Precision Position Control System of Piezoelectric Actuator Using Inverse Hysteresis Modeling and Error Learning Method

역 히스테리시스 모델링과 오차학습을 이용한 압전구동기의 초정밀 위치제어

A piezoelectric actuator yields hysteresis effect due to its composed ferroelectric. Hysteresis nonlinearty is neglected when a piezoelectric actuator moves with short stroke. However when it moves with long stroke and high frequency, the hysteresis nonlinearty can not be neglected. The hysteresis nonlinearty of piezoelectric actuator degrades the control performance in precision position control. In this paper, in order to improve the control performance of piezoelectric actuator, an inverse modeling scheme is proposed to compensate the hysteresis nonlinearty problem. And feedforward - feedback controller is proposed to give a good tracking performance. The Feedforward controller is inverse hysteresis model, Nueral network and PID control is used as a feedback controller. To show the feasibility of the proposed controller and hysteresis modeling, some experiments have been carried out. It is concluded that the proposed control scheme gives good tracking performance