• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1979-1981
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• 2002

새로운 방식의 일체형 flexible sensor module을 제작하였다. MEMS공정을 이용하여 제작된이 센서 모듈은 배선기판은 물론 strain sensor 역시 임의의 곡면에 실장을 위해 자유로운 굽힘이 가능하도록 제작되었다. 실리콘웨이퍼에 구현된 piezoresistor 스트레인 센서는 release-etch 방법을 통해 웨이퍼로부터 분리되어, 폴리이미드를 기판으로 하는 Flexible Sensor Array Module로 완성되었다. 소자와 기판을 따로 제작한 후 조립하는 기존의 방식에 비해, 웨이퍼 위에서 flexible 기판을 형성하여 수율이 높고 사진공정의 정밀도를 그대로 보전한 기판과 센서 어레이의 패키징이 가능하였으며, 칩을 기판에 실장하기 위한 정밀한 조립공정도 불필요하였다. 폴리이미드 기판은 전기도금을 통해 회로를 구성하여 1단계 패키징 (die to chip carrier)과 2단계 패키징 (chip to substrate)을 웨이퍼 레벨에서 완성하였다. 마지막으로 불산 용액을 통해 희생층을 제거함으로서 웨이퍼로 부터 센서어레이 모듈을 분리 하였다.

• 센서학회지
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• 제29권1호
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• pp.40-44
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• 2020

An integrated multifunctional sensor, capable of raising an early electric-fire warning, was fabricated. An arc-light, temperature, and humidity sensor was fabricated on a flexible substrate using a printed thin film of indium tin oxide. A polyethylene terephthalate (PET) substrate was used as the flexible substrate. The sensor was fabricated on a PET substrate, and its operating characteristics were tested. The operating performances of the sensor when serving as an arc-light, a temperature, and a humidity sensor were estimated to be 0.6247 Ω/W, 80.6 Ω/K, and -4.08 Ω/RH, respectively. The feasibility of the proposed fire sensor was demonstrated; it costs low and offers multiple functionalities.

• 센서학회지
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• 제15권4호
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• pp.277-283
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• 2006

We presented that fabrication process and characteristics of 3 axes flexible tactile sensor available for normal and shear force fabricated using Si micromachining and packaging technologies. The fabrication processes for 3 axes flexible tactile sensor were classified in the fabrication of sensor chips and their packaging on the flexible PCB. The variation rate of resistance was about 2.1 %/N and 0.5 %/N in applying normal and shear force, respectively. The flexibility of fabricated 3 axes flexible tactile sensor array was good enough to place on the finger-tip.

• 한국기계가공학회지
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• 제19권10호
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• pp.111-116
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• 2020

Flexible tactile sensors, which are primarily used as grippers in robots, are mainly used to handle highly elastic or highly flexible objects. That is, flexible grippers are used when an object cannot be sufficiently controlled by applying a specific output force or taking a specific grabbing action. This is because a flexible tactile sensor needs to measure the pressure applied directly to held objects while deforming according to the shape of the object to be handled. CNT-based sensors used to be made from a highly flexible polymer to give flexibility and it is known that the sensors are greatly affected by the contact resistance of the terminal that connects the sensor to an electrical circuit; therefore, this paper clarifies the contact resistance of MWCNTs-based flexible tactile sensors and terminals. The effects of main and plating materials for terminals are investigated and the combinations of main and plating materials that exhibit contact resistance are measured in a typical industrial environment.

• 제어로봇시스템학회논문지
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• 제21권6호
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• pp.583-588
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• 2015

Flexible tactile sensors can provide valuable feedback to intelligent robots regarding the environment around them. This is especially important when robots such as, service robots share a workspace with humans. This paper presents a contact force measurement algorithm of a flexible tactile sensor. This sensor is manufactured by a direct-writing technique, which is one 3D printing method, using multi-walled carbon nano-tubes. An analog signal processing circuit has been designed and implemented to reduce noise contained in the sensor output. In addition, a digital version of the Butterworth filter was implemented by software running on a microcontroller. Through various experiments, characteristics of the sensor system have been identified. Based on three traits, an algorithm to detect the contact and measure the contact force has been developed. The entire system showed a promising prospect to detect the contact over a large and curved area.

• 한국정밀공학회지
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• 제19권1호
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• pp.212-218
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• 2002

This research is the development of a distributed tactile sensor using PVDF film far the detection of the contact state. The prototype of the tactile sensor with 8$\times$8 taxels was fabricated using PVDF film and flexible circuitry. In the fabrication procedure, the electrode and the common electrode patterns are attached to the both side of the 28${\mu}m$ thickness PVDF film. The sensor is covered with polyester film for insulation. The signals of a contact pressure to the tactile sensor are sensed and processed in the DSP system in which the signals are digitalized and filtered. And the signals are integrated for taking the force profile. The processed signals of the output of the sensor are visualized to take the shape and force distribution of the contact object in personal computer. The usefulness of the sensor system is verified through the sensing examples.

• 한국정밀공학회지
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• 제18권7호
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• pp.161-166
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• 2001

The prototype of a tactile sensor with $4\times 4$ taxels using PVDF was fabricated. The electrode patterns of the thin Cu tape are attached to the 28${\mu}{\textrm}{m}$ thickness PVDF using conductive adhesive and covering the sensor using polyester film for insulation. The structure of the sensor is flexible and the fabrication procedure is easy relatively. Also the output characteristics of the sensor was nearly linear with 8% deviation. The signals of a contact pressure to the tactile sensor are sensed and processed through A/D converter, DSP system and personal computer. The reasonable performance for the detection of contact shape and force distribution was verified through the experiment.

• Transactions on Electrical and Electronic Materials
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• 제11권3호
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• pp.130-133
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• 2010

A flexible three-axial tactile sensor was fabricated on Kapton polyimide film using polymer micromachining technology. Nichrome (Ni:Cr = 8:2) strain gauges were positioned on an etched membrane to detect normal and shear loads. The optimal positions of strain gauges were determined through strain distribution from finite element analysis. The sensor was evaluated by applying normal and shear loads from 0 N to 0.8 N using an evaluation system. Sensitivity of the tactile sensor to normal and shear loads was about 206.6 mV/N and 70.1 mV/N, respectively. The sensor showed good linearity, and its determination coefficient ($R^2$) was about 0.982. The developed sensor can be applied in a curved or compliant surface that requires slip detection and flexibility, such as a robotic fingertip.

• Journal of Power Electronics
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• 제6권1호
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• pp.8-17
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• 2006

In this paper, we propose a fault-tolerant control system for the position control and vibration suppression of a flexible arm robot. The proposed control system has a strain gauge sensor signal observer based on a reaction force observer and detects a fault by monitoring an estimated error. In order to improve the estimation accuracy, the plant parameters included in the sensor signal observer are updated by using the strain gauge sensor signal in normal time through the adaptive law. After fault detection, the proposed control system exchanges the faulty sensor signal for the estimated one and switches to a fault mode controller so as to maintain the stability and the control performance. We confirmed the effectiveness of the proposed control system through several experiments.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.61.4-61
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• 2001

This research is the development of a distributed flexible tactile sensor for service robots using PVDF (polyvinylidene fluoride) film for the detection of the contact state in real time. The tactile sensor which has 8$\times$8 taxels is fabricated using PVDF film and flexible circuitry. The proposed fabrication method is simple and easy to make the sensor in the laboratory without using any special equipment. Experimental results on static and dynamic properties are obtained. In order to investigate the properties of the sensor, the sensor output to the arbitrary forces and frequencies are measured using the shaker with the force sensor.