an optimal PID gain with no experience, since the gain of the PID controller has to be manually tuned by trial and error. These parameters tuned by multiobjective based on immune network algorithms could be used for the tuning of nonlinear power plant.

• 한국물환경학회지
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• 제31권4호
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• pp.428-435
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• 2015

This study was carried out to evaluate the performance of a inflow controller for the control of combined sewer overflows (CSOs). Because of the inflow controller could be adjusted manually by predicting the maximum amount of peak flow, the mechanical adjustment of this controller was higher than the existing fixed-type controller in field application. Standardizing the relationship between the flow and the clearance and angle of an inlet cover plate on the inflow conditions can selected to the optimum conditions for the on-site. It was concluded that BOD pollutant loading at the region in which inflow controller was installed had shown the removal efficiency rate of 42%.

• 로봇학회논문지
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• 제16권2호
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• pp.86-93
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• 2021

This paper proposes a controller to regulate the supply pressure of the hydraulic power unit (HPU) for driving a bipedal robot. We establish flow rate models for charging accumulator, actuating joints and leaking from actuators and spool valves. This determines the pump driving motor speed to satisfy the demanded flow rate for operating the bipedal robot without the energy loss caused by the bypass through a pressure regulating valve. We apply proposed controller to an onboard HPU mounted on top of bipedal robot platform with twelve degrees of freedom. We implement air-walking motion and squat motion which require variable flow rate to the bipedal robot. Through this experiment, the energy efficiency of proposed controller was verified by comparing the electric energy consumed when the controller was applied and when the pump operated at constant speed. We also shows the capability of the HPU's control performance to regulate supply pressure.

• 한국생산제조학회지
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• 제22권2호
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• pp.331-336
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• 2013

The purpose of this study is to visualize the characteristics of ER fluids as preceding step of developing 3 port ER valves. As the strength of the electric field increases, more clusters in flow are made and these clusters are thought to be the reasons of the load flow rate being increased and the outlet flow rate being decreased. The ER Valves and load and outlet flow rate check method are considered to be applied to the fluid power control system. Using the manufactured pressure control valve, a one-link manipulator with FHA in robot system is driven. As a result, it is experimentally confirmed that the pressure control valve using ER fluids is applicable to use in driving actuator. If it applies characteristics of the ER fluids, it will be able to apply in the control system for the ER Valve which occurs from industrial controller(PLC).

• 공학교육연구
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• 제19권2호
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• pp.3-7
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• 2016

A flow control system was designed and fabricated to control the flow rate of liquid through the pipe. This control system was composed of hardwares and software, hardwares as controller, gate valve, orifice meter and data aquisition board and software as National instruments Labview program. Control of flow rate was executed by adjusting the pneumatic valve located at the center of pipe line based on the control signal generated by LabView PID control algorithm, which converts analog signal measured by pressure difference of orifice to digital signal to adjust pneumatic valve. For the controller setup Ziegler-Nichols tuning technique was applied and control performances were investigated for not only the disturbance but also the set point changes. Developed system showed good control performances in flow control enough to use as teaching tool of feedback control theory and practice in university, and also as industrial application.

• 동력기계공학회지
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• 제7권3호
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• pp.69-73
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• 2003

In this paper, the relation between displacement of piezoelectric disk and electric field was proposed. From Navier-Stokes equation and Reynold's equation, the relation between flow and gap of plate was determined. This models were further verified by experiments. Based on theoretical study and experimental verification, the proposed model between flow rate and voltage can be used in the design of mass flow controller in gas supplying system.

• 한국산학기술학회논문지
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• 제4권2호
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• pp.63-70
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• 2003

본 논문에서는 반도체 제조장비의 핵심 부품 중에 하나인 질량유량제어기(MFC, Mass Flow Controller)클 설계하고 구현하였다 Microchip社의 마이크로콘트롤러(Microcontroller) PIC 16F876을 사용하여 개발된 MFC는 여러가지 문제점을 가진 아날로그(Analog) 방식의 MFC와 고가의 DSP(Digital Signal Processor) 및 고분해능의 AD변환기(Analog to Digital Convertor)를 사용하는 디지털 MFC의 장점을 혼합한 하이브리드형(Hybrid-Type)이다. 본 논문에서 개발된 MFC는 크게 센서부(Sensor Unit), 제어부(Control Unit), 구동기부(Actuator Unit)로 구성되었으며, 성능향상을 위한 자동보정(Automatic Calibration) 알고리즘과 표준테이블(Reference Table) 방식을 사용하였다.

• 생물환경조절학회지
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• 제18권3호
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• pp.200-207
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• 2009

This study was conducted to analyze the variations of air temperature, relative humidity and pressure in a low pressure chamber for plant growth. The low pressure chamber was composed of an acrylic cylinder, a stainless plate, a mass flow controller, an elastomer pressure controller, a read-out-box, a vacuum pump, and sensors of air temperature, relative humidity, and pressure. The pressure leakage in the low pressure chamber was greatly affected by the material and connection method of tubes. The leakage rate in the low pressure chamber with the welding of the stainless tubes and a plate decreased by $0.21kPa{\cdot}h^{-1}$, whereas the leakage in the low pressure chamber with teflon tube and rubber O-ring was given by $1.03kPa{\cdot}h^{-1}$. Pressure in the low pressure chamber was sensitively fluctuated by the air temperature inside the chamber. An elastomer pressure controller was installed to keep the pressure in the low pressure chamber at a setting value. However, inside relative humidity at dark period increased to saturation level.. Two levels (25 and 50kPa) of pressure and two levels (500 and 1,000sccm) of mass flow rate were provided to investigate the effect of low pressure and mass flow rate on relative humidity inside the chamber. It was concluded that low setting value of pressure and high mass flow rate of mixed gas were the effective methods to control the pressure and to suppress the excessive rise of relative humidity inside the chamber.