• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.135-141
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• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.423-430
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• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.4
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• pp.735-739
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• 2013

The error motion of a machine tool spindle directly affects the surface errors of machined parts. Spindle motion errors such as three translational motions and two rotational motions are undesirable. These are usually due to the imperfectness of bearings, stiffness of spindle, assembly errors, and external force or unbalance of rotors. The error motions of the spindle need to be reduced for achieving the desired performance. Therefore, the level of error motion needs to be estimated during the design and assembly process of the spindle. In this study, an estimation method for five degree-of-freedom (5 DOF) error motions for a spindle with an angular contact ball bearing is suggested. To estimate the error motions of the spindle, the waviness of the inner-race of bearings and an external force model were used as input data. The estimation model considers the geometric relationship and force equilibrium of the five DOFs. To calculate the error motions of the spindle, not only the imperfections of the shaft and bearings but also driving elements such as belt pulley and direct driving motor systems are considered.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.2
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• pp.127-133
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• 2015

The error motion of a machine tool spindle directly affects the surface errors of machined parts. Those are usually due to the imperfectness of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions for rotary units such as a spindle and rotary table are suggested. To estimate the error motions of the rotary unit, waviness of bearings and external force model were used as input data. The estimation model considers geometric relationship and force equilibrium of the five degree of the freedom motions.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.285-291
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• 2011

The error motion of a machine tool spindle directly affects the surface errors of machined parts. The error motions of the spindle are not desired errors in the three linear direction motions and two rotating motions. Those are usually due to the imperfect of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions of the spindle is suggested. To estimate the error motions of the spindle, waviness of shaft and bearings, external force model was used as input data. And, the estimation models are considering geometric relationship and force equilibrium of the five degree of the freedom. To calculate error motions of the spindle, not only imperfection of the shaft, bearings, such as rolling element bearing, hydrostatic bearing, and aerostatic bearing, but also driving elements such as worm, pulley, and direct driving motor systems, were considered.

• Journal of Institute of Control, Robotics and Systems
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• v.18 no.12
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• pp.1106-1114
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• 2012

To achieve synchronized motion between a wearable robot and a human user, the redundancy must be resolved in the same manner by both systems. According to the seven DOF (Degrees of Freedom) human arm model composed of the shoulder, elbow, and wrist joints, positioning and orientating the wrist in space is a task requiring only six DOFs. Due to this redundancy, a given task can be completed by multiple arm configurations, and thus there exists no unique mathematical solution to the inverse kinematics. This paper presents analysis on the kinematic and dynamic aspect of the human arm movement and their effect on the redundancy resolution of the human arm based on a seven DOF manipulator model. The redundancy of the arm is expressed mathematically by defining the swivel angle. The final form of swivel angle can be represented as a linear combination of two different swivel angles achieved by optimizing different cost functions based on kinematic and dynamic criteria. The kinematic criterion is to maximize the projection of the longest principal axis of the manipulability ellipsoid for the human arm on the vector connecting the wrist and the virtual target on the head region. The dynamic criterion is to minimize the mechanical work done in the joint space for each two consecutive points along the task space trajectory. As a first step, the redundancy based on the kinematic criterion will be thoroughly studied based on the motion capture data analysis. Experimental results indicate that by using the proposed redundancy resolution criterion in the kinematic level, error between the predicted and the actual swivel angle acquired from the motor control system is less than five degrees.