• Title/Summary/Keyword: Flame Hydrolysis Deposition(FHD)

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An Experimental Study of Silica Particle Growth in a Coflow Diffusion Flame Utilizing Light Scattering and Local Sampling Technique (II) - Effects of Diffusion - (광산란과 입자포집을 이용한 동축류 확산화염 내의 실리카 입자의 성장 측정(II) - 확산의 영향 -)

  • Cho, Jaegeol;Lee, Jeonghoon;Kim, Hyun Woo;Choi, Mansoo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.9
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    • pp.1151-1162
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    • 1999
  • The effects of radial heat and $H_2O$ diffusion on the evolution of silica particles in coflow diffusion flames have been studied experimentally. The evolution of silica aggregate particles in coflow diffusion flames has been measured experimentally using light scattering and thermophoretic sampling techniques. The measurements of scattering cross section from $90^{\circ}$ light scattering have been utilized to calculate the aggregate number density and volume fraction using with combination of measuring the particle size and morphology through the localized sampling and a TEM image analysis. Aggregate or particle number densities and volume fractions were calculated using Rayleigh-Debye-Gans and Mie theory for fractal aggregates and spherical particles, respectively. Flame temperatures and volumetric differential scattering cross sections have been measured for different flame conditions such as inert gas species, $H_2$ flow rates, and burner injection configurations to examine the relation between the formation of particles and radial $H_2O$ diffusion. The comparisons of oxidation and flame hydrolysis have also been made for various $H_2$ flow rates using $N_2$ or $O_2$ as a carrier gas. Results indicate that the role of oxidation becomes dominant as both carrier gas($O_2$) and $H_2$ flow rates increases since the radial heat diffusion precedes $H_2O$ diffusion in coflow flames used in this study. The effect of carrier gas flow rates on the evolution of silica particles have also been studied. When using $N_2$ as a carrier gas, the particle volume fraction has a maximum at a certain carrier gas flow rate and as the flow rate is further increased, the hydrolysis reaction Is delayed and the spherical particles finally evolves into fractal aggregates due to decreased flame temperature and residence time.

The fabrication of Er-doped silica film for optical amplifier (광증폭기 응용을 위한 Er 첨가 실리카 유리 박막의 제조)

  • Kim, Jae-Seon;Sin, Dong-Uk;Jeong, Seon-Tae;Song, Yeong-Hwi
    • Korean Journal of Materials Research
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    • v.11 no.5
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    • pp.385-392
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    • 2001
  • There have been many investigations and researches on PLC type of optical amplifiers because they are convenient for mass production and also can integrate multi-functional devices into a single chip. In this research. the fabrication of optical waveguide made of Si/$Sio_2$ by FHD(Flame Hydrolysis Deposition) for passive integrated optical devices and $1.5\mu\textrm{m}$ optical amplifier by Solution Doping method, which is one of the method doping $Er^{3+}$ into the thin film, are mainly discussed.

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An Experimental Study of Silica Particle Growth in a Coflow Diffusion Flame Utilizing Light Scattering and Local Sampling Technique (I) - Effects of Flame Temperature - (광산란과 입자포집을 이용한 동축류 확산화염 내의 실리카 입자의 성장 측정(I) - 화염온도의 영향 -)

  • Cho, Jaegeol;Lee, Jeonghoon;Kim, Hyun Woo;Choi, Mansoo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.9
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    • pp.1139-1150
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    • 1999
  • The evolution of silica aggregate particles in coflow diffusion flames has been studied experimentally using light scattering and thermophoretic sampling techniques. The measurements of scattering cross section from $90^{\circ}$ light scattering have been utilized to calculate the aggregate number density and volume fraction using with combination of measuring the particle size and morphology through the localized sampling and a TEM image analysis. Aggregate or particle number densities and volume fractions were calculated using Rayleigh-Debye-Gans and Mie theory for fractal aggregates and spherical particles, respectively. Of particular interests are the effects of flame temperature on the evolution of silica aggregate particles. As the flow rate of $H_2$ increases, the primary particle diameters of silica aggregates have been first decreased, but, further increase of $H_2$ flow rate causes the diameter of primary particles to increase and for sufficiently larger flow rates, the fractal aggregates finally become spherical particles. The variation of primary particle size along the upward jet centerline and the effect of burner configuration have also been studied.

A Study on the Characteristics of Silica Fine Glass Particles prepared by Flame Hydrolysis Deposition Process (FHD법으로 형성된 실리카 유리미립자의 특성에 관한 연구)

  • Choe, Jun-Gi;Jeong, Myeong-Yeong;Choe, Tae-Gu
    • Korean Journal of Materials Research
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    • v.7 no.10
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    • pp.845-850
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    • 1997
  • 수직형 FHD증착법을 사용하여 SiO$_{2}$, SiO$_{2}$-P$_{2}$O$_{5}$, SiO$_{2}$P$_{2}$O$_{5}$-B$_{2}$O$_{3}$-GeO$_{2}$계 실리카 유리미립자를 형성하였으며, SEM, ICP-AES, XRD, TGA-DSC을 사용하여 그 특성을 분석하였다. XRD측정을 통해, 미립자 형성시 사용된 화염온도(130$0^{\circ}C$-150$0^{\circ}C$)와 기판온도(-20$0^{\circ}C$)가 SiO$_{2}$-P$_{2}$O$_{5}$계 미립자를 비정질상태로 형성하였으며, SiO$_{2}$P$_{2}$O$_{5}$-B$_{2}$O$_{3}$와 SiO$_{2}$P$_{2}$O$_{5}$-B$_{2}$O$_{3}$-GeO$_{2}$계 미립자에서는 B$_{2}$O$_{3}$, BPO$_{4}$, GeO$_{2}$의 결정성피크들을 관찰하였다. TGA-DSC 열분석을 통해, SiO$_{2}$와 SiO$_{2}$-P$_{2}$O$_{5}$는 온도변화에 따른 질량변화가 없었으며, SiO$_{2}$P$_{2}$O$_{5}$-B$_{2}$O$_{3}$-GeO$_{2}$계의 경우 질량감소를 동반한 유리전이에 따른 분자이완현상 및 결정화나 회복반응을 나타내고 있다. 질량감소는 미립자가 결정상태일때 가속되는 경향을 나타냈으며, DSC열분석을 통해 SiO$_{2}$, SiO$_{2}$-P$_{2}$O$_{5}$, SiO$_{2}$P$_{2}$O$_{5}$-B$_{2}$O$_{3}$-GeO$_{2}$계 유리미립자들의 고밀화가 시작되는 온도를 각각 1224$^{\circ}C$, 1151$^{\circ}C$, 953$^{\circ}C$, 113$0^{\circ}C$에서 관찰하였다.

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Effect of Temperature on Consolidation of Silica Soot Prepared by Flame Hydrolysis Deposition (FHD법에 의해 형성된 실리카 soot의 고밀화 공정에 미치는 온도의 영향)

  • Kim, Seong-Su;Yu, Ji-Beom;Sim, Jae-Gi;Jeong, Myeo-Yeong
    • Korean Journal of Materials Research
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    • v.8 no.4
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    • pp.337-344
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    • 1998
  • 화염가수분해증착법에 의해 형성된 $0.1\mu\textrm{m}$크기의 soot를 실리콘 기판위에 형성하여 $1325^{\circ}C$에서 2시간 동안 고밀화과정후 투명한 후막을 얻을 수 있었다. 고밀화 열처리는 탈수과정, 재배열 과정, 그리고 고밀화 과정으로 구성되었다. 고밀화 공정후의 두께 수축률은 초기 soot의 96%정도였으며, 급속한 두께의 감소는 $950^{\circ}C$부터 시작되었으며, 본격적인 고밀화가 시작되는 온도는 $1250^{\circ}C$임을 알 수 있었다. soot의 TGA와 DTA를 이용한 열분석 결과 탈수과정에 의하여 9/wt%의 질량감소와 $1250^{\circ}C$이상에서 인(P)의 증발에 의한 2wt%의 질량감소를 관찰하였다. DTA곡선에서는 $500^{\circ}C$, $570^{\circ}C$. $1258^{\circ}C$에서 흡열반응 피크를 나타내는데, 이는 $B_{2}$$O_{3}$, $P_{2}$$O_{5}$ 등의 도펀트들의 melting과 실리카 입자사이의 기공이 소멸되면서 입자간의 열전도도의 증가에 의해 나타난 것으로 판단된다.

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