• 제어로봇시스템학회:학술대회논문집
• /
• 1993.10a
• /
• pp.981-986
• /
• 1993

A fast algorithm based upon geometry to measure the wafer center and the position of a wafer fiducial mark is developed and implemented on a single-axis aligner. Design issues for a controller when a National Semiconductor's LM629 is used as a PID controller of an aligner are discussed. Performance of an aligner with the algorithm and a LM629 was measured in experiments. The result shows that it takes about 4.1 seconds on average to align a hot wafer supported by metal pins on the chuck.

• Journal of the Semiconductor & Display Technology
• /
• v.6 no.1 s.18
• /
• pp.43-48
• /
• 2007

For exposure systems, very accurate alignment between the mask and the substrate is indispensable. In this paper, an automatic alignment system using machine vision for exposure systems is described. Machine vision algorithms are described in detail including extraction of an alignment mark's center position and camera calibration. Methods for extracting parameters for alignment are also presented with some compensation techniques to reduce alignment time. Our alignment system was implemented with a vision system and motion control stages. The performance of the alignment system has been extensively tested with satisfactory results. The performance evaluation shows alignment accuracy of lum within total alignment time of about $2{\sim}3$ seconds including stage moving time.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.6
• /
• pp.88-95
• /
• 2003

This paper presents the measurement and correction method of PCB alignment errors for PCB screen printer. Electronic equipment is getting smaller and yet must satisfy high performance standard. Therefore, there is a great demand for PCB with high density. However conventional PCB screen printer doesn't have enough accuracy to accommodate the demand fur high-resolution circuit pattern and high-density mounting capacity of electronic chips. It is because the alignment errors of PCB occur when it is loaded to the screen printer. Therefore, this study focuses on the development of the system which is able to measure and correct alignment errors with high-accuracy. An automatic optical inspection part measures the PCB alignment errors using machine vision, and the high-accuracy 3-axis stage makes correction for these errors. This system used two CCD cameras to get images of two fiducial marks of PCB. The geometrical relationship between PCB, cameras, and xy$\theta$ stage is derived, and analytical equations for alignment errors are also obtained. The unknown parameters including camera declining angles and etc. can be obtained by initialization process. Finally, the proposed algorithm is verified by experiments by using test bench.

• Design & Manufacturing
• /
• v.14 no.2
• /
• pp.14-20
• /
• 2020

In OLED panel production process, it is necessary to cut a part of protective film as a preprocess for lighting inspection. The current method is to recognize only the fiducial mark of the cut-out panel. Bare Glass Cutting does not compensate for machining cumulative tolerances. Even though process defects still occur, it is necessary to develop technology to solve this problem because only the Align Mark of the panel that has already been cut is used as the reference point for alignment. There is a lot of defective lighting during panel lighting test because the correct protective film is not cut on the panel power and signal application pad position. In laser cutting process to remove the polarizing film / protective film / TSP film of OLED panel, laser processing is not performed immediately after the panel alignment based on the alignment mark only. Therefore, in this paper, we performed real time inspection which minimizes the mechanism tolerance by correcting the laser cutting path of the protective film in real time using Machine Vision. We have studied calibration algorithm of Vision Software coordinate system and real image coordinate system to minimize inspection resolution and position detection error and edge detection algorithm to accurately measure edge of panel.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.2 no.2
• /
• pp.67-74
• /
• 2003

This paper presents the development of the Inspection machine for SMD mounted on cream solder of PCB. There are mounting errors of SMD such as misalignment, missing part, wrong orientation, wrong polarity and so on. The main hardware of the system consists of a machine vision part and a motion control part. Operating software has been developed in GUI environment to help user convenience. The Inspection Jobs consist of two procedures, that is, creation of the inspection reference data and automatic inspection. The Inspection reference data has a tree structure of linked list including PCB information, blocks, components, windows, and inspection methods. This paper presents versatile inspection methods which include a section length method, a projection method and histogram method. Therefore, user can choose the suitable procedure for various components. Finally, the automatic Inspection procedure using the reference data checks the mounting errors of components.

• Journal of information and communication convergence engineering
• /
• v.20 no.1
• /
• pp.65-72
• /
• 2022

With the mark of the fourth industrial revolution, the smart factory is evolving into a new future manufacturing plant. As a human-machine-interactive tool, augmented reality (AR) helps workers acquire the proficiency needed in smart factories. The valuable data displayed on the AR device must be delivered intuitively to users. Current AR applications used in smart factories lack user movement calibration, and visual fiducial markers for position correction are detected only nearby. This paper demonstrates a marker-based object detection using perspective projection to adjust augmented content while maintaining the user's original perspective with displacement. A new angle, location, and scaling values for the AR content can be calculated by comparing equivalent marker positions in two images. Two experiments were conducted to verify the implementation of the algorithm and its practicality in the smart factory. The markers were well-detected in both experiments, and the applicability in smart factories was verified by presenting appropriate displacement values for AR contents according to various movements.

• Journal of the Semiconductor & Display Technology
• /
• v.5 no.4 s.17
• /
• pp.11-15
• /
• 2006

Expose equipment system that is used for manufacturing process of Flat Panel Display, is most important equipment in whole process. Expose equipment that is for making pattern of mask on substrate, consists of optical part, stage part and transport part. The stage is an important part that aligns mask and substrate for delivering pattern of mask to substrate exactly. In this paper, control system of expose stage that is able to use mask and substrate of diverse size, with PC controller using GUI interface instead of PLC control system. The existing PLC control system does not have the suitable structure for using mask of diverse size. GUI interface integration control system is based on PC. So it has the advantage of convenient use and active operation. We embodied PLC control system in integration control system based on PC, and verified utility possibility through the standard test course.

• Journal of Radiation Protection and Research
• /
• v.34 no.3
• /
• pp.137-143
• /
• 2009

This study was conducted to evaluate the accuracy of CyberKnife $Synchrony^{TM}$ respiratory tracking system which was applied to Stereotactic Radiosurgery (SRS) for moving tumors in chest and abdomen with breathing motion. For accurate evaluation, gold fiducial marks were implanted into a moving phantom. The moving phantom was a cube imbedding an acryl ball as a target. The acryl ball was prescribed to 20 Gy at 70% of isodose curve in a virtual treatment and radiochromic films were inserted into the acryl ball for dose verification and tracking accuracy evaluation. The evaluation of position tracking consists of two parts: fiducial mark tracking in a stationary phantom and $Synchrony^{TM}$ respiratory tracking in a moving phantom. Each measurement was done in three directions and was repeated to 5 times. Range of position error was 0.1957 mm to 0.6520 mm in the stationary phantom and 0.4405 mm to 0.7665 mm in the moving phantom. Average position error was 0.3926 mm and 0.5673 mm in the stationary phantom and the moving phantom respectively. This study evaluates the accuracy of CyberKnife $Synchrony^{TM}$ Respiratory tracking system, and confirms the usefulness when it's used for Stereotactic Radiosurgery of body organs.