Characterization of ferroeletric properties of PZT thin film deposited by APMOCVD
(APMOCVD 법에 의해 증착된 PZT[Pb(Zr,Ti)$O_3$ 박막의 강유전 특성에 관한연구)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1994.11a
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- pp.10-10
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- 1994