• Title/Summary/Keyword: Flow Control System

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Development of Particle Deposition System for Cleaning Process Evaluation in Semiconductor Fabrication (반도체 세정 공정 평가를 위한 나노입자 안착 시스템 개발)

  • Nam, Kyung-Tag;Kim, Young-Gil;Kim, Ho-Joong;Kim, Tae-Sung
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.4
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    • pp.49-52
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    • 2007
  • As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using SMPS (Scanning Mobility Particle Sizer) and deposited on the wafer by electrostatic force. The Experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

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BASE DRAG PREDICTION OF A SUPERSONIC MISSILE USING CFD (CFD를 이용한 초음속 유도탄 기저항력 예측)

  • Lee Bok-Jik
    • Journal of computational fluids engineering
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    • v.11 no.3 s.34
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    • pp.59-63
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    • 2006
  • Accurate prediction of a supersonic missile base drag continues to defy even well-rounded CFD codes. In an effort to address the accuracy and predictability of the base drags, the influence of grid system and competitive turbulence models on the base drag is analyzed. Characteristics of some turbulence models is reviewed through incompressible turbulent flow over a flat plate, and performance for the base drag prediction of several turbulence models such as Baldwin-Loman(B-L), Spalart-Allmaras(S-A), k-$\varepsilon$, k-$\omega$ model is assessed. When compressibility correction is injected into the S-A model, prediction accuracy of the base drag is enhanced. The NSWC wind tunnel test data are utilized for comparison of CFD and semi-empirical codes on the accuracy of base drag predictability: they are about equal, but CFD tends to perform better. It is also found that, as angle of attack of a missile with control fins increases, even the best CFD analysis tool we have lacks the accuracy needed for the base drag prediction.

A Study on Performance Characteristics of R134a Variation with a Capillary Tube Diameter and Length in a Domestic Small multi Refrigerator [Kim_Chi Refrigerator] (모세관 내경 축소에 따른 소형멀티 냉동시스템의 성능특성변화)

  • Lee, Moo-Yeon;Choi, Seok-Jae;Kim, Sang-Ok
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.1598-1603
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    • 2004
  • This paper is an experimental study on the performance characteristic with a variation of capillary diameter and length. The performance characteristic of a refrigeration system is predicted that it is occurring changes of flow pattern and pressure drop in a capillary tube because of reduction of capillary diameter 0.74 to 0.6 mm. The difference between experimental results and analytical results is mainly caused by values of friction factor for using to calculate pressure drop through a small diameter capillary tube under 0.74mm. The experimental equation is derived from capillary tube test data using curve fitting method.

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Simulation of Natural Gas Injected Dual-Fuel DI 2-Stroke Diesel Engine (천연가스를 파이럿오일과 이원공급하는 직접분사식 2행정 디이젤기관의 시뮬레이션)

  • Choi, In Su
    • Transactions of the Korean Society of Automotive Engineers
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    • v.3 no.3
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    • pp.9-18
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    • 1995
  • The substitution of conventional fuel oil by alternative fuels is of immense interest due to liquid oil shortage and requirements of emission control standard. Among the alternative fuels, natural gas may be the most rational fuel, because of its widespread resource and clean est burning. Meanwhile, engine simulation is of great importance in engine development. Hence a zero-dimensional combustion model was developed for dual-fuel system. Natural gas was injected directly into the cylinder and small amount of distillate was used to provide the ignition kernel for natural gas burning. The intake air and exhaust gas flow was modeled by filling and emptying method. Although the single zone approach has an inherent limitation, the model showed promise as a predictive tool for engine performance. Its simulation was also made to see how the engine performance was influenced by the fuel injection timings and amount of each fuel.

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A Study on the Design and Fabrication for the Micro-Mirror of Optical Disk System (광디스크용 마이크로미러의 설계 및 제작에 관한 연구)

  • 손덕수;김종완;임경화;서화일;이우영
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.11
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    • pp.211-220
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    • 2002
  • Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The mirror was fabricated by using MEMS technology. Especially, the process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the Process reliability. The mirror size was 2.5mm${\times}$3mm and it needed about 35V for displacement of 3.2 ${\mu}$.

Development of Control System of Load for Decreasing Reverse Power Flow (역조류 감소를 위한 부하제어 시스템 개발)

  • Kim, Hye-Ji;Lee, Soon-Jeong;Seo, Hun-Chul;Kim, Chul-Hwan
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.77-78
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    • 2011
  • 태양광 에너지, 풍력 에너지 등의 분산전원은 수요지 근방에 설치되어 전력 손실이 적고, 신재생에너지로써 환경보존과 $CO_2$ 감소를 위하여 많이 사용되고 있다. 하지만 이러한 분산전원은 부하와 전원이 함께 연계되어 있어 전력품질 및 보호부분에서 문제를 일으킨다. 그 중 분산전원에 의한 역조류는 기존의 단방향 배전선로의 개폐기나 보호 협조기기에 문제를 발생할 수 있다. 본 논문에서는 분산전원으로 인한 역조류를 줄이기 위해 부하를 조절하는 시스템을 개발하였다.

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Development of The MFC Control System for Evaluating Noise and Vibration of Vacuum Pump According to Arbitrary Process Change (임의의 공정 변화에 따른 진공펌프의 소음${\cdot}$진동 평가를 위한 MFC 컨트롤 시스템 개발)

  • Ryu Jedam;Cheung Wansup;Lim Jong Yeon;Hong Dongpyo
    • Proceedings of the Acoustical Society of Korea Conference
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    • autumn
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    • pp.313-316
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    • 2004
  • 진공펌프의 상태를 미리 알고 대처하는 것은 수많은 진공펌프를 사용하는 반도체 회사에게는 경제적인 이익을 준다. 진공펌프의 상태를 파악하기 위해서는 실제 공정에서 많은 실험을 해야만 한다. 하지만 실제 공정에서 실험을 하기에는 많은 제약과 문제점들이 따른다. 이를 해결하기 위해 본 연구는 MFC(Mass Flow Controller)를 이용하여 실제 공정과 유사한 압력조건을 생성할 수 있는 시뮬레이션 시스템을 구축하였다.

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A Decentralized Self-Control Strategy for Assembly Cell Using Bucket Brigade (Bucket Brigade를 기반으로 한 분산자율형 조립셀 운영전략)

  • Koo, Pyung Hoi
    • Journal of Korean Institute of Industrial Engineers
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    • v.41 no.4
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    • pp.330-337
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    • 2015
  • A bucket-brigade is a way of transporting items where items are passed from one person to the next. The operation of the bucket brigade imitates the cooperative behavior of ants when brood, food or other resources are moved. Koo (2009) presented a bucket brigade-based assembly cell where each worker follows a simple rule: perform assembly operations on a product until the next worker downstream takes it over; then go back to the previous worker upstream to take over a new assembly job. In this way, the flow line is self-balanced without any predetermined job assignment. However, there are some productivity losses related to hand-off and blocking. This paper examines the hand-off and blocking losses and presents a new bucket brigade-based assembly cell where working areas for each assembler is restricted with the help of buffer interfaces. Simulation experiments are used to validate the performance of the new assembly system.

Big Y development for line Yield Improvement in a Factor (Big Y 전개를 통한 장치 Line의 Yield 향상)

  • Moon Gi-Ju;Park Woo-Jong
    • Journal of Korean Society for Quality Management
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    • v.32 no.4
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    • pp.184-195
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    • 2004
  • Current companies 집중 on how to operate and select projects to achieve the best result. 6sigma projects are chosen in the best suitable concept, which are solved by the 6Sigma experts according to the priority. And every project has to be launched not the view of individual management factors but the total factors, Big Y. Therefore, a process needs to be treated to connect the vital few factors in various processes to improve the yield, which is the main performance criteria in a manufacturing industry This report is to make the total optimization through the Vital-Few mapping between quality characteristics and process factors in a manufacturing line. Accordingly, it means to secure lower variance by making the CTP(Critical To Process) optimization and finally to improve the yield.

Hydrodynamics Analysis of Fish Locomotion Using a Biomimetic Fish Robot (생체모사 물고기 로봇을 이용한 물고기 운동의 유체역학적 해석)

  • Han, Cheol-Heui;Lee, Seung-Hee;Shin, Chang-Rok;Park, Jong-Hyeon
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.435-440
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    • 2007
  • Fish-mimetic robots or fish-mimetic propulsors have been developed or under construction. A mechanical system cannot have the same functions as bio-organic systems. Thus, the hydrodynamic characteristics of fish locomotion should be well understood in order to develop and control a feasible intelligent fish-mimetic robot with its optimal motion pattern known. In this paper, a mackerel-mimetic robot fish is fabricated in order to understand the hydrodynamic characteristics of fish locomotion. A simplified unsteady flow theory is also applied to the hydrodynamic analysis of the motion of the anterior part of the robotic fish. The normal and axial forces of the fish are measured by changing the amplitude and frequencies of fanning motion. It is found that the present theoretical results agree with the measured data.

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