• Transactions of the Korean Society of Automotive Engineers
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• v.16 no.4
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• pp.165-172
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• 2008

Urea-SCR, the selective catalytic reduction using urea as reducing agent, has been investigated for about 10 years in detail and today is a well established technique for deNOx of stationary diesel engines. In the case of the SCR-catalyst a non-uniform velocity and $NH_3$ profile will cause an inhomogeneous conversion of the reducing agent $NH_3$, resulting in a local breakthrough of $NH_3$ or increasing NOx emissions. Therefore, this work investigates the effect of flow and $NH_3$ non-uniformities on the deNOx performance and $NH_3$ slip in a Urea-SCR exhaust system. From the results of this study, it is found that flow and $NH_3$ distribution within SCR monolith is strongly related with deNOx performance of SCR catalyst. It is also found that multi-hole injector shows better $NH_3$ uniformity at the face of SCR monolith face than one hole injector.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.1
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• pp.9-15
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• 2011

In this study, we investigated the hydrodynamic and thermal performance of constructal architectures on the basis of the mass flow rates for a given pressure drop, and we determined the thermal resistance and flow uniformity. The five flow configuration used in this study were the first construct with optimized hydraulic diameter, the second construct with optimized hydraulic diameter, the first construct with non-optimized hydraulic diameter, second construct with non-optimized hydraulic diameter, and a serpentine configuration. The results of our study suggest that the best fluid-flow structure is the second constructal structure with optimized constructal configurations. We also found that in the case of the optimized structure of cooling plates, the heat transfer was remarkably higher and the pumping power was significantly lower than those of traditional channels.

• Journal of the Korean institute of surface engineering
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• v.27 no.3
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• pp.158-165
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• 1994

Cu-Cr alloy thin film requires good quality of etching be used for TAB technology. The etched cross sec-tion was clean enough when the etching was performed in 0.1M $FeCl_3$ solution at $50^{\circ}C$. The etching rate was increased with the amount of $KMnO_4$. For enhanced profile of cross section and rate, the spray etchning was found to be superior compared to the immersion etching. A series of experiments were performed to improve the uniformity of the current distribution in electrodeposition onto the substrate with lithographic patterns. Copper was electrodeposited from quiescent-solution, paddle-agitated-solution, and air-bubbled-solution to in-vestigate the effect of the fluid flow. The thickness profile of the specimen measured by profilmetry has the non uniformity at feature scale in quiescent-solution, because of the longitudinal vortex roll caused by the natural convection. However, uniform thickness profile was achieved in paddle-agitated or air bubbled solu-tion.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.247-251
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• 2004

Chemical-Mechanical Polishing(CMP) especially is becoming one of the most important ULSI processes for the 0.25m generation and beyond. And there are many elements affecting CMP performance such as slurry, pad, process parameters and pad conditioning. Among these elements the CMP pad is considered one of the most important because of its change. But the surface of the pad has irregular pores, so there is non-uniformity of slurry flow and of contact area between wafer and the pad, and glazing occurs on the surface of the pad. So we make CMP pad with micro structure using micro molding method. This paper introduces the basic concept and fabrication technique of CMP pad with micro-structure and the characteristic of polishing. Experimental results demonstrate the removal rate, uniformity, and time vs. removal rate.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.7
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• pp.923-932
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• 2001

A series of experiments were conducted to generate fine liquid(water) drops through the electrohydrodynamic atomization process. The atomization mode depended on flow rate and DC voltage input. For water, having electric conductivity larger than 10(sup)-7S/m, the spindle mode turned out to be the only mode to generate uniform-size drops within the range of 30-450 microns that have wide applications. Within this mode, both the uniformity and the fineness of drops were improved at an optimum voltage input for a given flow rate. This optimum voltage increased with increasing of the liquid flow rate. Another important parameter considered was the nozzle material with different electric conductivity and liquid wettability. A stainless-steel nozzle (the material with high electric conductivity and high liquid wettability) and a silica nozzle (the electrically non-conducting material with low liquid wettability) were tested and compared; and more uniform drops could be obtained with the silica nozzle.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.3 no.1
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• pp.18-30
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• 1993

A numerical analysis has been carried out on the Czochralski flow fields when uniform and nonuniform magnetic fields are applied. Czochralski flow fields are governed by buoyancy forces, thermocapillarity, centrifugal forces, and applied magneic fields. In this analysis, pressure and three components of velocity vectors are obtained, and circumferential electrical currents are calculated. When a uniform magnetic field is applied, all the velocity components are decreased and the circumferential electric currents near the crystal surface are increased as the magnetic field intensity is increased. In the case of a nonuniform field, the flows in a meridional plane are suppressed and the circumferential velocity is increased as the non uniformity is increased. The understanding on the Czochralski flow fields under the influence of magnetic fields can lead to the study on the behavior of the concentration of the solute and impurities.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.32 no.9
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• pp.683-694
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• 2008

The performance and durability of Polymer Electrolyte Fuel Cells (PEFCs) are strongly influenced by the uniformity of current density, temperature, species distributions inside a cell In order to obtain uniform distributions in them, the optimal design of flowfield must be a key factor. In this paper, the numerical study of land/channel flowfield optimizations is performed, using a multi-dimensional, multi-phase, non-isothermal PEFC model. Numerical simulations reveal more uniform current density and HFR(High Frequency Resistance) distributions and thus better PEFC performance with narrower land/channel width where the less severe oxygen depletion effect near the land region and more uniform contact resistance variation along the in-plane direction are achieved. The present study elucidates detailed effects of land/channel width and assist in identifying optimal flow-field design strategies for the operation of PEFCs.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.4
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• pp.555-562
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• 1998

Under the influence of non-uniform magnetic field, melt flow in steady state and oxygen concentration in unsteady state are numerically investigated. The strength of the applied characteristic magnetic fields are B=0.1T, 0.2T, and 0.3T, respectively. The buoyancy effects due to the crucible wall heating and the thermocapillary effects due to the surface tention at the free surface are suppressed differentially by the non-uniform magnetic fields. As the intensity of characteristic magnetic fields is increasing, the recirculation region in the meridional plane is moving toward the growing crystal, and is diminishing. The oxygen concentration on the growing surface of crystals is decreasing and the uniformity of the oxygen concentration is increasing as the intensity of the magnetic fields is increasing.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.221-221
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• 2014

The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.8
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• pp.759-765
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• 2013

This study proposes the characteristics of the pressure drop in a compressible fluid through porous media for application to a porous injector in a liquid rocket engine in order to improve the uniformity of the drop size distribution and the mixing performance of shear coaxial injectors. The fluid through the porous media is a Non-Darcy flow that shows a Nonlinear relation between the pressure drop and the velocity at high speed and high mass flow rate. The pressure drop of the Non-Darcy flow can be derived using the Forchheimer equation that includes the losses of viscous and inertia resistance. The permeability and Ergun coefficient represented as a function of the pressure drop and pore size can be applied to the porous injector, where the fluid through the porous media is compressible. A generalized correlation between the pressure drop in relation to the pore size was derived.