• Title/Summary/Keyword: First-order prediction Control

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Virtual Metrology for predicting $SiO_2$ Etch Rate Using Optical Emission Spectroscopy Data

  • Kim, Boom-Soo;Kang, Tae-Yoon;Chun, Sang-Hyun;Son, Seung-Nam;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.464-464
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    • 2010
  • A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

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Development of a Time-Domain Simulation Tool for Offshore Wind Farms

  • Kim, Hyungyu;Kim, Kwansoo;Paek, Insu;Yoo, Neungsoo
    • Journal of Power Electronics
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    • v.15 no.4
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    • pp.1047-1053
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    • 2015
  • A time-domain simulation tool to predict the dynamic power output of wind turbines in an offshore wind farm was developed in this study. A wind turbine model consisting of first or second order transfer functions of various wind turbine elements was combined with the Ainslie's eddy viscosity wake model to construct the simulation tool. The wind turbine model also includes an aerodynamic model that is a look up table of power and thrust coefficients with respect to the tip speed ratio and pitch angle of the wind turbine obtained by a commercial multi-body dynamics simulation tool. The wake model includes algorithms of superposition of multiple wakes and propagation based on Taylor's frozen turbulence assumption. Torque and pitch control algorithms were implemented in the simulation tool to perform max-Cp and power regulation control of the wind turbines. The simulation tool calculates wind speeds in the two-dimensional domain of the wind farm at the hub height of the wind turbines and yields power outputs from individual wind turbines. The NREL 5MW reference wind turbine was targeted as a wind turbine to obtain parameters for the simulation. To validate the simulation tool, a Danish offshore wind farm with 80 wind turbines was modelled and used to predict the power from the wind farm. A comparison of the prediction with the measured values available in literature showed that the results from the simulation program were fairly close to the measured results in literature except when the wind turbines are congruent with the wind direction.

Pine Wilt Disease Detection Based on Deep Learning Using an Unmanned Aerial Vehicle (무인항공기를 이용한 딥러닝 기반의 소나무재선충병 감염목 탐지)

  • Lim, Eon Taek;Do, Myung Sik
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.41 no.3
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    • pp.317-325
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    • 2021
  • Pine wilt disease first appeared in Busan in 1998; it is a serious disease that causes enormous damage to pine trees. The Korean government enacted a special law on the control of pine wilt disease in 2005, which controls and prohibits the movement of pine trees in affected areas. However, existing forecasting and control methods have physical and economic challenges in reducing pine wilt disease that occurs simultaneously and radically in mountainous terrain. In this study, the authors present the use of a deep learning object recognition and prediction method based on visual materials using an unmanned aerial vehicle (UAV) to effectively detect trees suspected of being infected with pine wilt disease. In order to observe pine wilt disease, an orthomosaic was produced using image data acquired through aerial shots. As a result, 198 damaged trees were identified, while 84 damaged trees were identified in field surveys that excluded areas with inaccessible steep slopes and cliffs. Analysis using image segmentation (SegNet) and image detection (YOLOv2) obtained a performance value of 0.57 and 0.77, respectively.

Operational Validation of the COMS Satellite Ground Control System during the First Three Months of In-Orbit Test Operations (발사 후 3개월간의 궤도 내 시험을 통한 통신해양기상위성 관제시스템의 운용검증)

  • Lee, Byoung-Sun;Kim, In-Jun;Lee, Soo-Jeon;Hwang, Yoo-La;Jung, Won-Chan;Kim, Jae-Hoon;Kim, Hae-Yeon;Lee, Hoon-Hee;Lee, Sang-Cherl;Cho, Young-Min;Kim, Bang-Yeop
    • Journal of Satellite, Information and Communications
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    • v.6 no.1
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    • pp.37-44
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    • 2011
  • COMS(Chollian) satellite which was launched on June 26, 2010 has three payloads for Ka-band communications, geostationary ocean color imaging and meteorological imaging. In order to make efficient use of the geostationary satellite, a concept of mission operations has been considered from the beginning of the satellite ground control system development. COMS satellite mission operations are classified by daily, weekly, monthly, and seasonal operations. Daily satellite operations include mission planning, command planning and transmission, telemetry processing and analysis, ranging and orbit determination, ephemeris and event prediction, and wheel off-loading set point parameter calculation. As a weekly operation, North-South station keeping maneuver and East-West station keeping maneuver should be performed on Tuesday and Thursday, respectively. Spacecraft oscillator updating parameter should be calculated and uploaded once a month. Eclipse operations should be performed during a vernal equinox and autumnal equinox season. In this paper, operational validations of the major functions in COMS SGCS are presented for the first three month of in-orbit test operations. All of the major functions have been successfully verified and the COMS SGCS will be used for the mission operations of the COMS satellite for 7 years of mission life time and even more.

Identification of a conservative site in the African swine fever virus p54 protein and its preliminary application in a serological assay

  • Xu, Lingyu;Cao, Chenfu;Yang, Zhiyi;Jia, Weixin
    • Journal of Veterinary Science
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    • v.23 no.4
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    • pp.55.1-55.12
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    • 2022
  • Background: ASF was first reported in Kenya in 1910 in 1921. In China, ASF spread to 31 provinces including Henan and Jiangsu within six months after it was first reported on August 3, 2018. The epidemic almost affected the whole China, causing direct economic losses of tens of billions of yuan. Cause great loss to our pig industry. As ELISA is cheap and easy to operate, OIE regards it as the preferred serological method for ASF detection. P54 protein has good antigenicity and is an ideal antigen for detection. Objective: To identify a conservative site in the African swine fever virus (ASFV) p54 protein and perform a Cloth-enzyme-linked immunosorbent assay (ELISA) for detecting the ASFV antibody in order to reduce risks posed by using the live virus in diagnostic assays. Method: We used bioinformatics methods to predict the antigen epitope of the ASFV p54 protein in combination with the antigenic index and artificially synthesized the predicted antigen epitope peptides. Using ASFV-positive serum and specific monoclonal antibodies (mAbs), we performed indirect ELISA and blocking ELISA to verify the immunological properties of the predicted epitope polypeptide. Results: The results of our prediction revealed that the possible antigen epitope regions were A23-29, A36-45, A72-94, A114-120, A124-130, and A137-150. The indirect ELISA showed that the peptides A23-29, A36-45, A72-94, A114-120, and A137-150 have good antigenicity. Moreover, the A36-45 polypeptide can react specifically with the mAb secreted by hybridoma cells, and its binding site contains a minimum number of essential amino acids in the sequence 37DIQFINPY44. Conclusions: Our study confirmed a conservative antigenic site in the ASFV p54 protein and its amino acid sequence. A competitive ELISA method for detecting ASFV antibodies was established based on recombinant p54 and matching mAb. Moreover, testing the protein sequence alignment verified that the method can theoretically detect antibodies produced by pigs affected by nearly all ASFVs worldwide.

Modelling and Preliminary Prediction of Thermal Balance Test for COMS (통신해양기상위성의 열평형 시험 모델 및 예비 예측)

  • Jun, Hyoung-Yoll;Kim, Jung-Hoon;Han, Cho-Young
    • Journal of Astronomy and Space Sciences
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    • v.26 no.3
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    • pp.403-416
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    • 2009
  • COMS (Communication, Ocean and Meteorological Satellite) is a geostationary satellite and developed by KARl for communication, ocean and meteorological observations. It will be tested under vacuum and very low temperature conditions in order to verify thermal design of COMS. The test will be performed by using KARI large thermal vacuum chamber, which was developed by KARI, and the COMS will be the first flight satellite tested in this chamber. The purposes of thermal balance test are to correlate analytical model used for design evaluation and predicting temperatures, and to verify and adjust thermal control concept. KARI has plan to use heating plates to simulate space hot condition especially for radiator panels of satellite such as north and south panels. They will be controlled from 90 K to 273 K by circulating GN2 and LN2 alternatively according to the test phases, while the main shroud of the vacuum chamber will be under constant temperature, 90 K, during all thermal balance test. This paper presents thermal modelling including test chamber, heating plates and the satellite without solar array wing and Ka-band reflectors and discusses temperature prediction during thermal balance test.

Estimation of the methane generation rate constant using a large-scale respirometer at a landfill site

  • Park, Jin-Kyu;Tameda, Kazuo;Higuchi, Sotaro;Lee, Nam-Hoon
    • Environmental Engineering Research
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    • v.22 no.4
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    • pp.339-346
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    • 2017
  • The objective of this study is the evaluation of the performance of a large-scale respirometer (LSR) of 17.7 L in the determination of the methane generation rate constant (k) values. To achieve this objective, a comparison between anaerobic (GB21) and LSR tests was conducted. The data were modeled using a linear function, and the resulting correlation coefficient ($R^2$) of the linear regression is 0.91. This result shows that despite the aerobic conditions, the biodegradability values that were obtained from the LSR test produced results that are similar to those from the GB21 test. In this respect, the LSR test can be an indicator of the anaerobic biodegradability for landfill waste. In addition, the results show the high repeatability of the tests with an average coefficient of variance (CV) that is lower than 10%; furthermore, the CV for the LSR is lower than that of the GB21, which indicates that the LSR-test method could provide a better representation of waste samples. Therefore, the LSR method allows for both the prediction of the long-term biodegradation potential in a shorter length of time and the reduction of the sampling errors that are caused by the heterogeneity of waste samples. The k values are $0.156y^{-1}$ and $0.127y^{-1}$ for the cumulative biogas production (GB21) and the cumulative oxygen uptake for the LSR, respectively.

Analytical Evaluation of Airborne Noise for the Building Structure' on Railway Transportation Systems (철도부지 상부 입체 건축물의 공기전달음 소음 예측)

  • Yeon, Jun-Oh;Kim, Kyoung-Woo
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.23 no.12
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    • pp.1096-1102
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    • 2013
  • The useful practical land shall be reserved when an artificial land covers the railway and road. However, the problem is that since the artificial land places directly on the top of noise sources likely on the railway and road there will arise the weak points, noise and vibration. On this study based on creating the artificial land on the top of a railway vehicle base and placing a tenement on that land, it was comprehended the noise influence from the railway car through the simulation. In order to secure the input value for the simulation, at first measured the noise condition of the railway station building and the railway vehicle base. The output value for the railway station building (place A) was around (53.6~57.6) dB(A), the equivalent continuous sound level for an hour, and for the railway station building (place B) it was around (63.7~68.9) dB. The maximum outdoor noise of the tenement on the artificial land was measured as 64.1 dB(A) under the fixed condition on the simulation modeling. The built purpose of placing the artificial land to prevent the noise influence from the railway met the expectation to be less influenced on the tenement. Rather, because of placing the artificial land the noise level on the lower space could be increased so there requires having a noise control.

Analysis of the Different Heated Milks using Electronic Nose (열처리를 달리한 시유의 전자코 분석)

  • Hong, Eun-Jeung;Noh, Bong-Soo;Park, Seung-Yong
    • Food Science of Animal Resources
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    • v.30 no.5
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    • pp.851-859
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    • 2010
  • This study was conducted to investigate the application of a model system using an MS-electronic nose based on the discriminative function analysis on volatile flavors, to prediction of the shelf-life of market milk by preservation temperature and differently-loaded heat treatment. On mass spectrum, the ion fragments of volatile flavors of milk obtained from MS-electronic nose could be distinguished at amu 60, 91, 92, and 93. The response levels of volatile flavors at each amu increased in proportion to the heat treatment loaded to the milk, in the order of LTLT, HTST, and UHT. This study indicated that the discriminative function scores of the volatile flavors seemed to correlate with the preservation temperature, storage period, and heat treatment conditions; DF1 (discriminative function first score) showed a strong relationship to storage periods, with $r^2$ of 0.9965, 0.9965, and 0.9911 at temperatures of 4, 7, and $10^{\circ}C$, respectively, while DF2 was influenced by heat treatment conditions with an $r^2$ of 0.9861 at $4^{\circ}C$. It is suggested that the discriminative function analysis given by an MS-electronic nose could be used to construct a new quality control model system for the evaluation of heat treatment loaded during the processing of milk, and for predicting storage periods of market milk.

A Prediction Model for the Radiation Safety Management Behavior of Medical Cyclotrons (의료용 Cyclotron의 방사선안전관리 행위 예측모형)

  • Jung, Ji-Hye;Han, Eun-Ok;Kim, Ssang-Tae
    • Journal of Radiation Protection and Research
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    • v.33 no.2
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    • pp.77-86
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    • 2008
  • This study attempted to provide reference materials for improving the behavior level in radiation safety managements by drawing a prediction model that affects the radiation safety management behavior because the radiation safety management of medical Cyclotrons, which can be used to produce radioisotopes, is an important factor that protects radiation caused diseases not only for radiological operators but average users. In addition, this study obtained follows results through the investigation applied from January 2 to January 30, 2008 for the radiation safety managers employed in 24 authorized organizations, which have already installed Cyclotrons, through applying a specific form of questionnaire in which the validity was guaranteed by reference study, site investigation, and focus discussion by related experts. The radiation safety management were configured as seven steps: Step 1 is a production preparation step, Step 2 is an RI production step, Step 3 is a synthesis step, Step 4 is a distribution step, Step 5 is a quality control step, Step 6 is a carriage container packing step, and Step 7 is a transportation step. it was recognized that the distribution step was the most exposed as 15 subjects (62.5%), the items of 'the sanction and permission related works' and 'the guarantee of installation facilities and production equipments' were the most difficult as 9 subjects (37.5%), and In the trouble steps in such exposure, the item of 'the synthesis and distribution' steps were 4 times, respectively (30.8%). In the score of the behavior level in radiation safety managements, the minimum and maximum scores were 2.42 and 4.00, respectively, and the average score was $3.46{\pm}0.47$ out of 4. Prosperity and well-being programs in the behavior and job in radiation safety managements (r=0.529) represented a significant correlation statistically. In the drawing of a prediction model based on the factors that affected the behavior in radiation safety managements, general characteristics, organization characteristics, and selfefficacy didn't show a significant path statistically in which the prosperity and well-being programs in job characteristics affected the behavior in radiation safety managements. Therefore, it is necessary to establish a strategy that improves the level of prosperity and well-being levels in job characteristics in order to increase the behavior in radiation safety managements. Thus, this study provides basic materials for the radiation safety management of Cyclotron through the full-scale investigation that is first applied in Korea.