• Title/Summary/Keyword: Film Heater

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The study on formation of ITO by DC reacrive magnetron sputtering (반응성 직류마그네트론 스퍼터링에 의한 ITO박막 형성에 관한 연구)

  • 하홍주;조정수;박정후
    • Electrical & Electronic Materials
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    • v.8 no.6
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    • pp.699-707
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    • 1995
  • The material that is both conductive in electricity and transparent to the visible ray is called transparent conducting thin film. It has many fields of application such as Solar Cell, Liquid Crystal display, Vidicon on T.V, transparent electrical heater, selective optical filter, and a optical electric device , etc. In the recent papers on several TCO( transparent conducting oxide ) material, the study is mainly focusing on ITO(indium tin oxide) because ITO shows good results on both optical and electrical properties. Nowaday, in the development of LCD(Liquid Crystal display), the low temperature process to reduce the production cost and to deposit ITO on polymer substrate (or low melting substrate) has been demanded. In this study, we prepared indium tin oxide(ITO) by a cylindrical DC magnetron sputtering with Indium-tin (9:1) alloy target instead of indium-tin oxide target. The resistivity of the film deposited in oxygen partial pressure of 5% and substrate temperature of 140.deg. C. is 1.6*10$\^$-4/.ohm..cm with 85% optical transmission in viaible ray.

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Effect of substrate bias on electrical properties of ZnO:Al transparent conducting film (ZnO:Al투명전도막의 전기적 특성에 미치는 Bias 전압의 영향)

  • Park, Kang-Il;Kim, Byung-Sub;Lim, Dong-Gun;Lee, Su-Ho;Kwak, Dong-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.408-411
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    • 2003
  • Al doped Zinc Oxide(ZnO:Al) films, which is widely used as a transparent conductor in optoelectronic devices such as solar cell, liquid crystal display, plasma display panel, thermal heater, and other sensors, were prepared by using the capacitively coupled DC magnetron sputtering method. The influence of the substrate temperature, working gas pressure, discharge power and doping amounts of Al on the electrical, optical and morphological properties were investigated experimentally. The effect of bias voltage on the electrical properties of ZnO thin film were also studied. Films with lowest resistivity of $5.4{\times}10^{-4}\;{\Omega}-cm$ have been achieved in case of films deposited at 1mtorr, $400^{\circ}C$ with a substrate bias of +10V for 840nm in film thickness.

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Experimental investigation of two-phase flow and wall heat transfer during reflood of single rod heater (단일 가열봉의 재관수 시 2상유동 및 벽면 열전달에 관한 실험적 연구)

  • Park, Youngjae;Kim, Hyungdae
    • Journal of the Korean Society of Visualization
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    • v.18 no.3
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    • pp.23-34
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    • 2020
  • Two-phase flow and heat transfer characteristics during the reflood phase of a single heated rod in the KHU reflood experimental facility were examined. Two-phase flow behavior during the reflooding experiment was carefully visualized along with transient temperature measurement at a point inside the heated rod. By numerically solving one-dimensional inverse heat conduction equation using the measured temperature data, time-resolved wall heat flux and temperature histories at the interface of the heated rod and coolant were obtained. Once water coolant was injected into the test section from the bottom to reflood the heated rod of >700℃, vast vapor bubbles and droplets were generated near the reflood front and dispersed flow film boiling consisted of continuous vapor flow and tiny liquid droplets appeared in the upper part. Following the dispersed flow film boiling, inverted annular/slug/churn flow film boiling regimes were sequentially observed and the wall temperature gradually decreased. When so-called minimum film boiling temperature reached, the stable vapor film between the heated rod and coolant was suddenly collapsed, resulting in the quenching transition from film boiling into nucleate boiling. The moving speed of the quench front measured in the present study showed a good agreement with prediction by a correlation in literature. The obtained results revealed that typical two-phase flow and heat transfer behaviors during the reflood phase of overheated fuel rods in light water nuclear reactors are well reproduced in the KHU facility. Thus, the verified reflood experimental facility can be used to explore the effects of other affecting parameters, such as CRUD, on the reflood heat transfer behaviors in practical nuclear reactors.

An Experimental Study on the Manufacturing Method and Performance of Planar Thick Film Heaters for Electric Vehicle Heating (전기자동차의 난방용 면상 후막히터의 제조방법과 성능에 관한 실험적 연구)

  • Chae-Yeol Lee;Jong-Han Im;Jae-Wook Lee;Sang-Hee Park
    • Journal of the Korean Society of Industry Convergence
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    • v.27 no.3
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    • pp.685-692
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    • 2024
  • Currently used heating elements are metal and non-metal heating elements, including various types of heaters, and resistance line heating elements have a problem of decreasing thermal efficiency over time, so to solve this problem, a planar heating element using high-purity carbon materials and oxidation-resistant inorganic compounds was applied. Through the manufacture of planar heating elements using CNT, ruthenium composite materials, and ruthenium oxide, physicochemical performance and capacity were increased, and instantaneous responsiveness was increased. Through thick film technology applicable to various base bodies, fine patterns were formed by the screening method in consideration of the fact that the performance of the heat source depends on the viscosity and pattern shape. The heating element was manufactured by thick film printing technology by mixing ruthenium oxide, CNT, Ag, etc. The characteristics of each paste were analyzed through viscosity measurement, and STS 430 was used as a base. Surface temperature and efficiency were measured by testing heaters manufactured for small wind tunnels and real-vehicle experiments. The surface temperature decreased as the air volume increased, and the optimal system boundary was found to be about 200 mm. Among the currently used heating elements, this paper manufactured a planar heating element using thick film technology to find out the relationship between air volume and temperature, and to study the surface temperature.

Chromel-Alumel Thermoelectric Flow Sensor Fabricated on Dielectric(Si3N4/SiO2/Si3N4) Membrane (유전체(Si3N4/SiO2/Si3N4)멤브레인 위에 제작된 크로멜-알루멜 열전 유량센서)

  • Lee, Hyung-Ju;Kim, Jin-Sup;Kim, Yeo-Hwan;Lee, Jung-Hee;Choi, Yong-Moon;Park, Se-Il
    • Journal of Sensor Science and Technology
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    • v.12 no.3
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    • pp.103-111
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    • 2003
  • A chromel-alumel thermoelectric flow sensor using $Si_3N_4/SiO_2/Si_3N_4$ thermal isolation membrane was fabricated. Temperature coefficient of resistance of thin film Pt-heater was about $0.00397/^{\circ}C$, and Seebeck coefficient of chromel-alumel thermocouple was about $36\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and $N_2$-flow sensitivity increased as heater voltage increased or the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_2$-flow sensitivity and thermal response time of the sensor were about $1.5\;mV/sccm^{1/2}$ and 0.18 sec., respectively. Linear range in flow sensitivity of the flow sensor was wider than that of Bi-Sb flow sensor.

A simple device to measure the relative rate of heat loss through plastic coverings from greenhouse (그린하우스의 프라스틱 피복재를 통한 상대적 열손실 속도를 측정하는 간단한 장치)

  • Jung, Jin;Park, Byung-Bin
    • Korean Journal of Environmental Agriculture
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    • v.8 no.2
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    • pp.142-147
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    • 1989
  • In this report, we set up a simple device which enabled us to obtain data useful to estimate the relative capacity of thermal energy retention of greenhouse built with various plastic coverings. A box($20cm{\times}20cm{\times}30cm$) framed with flexiglass at the edges and covered with thin plastic films was made, in which were placed a thermostat-controlled nichrom wire heater and a thermal probe made of thermister to monitor temperature changes. A wheaston-bridge type transducer and a chart recorder were used to record the changes of temperature inside the box The data obtained by using the device showed that the relative rate of heat toss through plastic films with identical thickness decreased in the order of PE film>EVA film>PVC film and that IR additives such as fine silica gel improved the insulating power of plastic films. This observations are in well accord with general information, demostrating the feasibility of the device in usefulness for the purpose of screening of various commercial plastic coverings.

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IZO/Ag/IZO Multilayers Prepared by Magnetron Sputtering for Flexible Transparent Film Heaters (마그네트론 스퍼터링 법을 이용한 IZO/Ag/IZO 다층 박막 투명 면상 발열체)

  • Park, So-Won;Gang, Dong-Ryeong;Kim, Na-Yeong;Hwang, Seong-Hun;Jeon, Seung-Hun;ZhaoPin, ZhaoPin;Kim, Tae-Hun;Kim, Seo-Han;Park, Cheol-U;Song, Pung-Geun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.114.2-114.2
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    • 2017
  • Transparent film heaters (TFHs) based on Joule heating are currently an active research area. However, TFHs based on an indium tin oxide (ITO) monolayer have a number of problems. For example, heating is concentrated in part of the device. Also, heating efficiency is low because it has high sheet resistance ($R_S$). Resistance of indium zinc oxide (IZO) is similar to ITO and it can be used to flexible applications due to its amorphous structure. To solve these problems, our study introduced hybrid layers of IZO/Ag/IZO deposited by magnetron sputtering, and the electrical, optical, and thermal properties were estimated for various thickness of the metal interlayer. It was found that the sheet resistance of the multilayer was mainly dependent on the thickness of the Ag layers. The $R_S$ of IZO(40)/Ag/IZO(40nm) multilayer was 5.33, 3.29, $2.15{\Omega}/{\Box}$ for Ag thickness of 10, 15, and 20nm, respectively, while the $R_S$ of an IZO monolayer(95nm) was $59.58{\Omega}/{\Box}$. The optical transmittance at 550nm for the IZO(95nm) monolayer is 81.6%, and for the IZO(40)/Ag/IZO(40nm) multilayers with Ag thickness 10, 15 and 20nm, is for 72.8, 78.6, and 63.9%, respectively. The defrost test showed that the film with the lowest RS had the highest heat generation rate (HGR) for the same applied voltage. The results indicated that IZO(40)/Ag(15)/IZO(40nm) multilayer has the best suitable property, which is a promising thin film heater for the application in vehicle windshield.

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Characteristics of ITO/Ag/ITO Hybrid Layers Prepared by Magnetron Sputtering for Transparent Film Heaters

  • Kim, Jaeyeon;Kim, Seohan;Yoon, Seonghwan;Song, Pungkeun
    • Journal of the Optical Society of Korea
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    • v.20 no.6
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    • pp.807-812
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    • 2016
  • Transparent film heaters (TFHs) based on Joule heating are currently an active research area. However, TFHs based on an indium tin oxide (ITO) monolayer have a number of problems. For example, heating is concentrated in only part of the device. Also, heating efficiency is low because it has high sheet resistance ($R_s$). To address these problems, this study introduced hybrid layers of ITO/Ag/ITO deposited by magnetron sputtering, and the electrical, optical, and thermal properties were estimated for various thicknesses of the metal interlayer. The $R_s$ of ITO(40)/Ag/ITO(40 nm) hybrid TFHs were 5.33, 3.29 and $2.15{\Omega}/{\Box}$ for Ag thicknesses of 10, 15, and 20 nm, respectively, while the $R_s$ of an ITO monolayer (95 nm) was $59.58{\Omega}/{\Box}$. The maximum temperatures of these hybrid TFHs were 92, 131, and $145^{\circ}C$, respectively, under a voltage of 3 V. And that of the ITO monolayer was only $32^{\circ}C$. For the same total thickness of 95 nm, the heat generation rate (HGR) of the hybrid produced a temperature approximately $100^{\circ}C$ higher than the ITO monolayer. It was confirmed that the film with the lowest $R_s$ of the samples had the highest HGR for the same applied voltage. Overall, hybrid layers of ITO/Ag/ITO showed excellent performance for HGR, uniformity of heat distribution, and thermal response time.

Analysis of Heat and Mass Transfer on Helical Absorber (헬리컬 흡수기의 흡수 열물질전달 해석)

  • Gwon, O-Gyeong;Im, Jong-Geuk;Yun, Jeong-In;Kim, Seon-Chang;Yun, Jae-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.11
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    • pp.1428-1436
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    • 2000
  • The absorption of vapor involves simultaneous heat and mass transfer in the vapor/liquid system. In this paper, a numerical study for vapor absorption process into LIBr-H$_2$O solution film flowing over helical absorber has been carried out. Axisymmetric cylindrical coordinate system was adopted to model the helical tube and the transport equations were solved by the finite volume method. The effects of operating conditions, such as the cooling water temperature. the system pressure, the film Reynolds number and the solution inlet concentration have been investigated in view of the absorption mass flux and the total absorption mass flux and the total absorption rate. The results for the temperature and concentration profiles, as well as the local absorption mass flux at the helical absorber are presented. It is shown that solution inlet concentration affected other than operation conditions for a mass flux.

Sub-ppm level MEMS gas sensor (서브 피피엠 레벨 미세기전 가스 센서)

  • Ko, Sang-Choon;Jun, Chi-Hoon;Song, Hyun-Woo;Park, Seon-Hee
    • Journal of Sensor Science and Technology
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    • v.17 no.3
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    • pp.183-187
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    • 2008
  • A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.