• 제목/요약/키워드: Film orientation

검색결과 894건 처리시간 0.031초

사파이어 기판의 다른 결정방향 위에 제작된 YBCO step-edge 접합의 특성 (Properties of YBCO Step-edge Junction Fabricated on Different Crystal Orientation of Sapphire Substrate)

  • 임해용;김인선;박용기;박종철
    • Progress in Superconductivity
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    • 제3권1호
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    • pp.60-64
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    • 2001
  • We have studied properties of step-edge Junction prepared with crystal orientation of sapphire substrate. The Step on sapphire substrates fabricated by conventional photolithography method and Ar ion milling method. $CeO_2$ buffer layer and in-situ YBCO thin film were deposited on the stepped sapphire substrates by a pulsed laser deposition method with the predetermined optimized condition. The step angle was centre fled low angle of about $25^{\circ}$. The YBCO film thickness was varied to obtain various thickness ratios of the film to the step height in a range from 0.7 to 1.2. I-V curves of junction were showed RSJ-behavior, double junction structure, and hysteresis due to the crystal orientation of substrate.

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무전해 도금에 의한 수직자기 박막제조시의 착화제의 영향 (Influences of Complexing Agents on the Formation of the Perpendicular Magnetic Film by the Electroless Plating)

  • 김영우;박정일;박광자;김조웅;함용묵;이주성
    • 한국표면공학회지
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    • 제20권4호
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    • pp.135-143
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    • 1987
  • Various complexing agents were investigated to see the effects on the normal orientation of HCP structure of Co-alloy to the film plane in ammoniacal electroless plating bath. To obtain the optimum condition, several complexing agents were investigated to compare the C-axis perpendicular orientation. Results were that succinate - citrate, malonate - succinate, malonate bath were useful for that purpose. Among these complexing agents, succinate - citrate system was obtained as the best one. X-ray diffraction patterns were used to compare the film properties with C-axis perpendicular orientation.

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NH3를 이용한 반응성 증착법에 의한 AlN 박막의 우선배향특성에 관한 연구 (A Study on the Preferred Orientation Characteristics of AlN Thin Films by Reactive Evaporation Method using NH3)

  • 오창섭;한창석
    • 대한금속재료학회지
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    • 제50권1호
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    • pp.78-85
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    • 2012
  • Aluminum nitride(AlN) is a compound (III-V group) of hexagonal system with a crystal structure. Its Wurzite phase is a very wide band gap semiconductor material. It has not only a high thermal conductivity, a high electrical resistance, a high electrical insulating constant, a high breakdown voltage and an excellent mechanical strength but also stable thermal and chemical characteristics. This study is on the preferred orientation characteristics of AlN thin films by reactive evaporation using $NH_3$. We have manufactured an AlN thin film and then have checked the crystal structure and the preferred orientation by using an X-ray diffractometer and have also observed the microstructure with TEM and AlN chemical structure with FT-IR. We can manufacture an excellent AlN thin film by reactive evaporation using $NH_3$ under 873 K of substrate temperature. The AlN thin film growth is dependent on Al supplying and $NH_3$ has been found to be effective as a source of $N_2$. However, the nuclear structure of AlN did not occur randomly around the substrate a particle of the a-axis orientation in fast growth speed becomes an earlier crystal structure and is shown to have an a-axis preferred orientation. Therefore, reactive evaporation using $NH_3$ is not affected by provided $H_2$ amount and this can be an easy a-axis orientation method.

고내식성의 신 마그네슘 코팅막 제작 (Preparation of New Corrosive Resistive Magnesium Coating Films)

  • 이명훈
    • Journal of Advanced Marine Engineering and Technology
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    • 제20권5호
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    • pp.103-113
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    • 1996
  • The properties of the deposited film depend on the deposition condition and these, in turn depend critically on the morphology and crystal orientation of the films. Therefore, it is important to clarify the nucleation occurrence and growth stage of the morphology and orientation of the film affected by deposition parameters, e.g. the gas pressure and bias voltage etc. In this work, magnesium thin flims were prepared on cold-rolled steel substrates by a thermo-eletron activation ion plating technique. The influence of nitrogen gas pressure and substrate bias voltage on their crystal orientation and morphology of the coated films were investigated by scanning electron microscopy (SEM) and X-ray diffraction, respectively. The diffraction peaks of magnesium film became less sharp and broadened with the increase of nitrogen gas pressure. With an increase in nitrogen gas pressure, flim morphology changed from colum nar to granular structure, and surface crystal grain-size decreased. The morphology of films depended not only on gas pressure but also on bias voltage, i.e., the effect of increasing bias voltage was similar to that of decreasing gas pressure. The effect of crystal orientation and morphology of magnesium films on corrosion behaviors was estimated by measuring anodic polarization curves in deaerated 3%NaCl solution. Magnesium, in general, has not a good corrosion resistance in all environments. However, these magnesium films prepared by changing nitrogen gas pressure showed good corrosion resistance. Among the films, magnesium films which exhibited granular structure had the highest corrosion resistance. The above phenomena can be explained by applying the effects of adsorption, occlusion and ion sputter of nitrogen gas.

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스핀 코팅법으로 증착한 (Bi1La1)4Ti3O12 박막의 후속 열공정에 따른 입자 크기 및 결정 방향성 변화 (Thermal Process Effects on Grain Size and Orientation in (Bi1La1)4Ti3O12 Thin Film Deposited by Spin-on Method)

  • 김영민;김남경;염승진;장건익;류성림;선호정;권순용
    • 한국전기전자재료학회논문지
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    • 제20권7호
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    • pp.575-580
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    • 2007
  • A 16 Mb 1T1C FeRAM device was integrated with BLT capacitors. But a lot of cells were failed randomly during the measuring the bit-line signal distribution of each cell. The reason was revealed that the grain size and orientation of the BLT thin film were severely non-uniform. And the grain size and orientation were severely affected by the process conditions of post heat treatment, especially nucleation step. The optimized annealing temperature at the nucleation step was $560^{\circ}C$. The microstructure of the BLT thin film was also varied by the annealing time at the step. The longer process time showed the finer grain size. Therefore, the uniformity of the grain size and orientation could be improved by changing the process conditions of the nucleation step. The FeRAM device without random bit-fail cell was successfully fabricated with the optimized BLT capacitor and the sensing margin in bit-line signal distribution of it was about 340 mV.

폴리이미드 전구체 초박막의 분자배향과 표면상태에 관한 연구 (A Study on the Molecular Orientation and the Surface Mophology of polyimide precursor ultrathin film)

  • 정순욱
    • 한국응용과학기술학회지
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    • 제22권3호
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    • pp.228-233
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    • 2005
  • Langmuir-Blodgett(LB) technique can speak the best candidate of the future molecular electronic devices. But, precursor as molecular ultrathin film devices require the bulk property that are influenced by the molecular orientation. So, this device is one of current interest in molecular electronic device development of new materials. In this study, quantitative evaluation of molecular orientation in LB films of polyamic acid alkylamine salt was performed analysis experiment comparing the absorption or transmission intensity of the FT-IR spectrometer and reflection or absorption spectra with UV-visible absorption spectra. It could find that the polar angle(${\theta}$) of the dipole moment appears in about $68^{\circ}$ and the tilting angle of the alkyl chain is about $11.5^{\circ}$.

Si 기판과 일정방향관계를 갖는 근사단결정 다이아몬드 박막 합성 (Highly Oriented Textured Diamond Film on Si Substrate)

  • 백영준;은광용
    • 한국세라믹학회지
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    • 제31권4호
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    • pp.457-463
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    • 1994
  • The growth condition of highly oriented textured diamond film on a (100) Si substrate was investigated as a function of texture orientation. The growth process consisted of biased enhanced nucleation (BEN) and texture growth. The substrate was under the plasma of 6% CH4-94% H2 with negative bias of 200V during the BEN which grounded during the texture growth. The texture orintation changed from <100> to <110> by increasing substrate temperature. The nearly perfect match between textured diamond grains and the Si substrate could be obtained under the condition of <100> texture. The degree of tilt mismatch increased with the increase of deviation of texture orientation from <100>. The degree of twist mismatch appeared to increase abruptly beyond the critical deviation of texture orientation from <100> because the nuclei having the same orientation as the substrate were no more preferred grains for texture formation.

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대향타겟식 스퍼터법으로 제작한 $Ni_{81}Fe_{19}$박막의 결정배향성 (Crystal orientation of $Ni_{81}Fe_{19}$ thin film prepared by facing targets sputtering method)

  • 김용진;박창옥;최동진;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.185-188
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    • 2000
  • Crystal orientation of Ni$_{18}$ $Fe_{19}$ thin films prepared by facing targets sputtering system was investigated. FTS system can deposit a high quality thin film and control deposition conditions in wide range. T he crystallographic characteristics of Ni$_{18}$ $Fe_{19}$ thin films on variation of thickness and substrate tempera ture was investigated by XRD and AFM. As a result, we obtained Ni$_{18}$ $Fe_{19}$ thin films prepared at subst rate temperature room temperature, thickness 160nm and over revealed good crystal orientation to [111] direction.irection.

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기판온도에 따른 ZnO박막의 결정구조 및 전기적 특성 (The effect of substrate temperature on crystallography and electrical properties of ZnO thin films)

  • 금민종;성하윤;손인환;장경욱;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.415-418
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    • 1999
  • In this paper we studied that the effect of substrate temperature on crystallography and electrical properties of ZnO thin films. Facing Targets Sputtering system can deposit thin films in plasma-free situation and change the deposition condition in wide range. And prepared thin film\`s c-axis orientation and grain size were analyzed by XRD(x-ray diffractometer). In the results, we suggest that FTS system is very suitable to preparing high quality ZnO thin film with good c-axis orientation.

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Langmuir-Blodgett 법을 이용한 유기초박막의 제작조건 및 분자배향에 관한 연구 (A Study on the Deposition Condition and Molecular Orientation of the Ultrathin Organic Films using the Langmuir-Blodgett Technique)

  • 김태완;신동명;최강훈;권영수;강도열
    • 대한전기학회논문지
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    • 제43권2호
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    • pp.303-311
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    • 1994
  • Optimum conditions for the deposition of N-docosylquinolium-TCNQ ultrathin organic films using the Langmuir-Blodgett etchnique and the molecular orientation and alignment of the LB films were studied. The $\pi$-A isotherm of the N-docosylquinolium-TCNQ was measured at the air-water interface varying with the subphase temperature, subphase pH, compressing speed and amounts of solutions for spreading. The LB film was deposited under the surface pressure of 30mN.m and 45mN/m and other deposition conditions. The molecular orientation and alignment of the LB films were studied by the polarization absorption technique. The $\pi$-A isotherm showed that the stable N-docosylquinolium -TCNQ monolayer was formed on the water surface at the condition of 25$^{\circ}C$,pH 5.6, molecular density of 2.1${\times}$10S014T~2.6${\times}$10S014T/cmS02T. The LB film was deposited under the surface pressure of 45mN/m had better packing density, orientation and alignment than the film of 30mN/m.